JPS5357764A - Electron beam exposure apparatus - Google Patents

Electron beam exposure apparatus

Info

Publication number
JPS5357764A
JPS5357764A JP13262076A JP13262076A JPS5357764A JP S5357764 A JPS5357764 A JP S5357764A JP 13262076 A JP13262076 A JP 13262076A JP 13262076 A JP13262076 A JP 13262076A JP S5357764 A JPS5357764 A JP S5357764A
Authority
JP
Japan
Prior art keywords
electron beam
exposure apparatus
beam exposure
diaphragms
providing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13262076A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5649445B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Yasuda
Moritaka Nakamura
Haruo Tsuchikawa
Kenichi Kawashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13262076A priority Critical patent/JPS5357764A/ja
Publication of JPS5357764A publication Critical patent/JPS5357764A/ja
Publication of JPS5649445B2 publication Critical patent/JPS5649445B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
JP13262076A 1976-11-04 1976-11-04 Electron beam exposure apparatus Granted JPS5357764A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13262076A JPS5357764A (en) 1976-11-04 1976-11-04 Electron beam exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13262076A JPS5357764A (en) 1976-11-04 1976-11-04 Electron beam exposure apparatus

Publications (2)

Publication Number Publication Date
JPS5357764A true JPS5357764A (en) 1978-05-25
JPS5649445B2 JPS5649445B2 (enrdf_load_stackoverflow) 1981-11-21

Family

ID=15085574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13262076A Granted JPS5357764A (en) 1976-11-04 1976-11-04 Electron beam exposure apparatus

Country Status (1)

Country Link
JP (1) JPS5357764A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5429981A (en) * 1977-08-10 1979-03-06 Ibm Device for radiating electron beam

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54374A (en) * 1977-05-30 1979-01-05 Nippon Yusoki Co Ltd Controller of unmanned travelling car

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54374A (en) * 1977-05-30 1979-01-05 Nippon Yusoki Co Ltd Controller of unmanned travelling car

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5429981A (en) * 1977-08-10 1979-03-06 Ibm Device for radiating electron beam

Also Published As

Publication number Publication date
JPS5649445B2 (enrdf_load_stackoverflow) 1981-11-21

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