JPS5315775A - Production of mos type semiconductor device - Google Patents

Production of mos type semiconductor device

Info

Publication number
JPS5315775A
JPS5315775A JP8994276A JP8994276A JPS5315775A JP S5315775 A JPS5315775 A JP S5315775A JP 8994276 A JP8994276 A JP 8994276A JP 8994276 A JP8994276 A JP 8994276A JP S5315775 A JPS5315775 A JP S5315775A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
type semiconductor
mos type
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8994276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5548458B2 (enExample
Inventor
Chisato Hashimoto
Takehisa Yashiro
Noboru Shiono
Minoru Hirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP8994276A priority Critical patent/JPS5315775A/ja
Publication of JPS5315775A publication Critical patent/JPS5315775A/ja
Publication of JPS5548458B2 publication Critical patent/JPS5548458B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP8994276A 1976-07-28 1976-07-28 Production of mos type semiconductor device Granted JPS5315775A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8994276A JPS5315775A (en) 1976-07-28 1976-07-28 Production of mos type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8994276A JPS5315775A (en) 1976-07-28 1976-07-28 Production of mos type semiconductor device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP4463980A Division JPS55146979A (en) 1980-04-07 1980-04-07 Manufacture of mos type semiconductor device

Publications (2)

Publication Number Publication Date
JPS5315775A true JPS5315775A (en) 1978-02-14
JPS5548458B2 JPS5548458B2 (enExample) 1980-12-05

Family

ID=13984746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8994276A Granted JPS5315775A (en) 1976-07-28 1976-07-28 Production of mos type semiconductor device

Country Status (1)

Country Link
JP (1) JPS5315775A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58188162A (ja) * 1982-04-28 1983-11-02 Agency Of Ind Science & Technol ゲ−ト絶縁膜の形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58188162A (ja) * 1982-04-28 1983-11-02 Agency Of Ind Science & Technol ゲ−ト絶縁膜の形成方法

Also Published As

Publication number Publication date
JPS5548458B2 (enExample) 1980-12-05

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