JPS52124879A - Production of semiconductor integrated circuit - Google Patents
Production of semiconductor integrated circuitInfo
- Publication number
- JPS52124879A JPS52124879A JP4122076A JP4122076A JPS52124879A JP S52124879 A JPS52124879 A JP S52124879A JP 4122076 A JP4122076 A JP 4122076A JP 4122076 A JP4122076 A JP 4122076A JP S52124879 A JPS52124879 A JP S52124879A
- Authority
- JP
- Japan
- Prior art keywords
- production
- integrated circuit
- semiconductor integrated
- impurity
- integration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To eliminate the need for isolation electrodes for reverse biasing and increase the scale of integration by forming a thin buried layer of the same conductivity type on the substrate under the impurity-diffused regions formed for the purpose of obtaining PN junction isolating structure.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4122076A JPS52124879A (en) | 1976-04-14 | 1976-04-14 | Production of semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4122076A JPS52124879A (en) | 1976-04-14 | 1976-04-14 | Production of semiconductor integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52124879A true JPS52124879A (en) | 1977-10-20 |
Family
ID=12602301
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4122076A Pending JPS52124879A (en) | 1976-04-14 | 1976-04-14 | Production of semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52124879A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4879579A (en) * | 1972-01-25 | 1973-10-25 | ||
JPS5011687A (en) * | 1973-06-01 | 1975-02-06 |
-
1976
- 1976-04-14 JP JP4122076A patent/JPS52124879A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4879579A (en) * | 1972-01-25 | 1973-10-25 | ||
JPS5011687A (en) * | 1973-06-01 | 1975-02-06 |
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