JPS53145582A - Electrode forming method of semiconductor device - Google Patents

Electrode forming method of semiconductor device

Info

Publication number
JPS53145582A
JPS53145582A JP5979977A JP5979977A JPS53145582A JP S53145582 A JPS53145582 A JP S53145582A JP 5979977 A JP5979977 A JP 5979977A JP 5979977 A JP5979977 A JP 5979977A JP S53145582 A JPS53145582 A JP S53145582A
Authority
JP
Japan
Prior art keywords
semiconductor device
forming method
electrode forming
electrode
resist film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5979977A
Other languages
Japanese (ja)
Inventor
Shuroku Sakurada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5979977A priority Critical patent/JPS53145582A/en
Publication of JPS53145582A publication Critical patent/JPS53145582A/en
Pending legal-status Critical Current

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  • Thyristors (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE:To obtain good metal electrode patterns even if resist film thickness is thinner than electrode metal film and perfect ashing of the resist film by beforehand fabricating the electrode installing portions of a semiconductor substrate is recessed form and forming electrodes by a lift-off method.
JP5979977A 1977-05-25 1977-05-25 Electrode forming method of semiconductor device Pending JPS53145582A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5979977A JPS53145582A (en) 1977-05-25 1977-05-25 Electrode forming method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5979977A JPS53145582A (en) 1977-05-25 1977-05-25 Electrode forming method of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53145582A true JPS53145582A (en) 1978-12-18

Family

ID=13123670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5979977A Pending JPS53145582A (en) 1977-05-25 1977-05-25 Electrode forming method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53145582A (en)

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