JPS5491079A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5491079A
JPS5491079A JP15800677A JP15800677A JPS5491079A JP S5491079 A JPS5491079 A JP S5491079A JP 15800677 A JP15800677 A JP 15800677A JP 15800677 A JP15800677 A JP 15800677A JP S5491079 A JPS5491079 A JP S5491079A
Authority
JP
Japan
Prior art keywords
layer
diffusion
film
layers
openings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15800677A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6129537B2 (cs
Inventor
Gunji Mihashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15800677A priority Critical patent/JPS5491079A/ja
Publication of JPS5491079A publication Critical patent/JPS5491079A/ja
Publication of JPS6129537B2 publication Critical patent/JPS6129537B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP15800677A 1977-12-28 1977-12-28 Manufacture of semiconductor device Granted JPS5491079A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15800677A JPS5491079A (en) 1977-12-28 1977-12-28 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15800677A JPS5491079A (en) 1977-12-28 1977-12-28 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5491079A true JPS5491079A (en) 1979-07-19
JPS6129537B2 JPS6129537B2 (cs) 1986-07-07

Family

ID=15662186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15800677A Granted JPS5491079A (en) 1977-12-28 1977-12-28 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5491079A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57180145A (en) * 1981-04-30 1982-11-06 Nippon Telegr & Teleph Corp <Ntt> Manufacture of semiconductor integrated circuit device
JPH09232324A (ja) * 1996-02-23 1997-09-05 Nec Corp 半導体基板及びその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57180145A (en) * 1981-04-30 1982-11-06 Nippon Telegr & Teleph Corp <Ntt> Manufacture of semiconductor integrated circuit device
JPH09232324A (ja) * 1996-02-23 1997-09-05 Nec Corp 半導体基板及びその製造方法

Also Published As

Publication number Publication date
JPS6129537B2 (cs) 1986-07-07

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