JPS5519864A - Semiconductor distortion gauge type pressure sensor and manufacture thereof - Google Patents
Semiconductor distortion gauge type pressure sensor and manufacture thereofInfo
- Publication number
- JPS5519864A JPS5519864A JP9288778A JP9288778A JPS5519864A JP S5519864 A JPS5519864 A JP S5519864A JP 9288778 A JP9288778 A JP 9288778A JP 9288778 A JP9288778 A JP 9288778A JP S5519864 A JPS5519864 A JP S5519864A
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- pressure sensor
- type pressure
- semiconductor distortion
- gauge type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: For obtaining highly reliable semiconductor distortion gauge type pressure sensors with completely hermetic adhesions, to adhere a pellet provided with a pressure sensing diaphragm t he column-shaped member having a thermal expansion coefficient almost equal to that of said pellet and to make holding thereof in a closed container.
CONSTITUTION: The semiconductor mono-crystalline pellet 32 having a pressure sensing diaphragn 31 is adhered to the column-shaped member 34 having the a heat expansion coefficient almost equal to that of said pellet 32 and a hole 33 at the center thereof. Next, the pressure sensor portion 3 made by depositing the layers of the metals 35 and 36 having a large strength of bonding with said member 34 and the metal 37 having an affinity for solder on the other end portion of said member 34 is sticked by to solder to the stem 1 on which a plurality of lead wires 11 are sealed hermetically. Next, the electrode 38 of said pellet 32 and lead wires 11 are interconnected by wires 18, said stem 1 and cap 2 are sticked to each other, and space 4 is kept vacuum. Consequently, a completely-hermetic, highly-reliable semiconductor distortion guage type pressure sensor with solid adhesions can be obtained.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9288778A JPS5519864A (en) | 1978-07-28 | 1978-07-28 | Semiconductor distortion gauge type pressure sensor and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9288778A JPS5519864A (en) | 1978-07-28 | 1978-07-28 | Semiconductor distortion gauge type pressure sensor and manufacture thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5519864A true JPS5519864A (en) | 1980-02-12 |
Family
ID=14066959
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9288778A Pending JPS5519864A (en) | 1978-07-28 | 1978-07-28 | Semiconductor distortion gauge type pressure sensor and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5519864A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5749276A (en) * | 1980-09-09 | 1982-03-23 | Mitsubishi Electric Corp | Manufacture of semiconductor pressure sensor |
JPS5784181A (en) * | 1980-11-14 | 1982-05-26 | Mitsubishi Electric Corp | Formation of sealed chamber of semiconductor pressure sensor |
JPS59140593A (en) * | 1983-01-31 | 1984-08-11 | 富士通株式会社 | Sheet paper storage mechanism |
JPS60253280A (en) * | 1984-05-29 | 1985-12-13 | Omron Tateisi Electronics Co | Semiconductor pressure sensor |
US5289964A (en) * | 1990-01-23 | 1994-03-01 | Nippondenso Co., Ltd. | Fluxless soldering process |
JPH06125096A (en) * | 1992-10-09 | 1994-05-06 | Mitsubishi Electric Corp | Semiconductor pressure sensor |
US5986316A (en) * | 1997-11-26 | 1999-11-16 | Denso Corporation | Semiconductor type physical quantity sensor |
CN110967046A (en) * | 2018-09-28 | 2020-04-07 | 横河电机株式会社 | Sensor unit, transmitter provided with sensor unit, method for manufacturing sensor unit, and method for manufacturing transmitter |
-
1978
- 1978-07-28 JP JP9288778A patent/JPS5519864A/en active Pending
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5749276A (en) * | 1980-09-09 | 1982-03-23 | Mitsubishi Electric Corp | Manufacture of semiconductor pressure sensor |
JPS5784181A (en) * | 1980-11-14 | 1982-05-26 | Mitsubishi Electric Corp | Formation of sealed chamber of semiconductor pressure sensor |
JPS6222537B2 (en) * | 1980-11-14 | 1987-05-19 | Mitsubishi Electric Corp | |
JPS59140593A (en) * | 1983-01-31 | 1984-08-11 | 富士通株式会社 | Sheet paper storage mechanism |
JPS60253280A (en) * | 1984-05-29 | 1985-12-13 | Omron Tateisi Electronics Co | Semiconductor pressure sensor |
US5289964A (en) * | 1990-01-23 | 1994-03-01 | Nippondenso Co., Ltd. | Fluxless soldering process |
JPH06125096A (en) * | 1992-10-09 | 1994-05-06 | Mitsubishi Electric Corp | Semiconductor pressure sensor |
US5986316A (en) * | 1997-11-26 | 1999-11-16 | Denso Corporation | Semiconductor type physical quantity sensor |
CN110967046A (en) * | 2018-09-28 | 2020-04-07 | 横河电机株式会社 | Sensor unit, transmitter provided with sensor unit, method for manufacturing sensor unit, and method for manufacturing transmitter |
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