JPS5328375A - Inspecting method - Google Patents

Inspecting method

Info

Publication number
JPS5328375A
JPS5328375A JP9635376A JP9635376A JPS5328375A JP S5328375 A JPS5328375 A JP S5328375A JP 9635376 A JP9635376 A JP 9635376A JP 9635376 A JP9635376 A JP 9635376A JP S5328375 A JPS5328375 A JP S5328375A
Authority
JP
Japan
Prior art keywords
inspecting method
regions
inspecting
scanning
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9635376A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5413750B2 (enExample
Inventor
Masahito Nakajima
Katsumi Fujiwara
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9635376A priority Critical patent/JPS5328375A/ja
Publication of JPS5328375A publication Critical patent/JPS5328375A/ja
Publication of JPS5413750B2 publication Critical patent/JPS5413750B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP9635376A 1976-08-11 1976-08-11 Inspecting method Granted JPS5328375A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9635376A JPS5328375A (en) 1976-08-11 1976-08-11 Inspecting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9635376A JPS5328375A (en) 1976-08-11 1976-08-11 Inspecting method

Publications (2)

Publication Number Publication Date
JPS5328375A true JPS5328375A (en) 1978-03-16
JPS5413750B2 JPS5413750B2 (enExample) 1979-06-01

Family

ID=14162621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9635376A Granted JPS5328375A (en) 1976-08-11 1976-08-11 Inspecting method

Country Status (1)

Country Link
JP (1) JPS5328375A (enExample)

Cited By (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5521056A (en) * 1978-08-01 1980-02-14 Chiyou Lsi Gijutsu Kenkyu Kumiai Laser scanning microscopic apparatus
JPS59208406A (ja) * 1983-05-13 1984-11-26 Hitachi Denshi Ltd パタ−ン認識装置
WO1986004929A1 (fr) 1985-02-22 1986-08-28 Kawasaki Steel Corporation Procede de production de plaques d'acier au silicium unidirectionnelles avec une perte de fer extremement faible
JPS62259046A (ja) * 1986-05-02 1987-11-11 Fuji Photo Film Co Ltd 磁気デイスク表面検査方法
JPH02267276A (ja) * 1989-04-07 1990-11-01 Nippon Steel Corp 磁気特性及び皮膜特性の優れた方向性電磁鋼板の絶縁皮膜処理方法
JPH05202450A (ja) * 1992-01-27 1993-08-10 Nippon Steel Corp 超低鉄損一方向性電磁鋼板およびその製造方法
US5411808A (en) * 1992-02-13 1995-05-02 Nippon Steel Corporation Oriented electrical steel sheet having low core loss and method of manufacturing same
