JPS5624539A - Absolute pressure sensor - Google Patents

Absolute pressure sensor

Info

Publication number
JPS5624539A
JPS5624539A JP9867779A JP9867779A JPS5624539A JP S5624539 A JPS5624539 A JP S5624539A JP 9867779 A JP9867779 A JP 9867779A JP 9867779 A JP9867779 A JP 9867779A JP S5624539 A JPS5624539 A JP S5624539A
Authority
JP
Japan
Prior art keywords
diaphragm
crystallized glass
absolute pressure
compact
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9867779A
Other languages
Japanese (ja)
Inventor
Kiyoshi Uchida
Toshio Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP9867779A priority Critical patent/JPS5624539A/en
Publication of JPS5624539A publication Critical patent/JPS5624539A/en
Pending legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE: To make the construction of an absolute pressure sensor simple and compact and heighten its reliability, by utilizing a vacuum cell in which a part of the wall is made from a thin circular diaphragm of crystallized glass.
CONSTITUTION: The vacuum cell 10, in which a part of the wall is made from a thin circular diaphragm 12 of crystallized glass, is utilized. Since the diaphragm 12 is deflected depending on the relation between the pressure of a measured medium and vacuum, the absolute pressure can be detected. Because the diaphragm 12 of crystallized glass has prescribed strength against tension, compression and bending and airtightness is maintained even if the thickness of the diaphragm is made small, the diaphragm 12 can be caused to suffer from strain approximate to that for a diaphragm of metal. Because the diaphragm 12 has an electric insulating property, strain gauges, 20W23 do not need to be insulated. Temperature compensation is easy because the coefficient of thermal expansion of the crystallized glass can be freely selected by changing the degree of crystallization of the glass. This results in making constitution simple and compact and heightening reliability.
COPYRIGHT: (C)1981,JPO&Japio
JP9867779A 1979-08-03 1979-08-03 Absolute pressure sensor Pending JPS5624539A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9867779A JPS5624539A (en) 1979-08-03 1979-08-03 Absolute pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9867779A JPS5624539A (en) 1979-08-03 1979-08-03 Absolute pressure sensor

Publications (1)

Publication Number Publication Date
JPS5624539A true JPS5624539A (en) 1981-03-09

Family

ID=14226135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9867779A Pending JPS5624539A (en) 1979-08-03 1979-08-03 Absolute pressure sensor

Country Status (1)

Country Link
JP (1) JPS5624539A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS628029A (en) * 1985-07-03 1987-01-16 Tlv Co Ltd Diaphragm of pressure gauge
JPH03123476A (en) * 1989-10-05 1991-05-27 Amano Jitsugyo Kk Antioxidation-treating equipment in treatment of gas

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS628029A (en) * 1985-07-03 1987-01-16 Tlv Co Ltd Diaphragm of pressure gauge
JPH03123476A (en) * 1989-10-05 1991-05-27 Amano Jitsugyo Kk Antioxidation-treating equipment in treatment of gas

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