JPS5252567A - Production of semiconductor element - Google Patents

Production of semiconductor element

Info

Publication number
JPS5252567A
JPS5252567A JP12877275A JP12877275A JPS5252567A JP S5252567 A JPS5252567 A JP S5252567A JP 12877275 A JP12877275 A JP 12877275A JP 12877275 A JP12877275 A JP 12877275A JP S5252567 A JPS5252567 A JP S5252567A
Authority
JP
Japan
Prior art keywords
production
semiconductor element
electrodes
film
diced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12877275A
Other languages
Japanese (ja)
Inventor
Kazumi Unno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12877275A priority Critical patent/JPS5252567A/en
Publication of JPS5252567A publication Critical patent/JPS5252567A/en
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Dicing (AREA)
  • Led Devices (AREA)

Abstract

PURPOSE: To make possible etching without attacking existing electrodes and form a passivation film by H2O2 on diced faces by protecting the surface attached with electrodes using an SiO2 film or PSG film formed by a CVD method prior to dicing of a group III-V semiconductor wafer.
COPYRIGHT: (C)1977,JPO&Japio
JP12877275A 1975-10-25 1975-10-25 Production of semiconductor element Pending JPS5252567A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12877275A JPS5252567A (en) 1975-10-25 1975-10-25 Production of semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12877275A JPS5252567A (en) 1975-10-25 1975-10-25 Production of semiconductor element

Publications (1)

Publication Number Publication Date
JPS5252567A true JPS5252567A (en) 1977-04-27

Family

ID=14993077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12877275A Pending JPS5252567A (en) 1975-10-25 1975-10-25 Production of semiconductor element

Country Status (1)

Country Link
JP (1) JPS5252567A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62238641A (en) * 1986-04-09 1987-10-19 Rohm Co Ltd Method of coating insulating film onto separating surface of semiconductor pellet

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62238641A (en) * 1986-04-09 1987-10-19 Rohm Co Ltd Method of coating insulating film onto separating surface of semiconductor pellet

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