JPS5358772A - Electron beam exposure apparatus - Google Patents

Electron beam exposure apparatus

Info

Publication number
JPS5358772A
JPS5358772A JP13396476A JP13396476A JPS5358772A JP S5358772 A JPS5358772 A JP S5358772A JP 13396476 A JP13396476 A JP 13396476A JP 13396476 A JP13396476 A JP 13396476A JP S5358772 A JPS5358772 A JP S5358772A
Authority
JP
Japan
Prior art keywords
electron beam
exposure apparatus
beam exposure
shift register
register groups
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13396476A
Other languages
Japanese (ja)
Other versions
JPS5928980B2 (en
Inventor
Hiroshi Yasuda
Haruo Tsuchikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP51133964A priority Critical patent/JPS5928980B2/en
Publication of JPS5358772A publication Critical patent/JPS5358772A/en
Publication of JPS5928980B2 publication Critical patent/JPS5928980B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To make latency time nil by providing plural shift register groups and properly selecting the shift register groups of the state where pattern data can be immediately outputted.
COPYRIGHT: (C)1978,JPO&Japio
JP51133964A 1976-11-08 1976-11-08 Electron beam exposure equipment Expired JPS5928980B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51133964A JPS5928980B2 (en) 1976-11-08 1976-11-08 Electron beam exposure equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51133964A JPS5928980B2 (en) 1976-11-08 1976-11-08 Electron beam exposure equipment

Publications (2)

Publication Number Publication Date
JPS5358772A true JPS5358772A (en) 1978-05-26
JPS5928980B2 JPS5928980B2 (en) 1984-07-17

Family

ID=15117189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51133964A Expired JPS5928980B2 (en) 1976-11-08 1976-11-08 Electron beam exposure equipment

Country Status (1)

Country Link
JP (1) JPS5928980B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59117116A (en) * 1982-12-24 1984-07-06 Hitachi Ltd Pattern generator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59117116A (en) * 1982-12-24 1984-07-06 Hitachi Ltd Pattern generator

Also Published As

Publication number Publication date
JPS5928980B2 (en) 1984-07-17

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