JPS6237145Y2 - - Google Patents
Info
- Publication number
- JPS6237145Y2 JPS6237145Y2 JP218279U JP218279U JPS6237145Y2 JP S6237145 Y2 JPS6237145 Y2 JP S6237145Y2 JP 218279 U JP218279 U JP 218279U JP 218279 U JP218279 U JP 218279U JP S6237145 Y2 JPS6237145 Y2 JP S6237145Y2
- Authority
- JP
- Japan
- Prior art keywords
- cryogenic
- thermometer
- temperature sensor
- helium
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000001307 helium Substances 0.000 claims description 12
- 229910052734 helium Inorganic materials 0.000 claims description 12
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 12
- 239000000843 powder Substances 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 4
- 239000005388 borosilicate glass Substances 0.000 claims description 3
- 229910000531 Co alloy Inorganic materials 0.000 claims 1
- CLBRCZAHAHECKY-UHFFFAOYSA-N [Co].[Pt] Chemical compound [Co].[Pt] CLBRCZAHAHECKY-UHFFFAOYSA-N 0.000 claims 1
- 229910017052 cobalt Inorganic materials 0.000 claims 1
- 239000010941 cobalt Substances 0.000 claims 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000008602 contraction Effects 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Description
【考案の詳細な説明】
本考案は極低温領域の計測に適した温度計の構
造に関する。[Detailed Description of the Invention] The present invention relates to the structure of a thermometer suitable for measurement in an extremely low temperature region.
LNG・液化水素・液体ヘリウムの利用など極
低温領域に関する研究段階から工業化段階に進ん
できており、工業的な使用に耐える極低温用温度
計の開発が望まれている。 The research stage in the cryogenic region, such as the use of LNG, liquefied hydrogen, and liquid helium, has progressed from the research stage to the industrialization stage, and there is a desire to develop a cryogenic thermometer that can withstand industrial use.
高精度で信頼性も高く取扱い容易な極低温用温
度センサが開発されつつあるが、本考案はこのよ
うな極低温用温度センサを保護管内に収納した、
工業用の用途に適した温度計の構造を提供するこ
とを目的とする。 Cryogenic temperature sensors that are highly accurate, reliable, and easy to handle are being developed, and the present invention is a system that stores such cryogenic temperature sensors in a protective tube.
The purpose is to provide a thermometer structure suitable for industrial use.
第１図は極低温測定に適した温度センサの一例
を示す構造図であり、センサTHは、コバルトの
混合率が0.5mol％近傍の白金・コバルト合金の抵
抗線材料１を、この抵抗線材料と極低温領域から
常温の範囲にわたり線膨脹係数が等しい特殊なガ
ラス例えば硼硅酸ガラスの巻枠２に巻回した後、
同じ材質のガラス３で表面を絶縁コーテイング
し、白金線よりなる４線式の引出線４，４′に接
続した構成のものである。 Figure 1 is a structural diagram showing an example of a temperature sensor suitable for cryogenic measurement. After winding around the winding frame 2 of a special glass, such as borosilicate glass, which has an equal coefficient of linear expansion over a range from cryogenic temperatures to normal temperatures,
The surface is insulatingly coated with glass 3 made of the same material, and connected to four-wire lead wires 4 and 4' made of platinum wire.
第２図は、このような温度センサTHを保護管
５内に収納した本考案温度計の構造を示す。 FIG. 2 shows the structure of the thermometer of the present invention in which such a temperature sensor TH is housed within the protective tube 5.
筒状の保護管５は先端部近傍に温度センサTH
が配置される。保護管の後端部はカツプ状の本体
６の底部に形成された孔６ａに嵌合され、７で示
すように溶接で両者が気密に接合されている。 The cylindrical protection tube 5 has a temperature sensor TH near its tip.
is placed. The rear end of the protective tube is fitted into a hole 6a formed at the bottom of the cup-shaped main body 6, and the two are hermetically joined by welding as shown at 7.
