JPS5260566A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5260566A
JPS5260566A JP13698075A JP13698075A JPS5260566A JP S5260566 A JPS5260566 A JP S5260566A JP 13698075 A JP13698075 A JP 13698075A JP 13698075 A JP13698075 A JP 13698075A JP S5260566 A JPS5260566 A JP S5260566A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
wafer
scribing
disappear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13698075A
Other languages
Japanese (ja)
Other versions
JPS5549420B2 (en
Inventor
Masao Kachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP13698075A priority Critical patent/JPS5260566A/en
Publication of JPS5260566A publication Critical patent/JPS5260566A/en
Publication of JPS5549420B2 publication Critical patent/JPS5549420B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To improve workability by beforehand heating a flexible conductor plate to shrink and attaching a semiconductor wafer after allowing the stress during winding to disappear, then scribing the wafer into pellets.
COPYRIGHT: (C)1977,JPO&Japio
JP13698075A 1975-11-13 1975-11-13 Production of semiconductor device Granted JPS5260566A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13698075A JPS5260566A (en) 1975-11-13 1975-11-13 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13698075A JPS5260566A (en) 1975-11-13 1975-11-13 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5260566A true JPS5260566A (en) 1977-05-19
JPS5549420B2 JPS5549420B2 (en) 1980-12-11

Family

ID=15187947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13698075A Granted JPS5260566A (en) 1975-11-13 1975-11-13 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5260566A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58147129A (en) * 1982-02-26 1983-09-01 Nitto Electric Ind Co Ltd Fixing method for semiconductor wafer
JPS6181652A (en) * 1984-09-28 1986-04-25 Shin Etsu Polymer Co Ltd Dicing film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58147129A (en) * 1982-02-26 1983-09-01 Nitto Electric Ind Co Ltd Fixing method for semiconductor wafer
JPS6181652A (en) * 1984-09-28 1986-04-25 Shin Etsu Polymer Co Ltd Dicing film

Also Published As

Publication number Publication date
JPS5549420B2 (en) 1980-12-11

Similar Documents

Publication Publication Date Title
JPS5255871A (en) Production of semiconductor
JPS5260566A (en) Production of semiconductor device
JPS5230167A (en) Method for production of semiconductor device
JPS5230170A (en) Method of photoetching
JPS5223272A (en) Method of manufacturing glass passivation semiconductor device
JPS5279654A (en) Production of semiconductor device
JPS5249781A (en) Process for production of semiconductor device
JPS5273673A (en) Production of semiconductor device
JPS542667A (en) Manufacture of semiconductor device
JPS5247675A (en) Process for production of semiconductor device
JPS51111478A (en) A method of producing semiconductor crystal
JPS5219081A (en) Production method of semiconductor device
JPS51123558A (en) Manufacturing method of plate semiconductor
JPS51115777A (en) Manufacturing method of a semiconductor apparatus
JPS51140638A (en) Positioning method
JPS51112292A (en) Semiconductor device
JPS5231682A (en) Production method of semiconductor device
JPS51141583A (en) Method for producing an electrode for use semiconductor units
JPS5261956A (en) Production of semiconductor device
JPS52143186A (en) Taping device
JPS522392A (en) Electricity-sound converting device
JPS5216975A (en) Method of manufacturing semiconductor unit
JPS51151089A (en) Manufacturing method of a semiconductor
JPS51137383A (en) Semi conductor wafer evaluation
JPS51151071A (en) Manufacturing method of a semiconductor apparatus