JPS5455379A - Production of mesa type semiconductor device - Google Patents

Production of mesa type semiconductor device

Info

Publication number
JPS5455379A
JPS5455379A JP12270077A JP12270077A JPS5455379A JP S5455379 A JPS5455379 A JP S5455379A JP 12270077 A JP12270077 A JP 12270077A JP 12270077 A JP12270077 A JP 12270077A JP S5455379 A JPS5455379 A JP S5455379A
Authority
JP
Japan
Prior art keywords
resist
films
windows
grooves
mesa
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12270077A
Other languages
English (en)
Other versions
JPS5645294B2 (ja
Inventor
Masahiro Kuwagata
Masao Yamada
Kenichiro Nakamura
Yorisada Kawakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP12270077A priority Critical patent/JPS5455379A/ja
Publication of JPS5455379A publication Critical patent/JPS5455379A/ja
Publication of JPS5645294B2 publication Critical patent/JPS5645294B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Weting (AREA)
JP12270077A 1977-10-12 1977-10-12 Production of mesa type semiconductor device Granted JPS5455379A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12270077A JPS5455379A (en) 1977-10-12 1977-10-12 Production of mesa type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12270077A JPS5455379A (en) 1977-10-12 1977-10-12 Production of mesa type semiconductor device

Publications (2)

Publication Number Publication Date
JPS5455379A true JPS5455379A (en) 1979-05-02
JPS5645294B2 JPS5645294B2 (ja) 1981-10-26

Family

ID=14842439

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12270077A Granted JPS5455379A (en) 1977-10-12 1977-10-12 Production of mesa type semiconductor device

Country Status (1)

Country Link
JP (1) JPS5455379A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6483848A (en) * 1987-09-28 1989-03-29 Yanmar Diesel Engine Co Electronic governor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6483848A (en) * 1987-09-28 1989-03-29 Yanmar Diesel Engine Co Electronic governor device

Also Published As

Publication number Publication date
JPS5645294B2 (ja) 1981-10-26

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