US5415703A (en) * 1988-12-22 1995-05-16 Nippon Steel Corporation Very thin electrical steel strip having low core loss and high magnetic flux density and a process for producing the same
US5858126A (en) * 1992-09-17 1999-01-12 Nippon Steel Corporation Grain-oriented electrical steel sheet and material having very high magnetic flux density and method of manufacturing same
JP2006275529A (ja) * 2005-03-28 2006-10-12 Citizen Watch Co Ltd 3次元形状測定方法及び測定装置
US7727644B2 (en) 2004-11-10 2010-06-01 Jfe Steel Corporation Grain-oriented electrical steel sheet and method for manufacturing grain-oriented electrical steel sheet
US7998284B2 (en) 2006-05-19 2011-08-16 Nippon Steel Corporation Grain-oriented electrical steel sheet having high tensile strength insulating film and method of treatment of such insulating film
KR101195220B1 (ko) 2005-12-26 2012-10-29 주식회사 포스코 피막 밀착성이 우수하고 장력부여능이 뛰어난 절연피막형성용 피복조성물 및 이를 이용한 방향성 전기강판의절연피막 형성방법
KR20160098313A (ko) 2014-01-31 2016-08-18 제이에프이 스틸 가부시키가이샤 크롬 프리 장력 피막용 처리액, 크롬 프리 장력 피막의 형성 방법, 및 크롬 프리 장력 피막 형성 방향성 전기 강판
KR20160134781A (ko) 2014-04-24 2016-11-23 제이에프이 스틸 가부시키가이샤 방향성 전기 강판용의 크롬 프리 절연 피막 처리액 및 크롬 프리 절연 피막 형성 방향성 전기 강판
KR20170085580A (ko) 2014-12-26 2017-07-24 신닛테츠스미킨 카부시키카이샤 전자 강판
KR20170088389A (ko) 2014-12-26 2017-08-01 신닛테츠스미킨 카부시키카이샤 전자 강판
KR20180003586A (ko) 2015-05-29 2018-01-09 신닛테츠스미킨 카부시키카이샤 전자 강판의 절연 피막
KR20180044947A (ko) 2015-09-29 2018-05-03 신닛테츠스미킨 카부시키카이샤 방향성 전자 강판 및 방향성 전자 강판의 제조 방법
KR20180053353A (ko) 2015-09-25 2018-05-21 제이에프이 스틸 가부시키가이샤 방향성 전자 강판 및 그의 제조 방법
KR20190027871A (ko) 2016-09-13 2019-03-15 제이에프이 스틸 가부시키가이샤 크롬 프리 절연 장력 피막 부착 방향성 전자 강판 및 그의 제조 방법
KR20190065370A (ko) 2016-10-31 2019-06-11 닛폰세이테츠 가부시키가이샤 방향성 전자 강판
US10519551B2 (en) 2014-12-26 2019-12-31 Nippon Steel Corporation Electrical steel sheet
KR20230066067A (ko) 2020-10-21 2023-05-12 제이에프이 스틸 가부시키가이샤 방향성 전기 강판, 방향성 전기 강판의 제조 방법 및 방향성 전기 강판의 평가 방법
WO2024111568A1 (ja) 2022-11-22 2024-05-30 Jfeスチール株式会社 方向性電磁鋼板とその製造方法
KR20240110015A (ko) 2021-12-14 2024-07-12 제이에프이 스틸 가부시키가이샤 방향성 전자 강판 및 그의 제조 방법
KR20250160487A (ko) 2023-04-05 2025-11-13 닛폰세이테츠 가부시키가이샤 방향성 전자 강판 및 절연 피막 형성 방법
KR20250160473A (ko) 2023-04-05 2025-11-13 닛폰세이테츠 가부시키가이샤 방향성 전자 강판 및 절연 피막 형성 방법

