JPS5534455A - Integrated circuit of semiconductor - Google Patents
Integrated circuit of semiconductorInfo
- Publication number
- JPS5534455A JPS5534455A JP10704678A JP10704678A JPS5534455A JP S5534455 A JPS5534455 A JP S5534455A JP 10704678 A JP10704678 A JP 10704678A JP 10704678 A JP10704678 A JP 10704678A JP S5534455 A JPS5534455 A JP S5534455A
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial layer
- region
- dents
- transistors
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Integrated Circuits (AREA)
Abstract
PURPOSE: To obtain a greatly pressure-tight integrated circuit with excellent performances by forming an even earth conductive epitaxial layer on a minus conductive semiconductor substrate with some dents and setting a minus conductive isobation region so that the dents may be encircled.
CONSTITUTION: Grooves with trapezoidal sections are formed by taper-etching a p- type silicon substrate 1. N+ flush layers 2, 3 rich in impurities are formed and an N-type epitaxial layer 11 is shaped. The surface is smoothed by mirror-finishing. Then p+ isolation diffusion regions are formed. The N-type epitaxial region is divided by the above-mentioned processes into four islond regions transistors are composed of. Such thickness of the epitaxial layer enables the transistors to be grately pressure-tight, a shallow insolation region prevents lateral diffusion and the integration rate can be greatly improved.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10704678A JPS5534455A (en) | 1978-08-31 | 1978-08-31 | Integrated circuit of semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10704678A JPS5534455A (en) | 1978-08-31 | 1978-08-31 | Integrated circuit of semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5534455A true JPS5534455A (en) | 1980-03-11 |
Family
ID=14449139
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10704678A Pending JPS5534455A (en) | 1978-08-31 | 1978-08-31 | Integrated circuit of semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5534455A (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4929984A (en) * | 1972-07-19 | 1974-03-16 | ||
JPS5246183A (en) * | 1975-10-09 | 1977-04-12 | Masumi Shirasaki | Automatic dyeing and pree twisting apparatus |
JPS5269587A (en) * | 1975-12-08 | 1977-06-09 | Hitachi Ltd | Device and manufacture for high voltage resisting semiconductor |
JPS52124874A (en) * | 1976-04-14 | 1977-10-20 | Hitachi Ltd | Semiconductor device |
-
1978
- 1978-08-31 JP JP10704678A patent/JPS5534455A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4929984A (en) * | 1972-07-19 | 1974-03-16 | ||
JPS5246183A (en) * | 1975-10-09 | 1977-04-12 | Masumi Shirasaki | Automatic dyeing and pree twisting apparatus |
JPS5269587A (en) * | 1975-12-08 | 1977-06-09 | Hitachi Ltd | Device and manufacture for high voltage resisting semiconductor |
JPS52124874A (en) * | 1976-04-14 | 1977-10-20 | Hitachi Ltd | Semiconductor device |
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