JPS5548458B2 - - Google Patents

Info

Publication number
JPS5548458B2
JPS5548458B2 JP8994276A JP8994276A JPS5548458B2 JP S5548458 B2 JPS5548458 B2 JP S5548458B2 JP 8994276 A JP8994276 A JP 8994276A JP 8994276 A JP8994276 A JP 8994276A JP S5548458 B2 JPS5548458 B2 JP S5548458B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8994276A
Other languages
Japanese (ja)
Other versions
JPS5315775A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8994276A priority Critical patent/JPS5315775A/ja
Publication of JPS5315775A publication Critical patent/JPS5315775A/ja
Publication of JPS5548458B2 publication Critical patent/JPS5548458B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP8994276A 1976-07-28 1976-07-28 Production of mos type semiconductor device Granted JPS5315775A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8994276A JPS5315775A (en) 1976-07-28 1976-07-28 Production of mos type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8994276A JPS5315775A (en) 1976-07-28 1976-07-28 Production of mos type semiconductor device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP4463980A Division JPS55146979A (en) 1980-04-07 1980-04-07 Manufacture of mos type semiconductor device

Publications (2)

Publication Number Publication Date
JPS5315775A JPS5315775A (en) 1978-02-14
JPS5548458B2 true JPS5548458B2 (enExample) 1980-12-05

Family

ID=13984746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8994276A Granted JPS5315775A (en) 1976-07-28 1976-07-28 Production of mos type semiconductor device

Country Status (1)

Country Link
JP (1) JPS5315775A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58188162A (ja) * 1982-04-28 1983-11-02 Agency Of Ind Science & Technol ゲ−ト絶縁膜の形成方法

Also Published As

Publication number Publication date
JPS5315775A (en) 1978-02-14

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