JPS529381A - Semiconductor device manufacturing process - Google Patents

Semiconductor device manufacturing process

Info

Publication number
JPS529381A
JPS529381A JP8552075A JP8552075A JPS529381A JP S529381 A JPS529381 A JP S529381A JP 8552075 A JP8552075 A JP 8552075A JP 8552075 A JP8552075 A JP 8552075A JP S529381 A JPS529381 A JP S529381A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing process
device manufacturing
layer
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8552075A
Other languages
Japanese (ja)
Inventor
Katsunobu Nakagawa
Yoshimi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP8552075A priority Critical patent/JPS529381A/en
Publication of JPS529381A publication Critical patent/JPS529381A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: Selectively remove polycrystal Si layer formed simultaneously on the Si substrate by monitoring polycrystalline Si layer on oxidized films.
COPYRIGHT: (C)1977,JPO&Japio
JP8552075A 1975-07-11 1975-07-11 Semiconductor device manufacturing process Pending JPS529381A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8552075A JPS529381A (en) 1975-07-11 1975-07-11 Semiconductor device manufacturing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8552075A JPS529381A (en) 1975-07-11 1975-07-11 Semiconductor device manufacturing process

Publications (1)

Publication Number Publication Date
JPS529381A true JPS529381A (en) 1977-01-24

Family

ID=13861171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8552075A Pending JPS529381A (en) 1975-07-11 1975-07-11 Semiconductor device manufacturing process

Country Status (1)

Country Link
JP (1) JPS529381A (en)

Similar Documents

Publication Publication Date Title
JPS5226182A (en) Manufacturing method of semi-conductor unit
JPS5314580A (en) Production of semiconductor device
JPS5247673A (en) Process for production of silicon crystal film
JPS523390A (en) Manufacturing method of semiconductor device
JPS5331964A (en) Production of semiconductor substrates
JPS5255871A (en) Production of semiconductor
JPS53108389A (en) Manufacture for semiconductor device
JPS5373072A (en) Formation of oxidized film
JPS5230167A (en) Method for production of semiconductor device
JPS51130184A (en) Semiconductor ic resistance element process
JPS529381A (en) Semiconductor device manufacturing process
JPS53104162A (en) Forming method for epitaxial layer on semiconductor wafer
JPS5383467A (en) Production of semiconductor device
JPS5269571A (en) Thermal oxidation method for semiconductor wafer
JPS531471A (en) Manufacture for semiconductor device
JPS52131462A (en) Manufacture of semiconductor device
JPS5228879A (en) Semiconductor device and method for its production
JPS51113461A (en) A method for manufacturing semiconductor devices
JPS5211773A (en) Method of manufacturing semiconductor device
JPS5269649A (en) Semiconductor distortion element
JPS5275276A (en) Production of semiconductor device
JPS52146565A (en) Production of semiconductor device
JPS5223265A (en) Method of processing semiconductor materials
JPS51132762A (en) Heat-treatment method of semiconductor device
JPS5226162A (en) Manufacturing method of semi-conductor crystal