JPS5374373A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5374373A JPS5374373A JP14982476A JP14982476A JPS5374373A JP S5374373 A JPS5374373 A JP S5374373A JP 14982476 A JP14982476 A JP 14982476A JP 14982476 A JP14982476 A JP 14982476A JP S5374373 A JPS5374373 A JP S5374373A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- film
- sio
- manufactured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To avoid occurrence of the white ribbon by mixing a small amount of NH3 neutralizing agent into the oxidizing atmosphere containing vapor when the SiO2 thick film is manufactured, by using Si3N4 film for an acid-resisting mask.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14982476A JPS5374373A (en) | 1976-12-15 | 1976-12-15 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14982476A JPS5374373A (en) | 1976-12-15 | 1976-12-15 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5374373A true JPS5374373A (en) | 1978-07-01 |
Family
ID=15483484
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14982476A Pending JPS5374373A (en) | 1976-12-15 | 1976-12-15 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5374373A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0798767A3 (en) * | 1996-03-29 | 1998-03-11 | Praxair Technology, Inc. | Removal of carbon from substrate surface |
-
1976
- 1976-12-15 JP JP14982476A patent/JPS5374373A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0798767A3 (en) * | 1996-03-29 | 1998-03-11 | Praxair Technology, Inc. | Removal of carbon from substrate surface |
US5998305A (en) * | 1996-03-29 | 1999-12-07 | Praxair Technology, Inc. | Removal of carbon from substrate surfaces |
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