Cited By (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5521056A (en) * 1978-08-01 1980-02-14 Chiyou Lsi Gijutsu Kenkyu Kumiai Laser scanning microscopic apparatus
JPS59208406A (ja) * 1983-05-13 1984-11-26 Hitachi Denshi Ltd パタ−ン認識装置
WO1986004929A1 (fr) 1985-02-22 1986-08-28 Kawasaki Steel Corporation Procede de production de plaques d'acier au silicium unidirectionnelles avec une perte de fer extremement faible
JPS62259046A (ja) * 1986-05-02 1987-11-11 Fuji Photo Film Co Ltd 磁気デイスク表面検査方法
US5415703A (en) * 1988-12-22 1995-05-16 Nippon Steel Corporation Very thin electrical steel strip having low core loss and high magnetic flux density and a process for producing the same
JPH02267276A (ja) * 1989-04-07 1990-11-01 Nippon Steel Corp 磁気特性及び皮膜特性の優れた方向性電磁鋼板の絶縁皮膜処理方法
JPH05202450A (ja) * 1992-01-27 1993-08-10 Nippon Steel Corp 超低鉄損一方向性電磁鋼板およびその製造方法
US5679177A (en) * 1992-02-13 1997-10-21 Nippon Steel Corporation Oriented electrical steel sheet having low core loss and method of manufacturing same
US5411808A (en) * 1992-02-13 1995-05-02 Nippon Steel Corporation Oriented electrical steel sheet having low core loss and method of manufacturing same
US5753051A (en) * 1992-02-13 1998-05-19 Nippon Steel Corporation Oriented electrical steel sheet having low core loss and method of manufacturing same
US5858126A (en) * 1992-09-17 1999-01-12 Nippon Steel Corporation Grain-oriented electrical steel sheet and material having very high magnetic flux density and method of manufacturing same
US7727644B2 (en) 2004-11-10 2010-06-01 Jfe Steel Corporation Grain-oriented electrical steel sheet and method for manufacturing grain-oriented electrical steel sheet
JP2006275529A (ja) * 2005-03-28 2006-10-12 Citizen Watch Co Ltd 3次元形状測定方法及び測定装置
KR101195220B1 (ko) 2005-12-26 2012-10-29 주식회사 포스코 피막 밀착성이 우수하고 장력부여능이 뛰어난 절연피막형성용 피복조성물 및 이를 이용한 방향성 전기강판의절연피막 형성방법
US7998284B2 (en) 2006-05-19 2011-08-16 Nippon Steel Corporation Grain-oriented electrical steel sheet having high tensile strength insulating film and method of treatment of such insulating film
KR20160098313A (ko) 2014-01-31 2016-08-18 제이에프이 스틸 가부시키가이샤 크롬 프리 장력 피막용 처리액, 크롬 프리 장력 피막의 형성 방법, 및 크롬 프리 장력 피막 형성 방향성 전기 강판
KR20160134781A (ko) 2014-04-24 2016-11-23 제이에프이 스틸 가부시키가이샤 방향성 전기 강판용의 크롬 프리 절연 피막 처리액 및 크롬 프리 절연 피막 형성 방향성 전기 강판
KR20180011349A (ko) 2014-04-24 2018-01-31 제이에프이 스틸 가부시키가이샤 방향성 전기 강판용의 크롬 프리 절연 피막 처리액 및 크롬 프리 절연 피막 형성 방향성 전기 강판
KR20170088389A (ko) 2014-12-26 2017-08-01 신닛테츠스미킨 카부시키카이샤 전자 강판
US10190219B2 (en) 2014-12-26 2019-01-29 Nippon Steel & Sumitomo Metal Corporation Electrical steel sheet
KR20170085580A (ko) 2014-12-26 2017-07-24 신닛테츠스미킨 카부시키카이샤 전자 강판
US10519551B2 (en) 2014-12-26 2019-12-31 Nippon Steel Corporation Electrical steel sheet
US11332831B2 (en) 2015-05-29 2022-05-17 Nippon Steel Corporation Insulating coating for electrical steel sheet
KR20180003586A (ko) 2015-05-29 2018-01-09 신닛테츠스미킨 카부시키카이샤 전자 강판의 절연 피막
KR20180053353A (ko) 2015-09-25 2018-05-21 제이에프이 스틸 가부시키가이샤 방향성 전자 강판 및 그의 제조 방법
KR20180044947A (ko) 2015-09-29 2018-05-03 신닛테츠스미킨 카부시키카이샤 방향성 전자 강판 및 방향성 전자 강판의 제조 방법
KR20190027871A (ko) 2016-09-13 2019-03-15 제이에프이 스틸 가부시키가이샤 크롬 프리 절연 장력 피막 부착 방향성 전자 강판 및 그의 제조 방법
KR20190065370A (ko) 2016-10-31 2019-06-11 닛폰세이테츠 가부시키가이샤 방향성 전자 강판
KR20230066067A (ko) 2020-10-21 2023-05-12 제이에프이 스틸 가부시키가이샤 방향성 전기 강판, 방향성 전기 강판의 제조 방법 및 방향성 전기 강판의 평가 방법
KR20240110015A (ko) 2021-12-14 2024-07-12 제이에프이 스틸 가부시키가이샤 방향성 전자 강판 및 그의 제조 방법
WO2024111568A1 (ja) 2022-11-22 2024-05-30 Jfeスチール株式会社 方向性電磁鋼板とその製造方法
KR20250107880A (ko) 2022-11-22 2025-07-14 제이에프이 스틸 가부시키가이샤 방향성 전자 강판과 그의 제조 방법
KR20250160487A (ko) 2023-04-05 2025-11-13 닛폰세이테츠 가부시키가이샤 방향성 전자 강판 및 절연 피막 형성 방법
KR20250160473A (ko) 2023-04-05 2025-11-13 닛폰세이테츠 가부시키가이샤 방향성 전자 강판 및 절연 피막 형성 방법

Also Published As

Publication number Publication date
JPS5413750B2 (enExample) 1979-06-01

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