JPS52141178A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52141178A
JPS52141178A JP5808076A JP5808076A JPS52141178A JP S52141178 A JPS52141178 A JP S52141178A JP 5808076 A JP5808076 A JP 5808076A JP 5808076 A JP5808076 A JP 5808076A JP S52141178 A JPS52141178 A JP S52141178A
Authority
JP
Japan
Prior art keywords
substrate
production
semiconductor device
grooves
dicing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5808076A
Other languages
Japanese (ja)
Other versions
JPS5753975B2 (en
Inventor
Toshiyuki Fujii
Katsuhiro Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5808076A priority Critical patent/JPS52141178A/en
Publication of JPS52141178A publication Critical patent/JPS52141178A/en
Publication of JPS5753975B2 publication Critical patent/JPS5753975B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: Dicing yield is improved by cutting grooves not reaching substrate in an insulation and protection film covering the mesa grooves formed on the substrate, forming scribe lines down to the substrate from said grooves with a laser beam then dicing the substrate.
COPYRIGHT: (C)1977,JPO&Japio
JP5808076A 1976-05-19 1976-05-19 Production of semiconductor device Granted JPS52141178A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5808076A JPS52141178A (en) 1976-05-19 1976-05-19 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5808076A JPS52141178A (en) 1976-05-19 1976-05-19 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS52141178A true JPS52141178A (en) 1977-11-25
JPS5753975B2 JPS5753975B2 (en) 1982-11-16

Family

ID=13073929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5808076A Granted JPS52141178A (en) 1976-05-19 1976-05-19 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52141178A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52149478A (en) * 1976-06-07 1977-12-12 Nec Home Electronics Ltd Separation method of mesa type semiconductor elements

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59110282U (en) * 1983-01-13 1984-07-25 本田技研工業株式会社 Handle attachment device for power tiller

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52149478A (en) * 1976-06-07 1977-12-12 Nec Home Electronics Ltd Separation method of mesa type semiconductor elements

Also Published As

Publication number Publication date
JPS5753975B2 (en) 1982-11-16

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