JPS5246775A - Method of forming photo mask - Google Patents

Method of forming photo mask

Info

Publication number
JPS5246775A
JPS5246775A JP12245875A JP12245875A JPS5246775A JP S5246775 A JPS5246775 A JP S5246775A JP 12245875 A JP12245875 A JP 12245875A JP 12245875 A JP12245875 A JP 12245875A JP S5246775 A JPS5246775 A JP S5246775A
Authority
JP
Japan
Prior art keywords
photo mask
forming photo
thin film
mask
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12245875A
Other languages
English (en)
Inventor
Katsuhiro Fujino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12245875A priority Critical patent/JPS5246775A/ja
Publication of JPS5246775A publication Critical patent/JPS5246775A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Drying Of Semiconductors (AREA)
JP12245875A 1975-10-13 1975-10-13 Method of forming photo mask Pending JPS5246775A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12245875A JPS5246775A (en) 1975-10-13 1975-10-13 Method of forming photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12245875A JPS5246775A (en) 1975-10-13 1975-10-13 Method of forming photo mask

Publications (1)

Publication Number Publication Date
JPS5246775A true JPS5246775A (en) 1977-04-13

Family

ID=14836342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12245875A Pending JPS5246775A (en) 1975-10-13 1975-10-13 Method of forming photo mask

Country Status (1)

Country Link
JP (1) JPS5246775A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200238A (ja) * 1983-04-27 1984-11-13 Fujitsu Ltd フオトマスクの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200238A (ja) * 1983-04-27 1984-11-13 Fujitsu Ltd フオトマスクの製造方法

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