JPS5374373A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5374373A
JPS5374373A JP14982476A JP14982476A JPS5374373A JP S5374373 A JPS5374373 A JP S5374373A JP 14982476 A JP14982476 A JP 14982476A JP 14982476 A JP14982476 A JP 14982476A JP S5374373 A JPS5374373 A JP S5374373A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
film
sio
manufactured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14982476A
Other languages
Japanese (ja)
Inventor
Kenji Taniguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14982476A priority Critical patent/JPS5374373A/en
Publication of JPS5374373A publication Critical patent/JPS5374373A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To avoid occurrence of the white ribbon by mixing a small amount of NH3 neutralizing agent into the oxidizing atmosphere containing vapor when the SiO2 thick film is manufactured, by using Si3N4 film for an acid-resisting mask.
COPYRIGHT: (C)1978,JPO&Japio
JP14982476A 1976-12-15 1976-12-15 Manufacture of semiconductor device Pending JPS5374373A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14982476A JPS5374373A (en) 1976-12-15 1976-12-15 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14982476A JPS5374373A (en) 1976-12-15 1976-12-15 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5374373A true JPS5374373A (en) 1978-07-01

Family

ID=15483484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14982476A Pending JPS5374373A (en) 1976-12-15 1976-12-15 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5374373A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0798767A3 (en) * 1996-03-29 1998-03-11 Praxair Technology, Inc. Removal of carbon from substrate surface

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0798767A3 (en) * 1996-03-29 1998-03-11 Praxair Technology, Inc. Removal of carbon from substrate surface
US5998305A (en) * 1996-03-29 1999-12-07 Praxair Technology, Inc. Removal of carbon from substrate surfaces

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