JPS52124879A - Production of semiconductor integrated circuit - Google Patents

Production of semiconductor integrated circuit

Info

Publication number
JPS52124879A
JPS52124879A JP4122076A JP4122076A JPS52124879A JP S52124879 A JPS52124879 A JP S52124879A JP 4122076 A JP4122076 A JP 4122076A JP 4122076 A JP4122076 A JP 4122076A JP S52124879 A JPS52124879 A JP S52124879A
Authority
JP
Japan
Prior art keywords
production
integrated circuit
semiconductor integrated
impurity
integration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4122076A
Other languages
Japanese (ja)
Inventor
Akira Saito
Toshiyuki Iwabuchi
Keiji Murasugi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP4122076A priority Critical patent/JPS52124879A/en
Publication of JPS52124879A publication Critical patent/JPS52124879A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To eliminate the need for isolation electrodes for reverse biasing and increase the scale of integration by forming a thin buried layer of the same conductivity type on the substrate under the impurity-diffused regions formed for the purpose of obtaining PN junction isolating structure.
COPYRIGHT: (C)1977,JPO&Japio
JP4122076A 1976-04-14 1976-04-14 Production of semiconductor integrated circuit Pending JPS52124879A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4122076A JPS52124879A (en) 1976-04-14 1976-04-14 Production of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4122076A JPS52124879A (en) 1976-04-14 1976-04-14 Production of semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS52124879A true JPS52124879A (en) 1977-10-20

Family

ID=12602301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4122076A Pending JPS52124879A (en) 1976-04-14 1976-04-14 Production of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS52124879A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4879579A (en) * 1972-01-25 1973-10-25
JPS5011687A (en) * 1973-06-01 1975-02-06

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4879579A (en) * 1972-01-25 1973-10-25
JPS5011687A (en) * 1973-06-01 1975-02-06

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