８は本体６上記の開放部に嵌合されたハーメチ
ツク端子であり、その外周部を巻回する金属部８
ａと本体６とは溶接部９により気密に接合されて
いる。８ｂはハーメチツク端子の絶縁部を気密に
貫通する複数のリード線ガイド用の金属棒であ
る。 Reference numeral 8 denotes a hermetic terminal fitted into the open portion of the main body 6, and a metal portion 8 is wound around the outer periphery of the hermetic terminal.
a and the main body 6 are hermetically joined by a welded portion 9. Reference numeral 8b denotes a metal rod for guiding a plurality of lead wires that hermetically passes through the insulating portion of the hermetic terminal.
１０は保護管５内及び本体６内に充填された熱
伝導特性の良い無気粉末、例えばアルミナ
（Al2O3）である。 Reference numeral 10 denotes an airless powder with good thermal conductivity, such as alumina (Al 2 O 3 ), which is filled in the protection tube 5 and the main body 6 .
さらに本考案温度計の特徴は、これら内部にヘ
リウムガス１１が封入されており、極低温領域で
の熱伝等特性を一層向上させている点にある。 A further feature of the thermometer of the present invention is that helium gas 11 is sealed inside the thermometer, further improving heat transfer characteristics in the extremely low temperature region.
このような構成を実現するための組立工程は、
まず本体６と保護管５とが溶接されたボテイ内に
リード線４，４′の接続された温度センサTHを
挿入した後無機粉末１０を充填する。 The assembly process to realize such a configuration is as follows:
First, the temperature sensor TH to which the lead wires 4 and 4' are connected is inserted into a body in which the main body 6 and the protection tube 5 are welded, and then the inorganic powder 10 is filled.
ハーメチツク端子の金属棒８ｂにリード線４，
４′を接続した後ハーメチツク端子を本体上部に
嵌合させて溶接により本体を接合する。 The lead wire 4 is connected to the metal rod 8b of the hermetic terminal.
After connecting 4', a hermetic terminal is fitted to the upper part of the main body, and the main body is joined by welding.
この時ハーメチツクの端子の金属棒を通す端子
穴を一個遊ばせておき、この穴を利用して真空ポ
ンプを用いて保護管及び本体内の空気を抜いて真
空状態とした後ヘリウムガスをその穴から封入し
て無機粉末のすきまに存在していた空気と置換さ
せ、しかる後に端子穴を溶着してヘリウムガスを
完全に密封させる。 At this time, leave one terminal hole open for passing the metal rod of the hermetic terminal, and use this hole to remove the air from the protection tube and the main body using a vacuum pump to create a vacuum, and then pump helium gas through that hole. The air that was present in the gaps between the inorganic powders is replaced by encapsulation, and then the terminal holes are welded to completely seal the helium gas.
従来の温度計では無機粉末を充填したものが知
られているが、極低温で使用した場合粉末のすき
間に存在している空気が液化し、体積収縮によつ
て保護管内に負圧が生じ、温度センサに圧力歪が
生じ測定精度が低下する。 Conventional thermometers are known to be filled with inorganic powder, but when used at extremely low temperatures, the air existing in the gaps between the powder liquefies, causing negative pressure to occur within the protective tube due to volumetric contraction. Pressure distortion occurs in the temperature sensor, reducing measurement accuracy.
本考案のごとくすき間の空気をヘリウムで置換
した構成によれば液化点4.23Kまではヘリウムは
気体の状体を保持し高成度、高精度で安定な測定
ができる。実用上は4.23Kまでの測定ができれば
極低温用温度計として充分である。 According to the configuration of the present invention, in which the air in the gaps is replaced with helium, helium remains in a gaseous state up to the liquefaction point of 4.23 K, making it possible to perform high-quality, highly accurate, and stable measurements. Practically speaking, if it can measure up to 4.23K, it is sufficient as a cryogenic thermometer.
4.23K以下となつてヘリウムが液化した場合で
あつても、空気に比較して収縮率は極めて小さい
ので、発生する負圧は小さく、センサに与える影
響は小さい。 Even when helium liquefies at 4.23K or lower, its contraction rate is extremely small compared to air, so the negative pressure generated is small and the effect on the sensor is small.
