JPS54126485A - Forming method of insulating film for multilayer wiring - Google Patents

Forming method of insulating film for multilayer wiring

Info

Publication number
JPS54126485A
JPS54126485A JP3396778A JP3396778A JPS54126485A JP S54126485 A JPS54126485 A JP S54126485A JP 3396778 A JP3396778 A JP 3396778A JP 3396778 A JP3396778 A JP 3396778A JP S54126485 A JPS54126485 A JP S54126485A
Authority
JP
Japan
Prior art keywords
layer
pattern
crystal
poly
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3396778A
Other languages
English (en)
Inventor
Takehide Shirato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3396778A priority Critical patent/JPS54126485A/ja
Publication of JPS54126485A publication Critical patent/JPS54126485A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP3396778A 1978-03-24 1978-03-24 Forming method of insulating film for multilayer wiring Pending JPS54126485A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3396778A JPS54126485A (en) 1978-03-24 1978-03-24 Forming method of insulating film for multilayer wiring

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3396778A JPS54126485A (en) 1978-03-24 1978-03-24 Forming method of insulating film for multilayer wiring

Publications (1)

Publication Number Publication Date
JPS54126485A true JPS54126485A (en) 1979-10-01

Family

ID=12401253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3396778A Pending JPS54126485A (en) 1978-03-24 1978-03-24 Forming method of insulating film for multilayer wiring

Country Status (1)

Country Link
JP (1) JPS54126485A (ja)

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