JPS52141178A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS52141178A JPS52141178A JP5808076A JP5808076A JPS52141178A JP S52141178 A JPS52141178 A JP S52141178A JP 5808076 A JP5808076 A JP 5808076A JP 5808076 A JP5808076 A JP 5808076A JP S52141178 A JPS52141178 A JP S52141178A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- production
- semiconductor device
- grooves
- dicing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: Dicing yield is improved by cutting grooves not reaching substrate in an insulation and protection film covering the mesa grooves formed on the substrate, forming scribe lines down to the substrate from said grooves with a laser beam then dicing the substrate.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5808076A JPS52141178A (en) | 1976-05-19 | 1976-05-19 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5808076A JPS52141178A (en) | 1976-05-19 | 1976-05-19 | Production of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52141178A true JPS52141178A (en) | 1977-11-25 |
JPS5753975B2 JPS5753975B2 (en) | 1982-11-16 |
Family
ID=13073929
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5808076A Granted JPS52141178A (en) | 1976-05-19 | 1976-05-19 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52141178A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52149478A (en) * | 1976-06-07 | 1977-12-12 | Nec Home Electronics Ltd | Separation method of mesa type semiconductor elements |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59110282U (en) * | 1983-01-13 | 1984-07-25 | 本田技研工業株式会社 | Handle attachment device for power tiller |
-
1976
- 1976-05-19 JP JP5808076A patent/JPS52141178A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52149478A (en) * | 1976-06-07 | 1977-12-12 | Nec Home Electronics Ltd | Separation method of mesa type semiconductor elements |
Also Published As
Publication number | Publication date |
---|---|
JPS5753975B2 (en) | 1982-11-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS52141178A (en) | Production of semiconductor device | |
JPS52128063A (en) | Manufacture of semiconductor device | |
JPS52120773A (en) | Semiconductor element | |
JPS5376760A (en) | Semiconductor rectifying device | |
JPS5353254A (en) | Semiconductor device | |
JPS5314560A (en) | Production of semiconductor device | |
JPS5336463A (en) | Manufacture of semiconductor device | |
JPS5415669A (en) | Manufacture of mesa-type semiconductor device | |
JPS5362462A (en) | Production of semiconductor divice | |
JPS5336181A (en) | Production of semiconductor device | |
JPS5432067A (en) | Semiconductor device and its manufacture | |
JPS52135263A (en) | Production of semiconductor device | |
JPS5325363A (en) | Semiconductor element | |
JPS5428566A (en) | Manufacture of semiconductor device | |
JPS5346270A (en) | Production of semiconductor device | |
JPS5361985A (en) | Semiconductor laser | |
JPS52143767A (en) | Production of semiconductor device | |
JPS528787A (en) | Semiconductor device process | |
JPS5376762A (en) | Simiconductor device | |
JPS5377168A (en) | Production of semiconductor device | |
JPS52127750A (en) | Production of semiconductor unit | |
JPS5211761A (en) | Method of cutting semiconductor wafers | |
JPS5436192A (en) | Manufacture for semiconductor | |
JPS52154373A (en) | Production of semiconductor device | |
JPS5423471A (en) | Manufacture for transistor |