尚、従来温度計でヘリウムのみが封入されたも
のも知られているが、振動や衝撃に対して弱く、
センサとしてガラスの巻枠やコーテイングを用い
る極低温用の温度計としては実用出来ない。 Furthermore, conventional thermometers filled with only helium are known, but they are weak against vibrations and shocks.
It is not practical as a thermometer for cryogenic temperatures that uses a glass spool or coating as a sensor.
以上説明したように、本考案によれば保護管内
に無機粉末を充填すると共にヘリウムを封入する
簡単な構成により、極低温領域において、応答特
性が良く、高精度で振動衝撃にも強い、優れた温
度計を容易に実現することができる。 As explained above, the present invention has a simple structure in which the protection tube is filled with inorganic powder and sealed with helium, and has excellent response characteristics, high precision, and resistance to vibration and shock in the cryogenic region. A thermometer can be easily realized.
第１図は極低温用温度センサの一例を示す構成
図、第２図は本考案温度計の一実施例を示す構成
図である。
TH：温度センサ、５：保護管、６：本体、
８：ハーメチツク端子、１０：無機粉末、１１：
ヘリウム。
FIG. 1 is a block diagram showing an example of a temperature sensor for cryogenic temperatures, and FIG. 2 is a block diagram showing an embodiment of the thermometer of the present invention. TH: Temperature sensor, 5: Protection tube, 6: Main body,
8: Hermetic terminal, 10: Inorganic powder, 11:
helium.
Claims (1)
ト合金よりなる抵抗線を硼硅酸ガラスの巻枠に巻
回し上記硼硅酸ガラスと同質ガラスでコーテイン
グした温度センサを収納した保護管内に、無機粉
末を充填すると共にヘリウムガスを封入したこと
を特徴とする極低温用温度計。 A resistance wire made of a platinum-cobalt alloy with a cobalt content of around 0.5 mol% is wound around a borosilicate glass frame, and an inorganic powder is placed inside a protection tube containing a temperature sensor coated with a glass similar to the borosilicate glass. A cryogenic thermometer characterized by being filled with helium gas and sealed with helium gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP218279U JPS6237145Y2 (en) | 1979-01-12 | 1979-01-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP218279U JPS6237145Y2 (en) | 1979-01-12 | 1979-01-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55103531U JPS55103531U (en) | 1980-07-19 |
| JPS6237145Y2 true JPS6237145Y2 (en) | 1987-09-22 |
Family
ID=28805019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP218279U Expired JPS6237145Y2 (en) | 1979-01-12 | 1979-01-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6237145Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996018871A1 (en) * | 1994-12-15 | 1996-06-20 | Anritsu Corporation | Temperature sensor system using thin film of microcrystalline semiconductor |
| JP5216947B1 (en) * | 2012-10-19 | 2013-06-19 | 株式会社岡崎製作所 | RTD element for cryogenic use |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60128319A (en) * | 1983-12-16 | 1985-07-09 | Netsushin:Kk | Temperature measuring resistor surface sensor |
| JP6150971B1 (en) * | 2017-02-10 | 2017-06-21 | 株式会社岡崎製作所 | Resistance thermometer sensor and manufacturing method thereof |
-
1979
- 1979-01-12 JP JP218279U patent/JPS6237145Y2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996018871A1 (en) * | 1994-12-15 | 1996-06-20 | Anritsu Corporation | Temperature sensor system using thin film of microcrystalline semiconductor |
| JP5216947B1 (en) * | 2012-10-19 | 2013-06-19 | 株式会社岡崎製作所 | RTD element for cryogenic use |
| WO2014061069A1 (en) * | 2012-10-19 | 2014-04-24 | 株式会社岡崎製作所 | Cryogenic temperature measurement resistor element |
| US9464947B2 (en) | 2012-10-19 | 2016-10-11 | Okazaki Manufacturing Company | Cryogenic temperature measuring resistor element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55103531U (en) | 1980-07-19 |
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