JPS55128131A - Semiconductor pressure senser - Google Patents
Semiconductor pressure senserInfo
- Publication number
- JPS55128131A JPS55128131A JP3559979A JP3559979A JPS55128131A JP S55128131 A JPS55128131 A JP S55128131A JP 3559979 A JP3559979 A JP 3559979A JP 3559979 A JP3559979 A JP 3559979A JP S55128131 A JPS55128131 A JP S55128131A
- Authority
- JP
- Japan
- Prior art keywords
- passivation
- diaphragm
- zero point
- oxide film
- semiconductor pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
PURPOSE: To obtain a semiconductor pressure senser of a stable electrical characteristic and a small zero point variation due to the atmospheric temperature by changing the thickness of an oxide film for passivation of the diaphragm part and constrained part other than the diaphragm part.
CONSTITUTION: A diaphragm part 15 on a silicone base plate 12 is tightly sealed by a glass cap 25 for forming a reference pressure chamber 24 such as a vacuum chamber or the like, and the thickness of an oxide film 22 for passivation on piezo resistors 16a and 16b can be made less than 1/3 that of a field oxide film for passivation of the constrained part 13 other than the diaphragm part 15 because its deterioration is prevented by the tight sealing. The passivation film at the part required for electrical insulation is made thick, and the passivation film of the diaphragm 15 having a thermal expansion coefficient greater than that of silicone forming the base plate 12 and being liable to be affected by the temperature, and having a large zero point resistance is made thin. By this construction, a semiconductor pressure senser having an improved zero point temperature characteristic, and small error and small size.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3559979A JPS55128131A (en) | 1979-03-28 | 1979-03-28 | Semiconductor pressure senser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3559979A JPS55128131A (en) | 1979-03-28 | 1979-03-28 | Semiconductor pressure senser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55128131A true JPS55128131A (en) | 1980-10-03 |
| JPS6154267B2 JPS6154267B2 (en) | 1986-11-21 |
Family
ID=12446272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3559979A Granted JPS55128131A (en) | 1979-03-28 | 1979-03-28 | Semiconductor pressure senser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55128131A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4930353A (en) * | 1988-08-07 | 1990-06-05 | Nippondenso Co., Ltd. | Semiconductor pressure sensor |
| JP4710147B2 (en) * | 2000-06-13 | 2011-06-29 | 株式会社デンソー | Semiconductor pressure sensor |
| US20150292973A1 (en) * | 2014-04-09 | 2015-10-15 | Continental Automotive Systems, Inc. | Humidity resistant sensors and methods of making same |
-
1979
- 1979-03-28 JP JP3559979A patent/JPS55128131A/en active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4930353A (en) * | 1988-08-07 | 1990-06-05 | Nippondenso Co., Ltd. | Semiconductor pressure sensor |
| JP4710147B2 (en) * | 2000-06-13 | 2011-06-29 | 株式会社デンソー | Semiconductor pressure sensor |
| US20150292973A1 (en) * | 2014-04-09 | 2015-10-15 | Continental Automotive Systems, Inc. | Humidity resistant sensors and methods of making same |
| US9574961B2 (en) * | 2014-04-09 | 2017-02-21 | Continental Automotive Systems, Inc. | Humidity resistant sensors and methods of making same |
| US10352806B2 (en) | 2014-04-09 | 2019-07-16 | Continental Automotive Systems, Inc. | Humidity resistant sensors and methods of making same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6154267B2 (en) | 1986-11-21 |
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