JPS5310966A - Semiconductor wafer - Google Patents

Semiconductor wafer

Info

Publication number
JPS5310966A
JPS5310966A JP8509776A JP8509776A JPS5310966A JP S5310966 A JPS5310966 A JP S5310966A JP 8509776 A JP8509776 A JP 8509776A JP 8509776 A JP8509776 A JP 8509776A JP S5310966 A JPS5310966 A JP S5310966A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafers
beveling
chipping
slicing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8509776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5338594B2 (enExample
Inventor
Toshihiko Takayanagi
Katsunori Kameyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8509776A priority Critical patent/JPS5310966A/ja
Publication of JPS5310966A publication Critical patent/JPS5310966A/ja
Publication of JPS5338594B2 publication Critical patent/JPS5338594B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP8509776A 1976-07-19 1976-07-19 Semiconductor wafer Granted JPS5310966A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8509776A JPS5310966A (en) 1976-07-19 1976-07-19 Semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8509776A JPS5310966A (en) 1976-07-19 1976-07-19 Semiconductor wafer

Publications (2)

Publication Number Publication Date
JPS5310966A true JPS5310966A (en) 1978-01-31
JPS5338594B2 JPS5338594B2 (enExample) 1978-10-16

Family

ID=13849093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8509776A Granted JPS5310966A (en) 1976-07-19 1976-07-19 Semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS5310966A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55113332A (en) * 1979-02-23 1980-09-01 Hitachi Ltd Manufacture of wafer
JPS55165638A (en) * 1979-06-13 1980-12-24 Nec Kyushu Ltd Semiconductor wafer

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4958749A (enExample) * 1972-10-04 1974-06-07
JPS5029279A (enExample) * 1973-07-20 1975-03-25
JPS5127772A (en) * 1974-09-02 1976-03-08 Nippon Electric Co Handotaisochi no seizohoho

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4958749A (enExample) * 1972-10-04 1974-06-07
JPS5029279A (enExample) * 1973-07-20 1975-03-25
JPS5127772A (en) * 1974-09-02 1976-03-08 Nippon Electric Co Handotaisochi no seizohoho

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55113332A (en) * 1979-02-23 1980-09-01 Hitachi Ltd Manufacture of wafer
JPS55165638A (en) * 1979-06-13 1980-12-24 Nec Kyushu Ltd Semiconductor wafer

Also Published As

Publication number Publication date
JPS5338594B2 (enExample) 1978-10-16

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