JPS5358772A - Electron beam exposure apparatus - Google Patents
Electron beam exposure apparatusInfo
- Publication number
- JPS5358772A JPS5358772A JP13396476A JP13396476A JPS5358772A JP S5358772 A JPS5358772 A JP S5358772A JP 13396476 A JP13396476 A JP 13396476A JP 13396476 A JP13396476 A JP 13396476A JP S5358772 A JPS5358772 A JP S5358772A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- exposure apparatus
- beam exposure
- shift register
- register groups
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To make latency time nil by providing plural shift register groups and properly selecting the shift register groups of the state where pattern data can be immediately outputted.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51133964A JPS5928980B2 (en) | 1976-11-08 | 1976-11-08 | Electron beam exposure equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51133964A JPS5928980B2 (en) | 1976-11-08 | 1976-11-08 | Electron beam exposure equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5358772A true JPS5358772A (en) | 1978-05-26 |
JPS5928980B2 JPS5928980B2 (en) | 1984-07-17 |
Family
ID=15117189
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51133964A Expired JPS5928980B2 (en) | 1976-11-08 | 1976-11-08 | Electron beam exposure equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5928980B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59117116A (en) * | 1982-12-24 | 1984-07-06 | Hitachi Ltd | Pattern generator |
-
1976
- 1976-11-08 JP JP51133964A patent/JPS5928980B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59117116A (en) * | 1982-12-24 | 1984-07-06 | Hitachi Ltd | Pattern generator |
Also Published As
Publication number | Publication date |
---|---|
JPS5928980B2 (en) | 1984-07-17 |
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