JPS52143774A - Negative positioning mechanism in reduction projecting and printing apparatus - Google Patents

Negative positioning mechanism in reduction projecting and printing apparatus

Info

Publication number
JPS52143774A
JPS52143774A JP6002976A JP6002976A JPS52143774A JP S52143774 A JPS52143774 A JP S52143774A JP 6002976 A JP6002976 A JP 6002976A JP 6002976 A JP6002976 A JP 6002976A JP S52143774 A JPS52143774 A JP S52143774A
Authority
JP
Japan
Prior art keywords
positioning mechanism
printing apparatus
negative positioning
reduction projecting
negative
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6002976A
Other languages
English (en)
Inventor
Kiyoshi Nakagawa
Hiroyuki Ibe
Shuji Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6002976A priority Critical patent/JPS52143774A/ja
Publication of JPS52143774A publication Critical patent/JPS52143774A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Projection-Type Copiers In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP6002976A 1976-05-26 1976-05-26 Negative positioning mechanism in reduction projecting and printing apparatus Pending JPS52143774A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6002976A JPS52143774A (en) 1976-05-26 1976-05-26 Negative positioning mechanism in reduction projecting and printing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6002976A JPS52143774A (en) 1976-05-26 1976-05-26 Negative positioning mechanism in reduction projecting and printing apparatus

Publications (1)

Publication Number Publication Date
JPS52143774A true JPS52143774A (en) 1977-11-30

Family

ID=13130224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6002976A Pending JPS52143774A (en) 1976-05-26 1976-05-26 Negative positioning mechanism in reduction projecting and printing apparatus

Country Status (1)

Country Link
JP (1) JPS52143774A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5653356U (ja) * 1979-09-28 1981-05-11
JPS5948041U (ja) * 1983-08-23 1984-03-30 株式会社日立製作所 半導体マスク保持装置
JP2004328014A (ja) * 2004-08-10 2004-11-18 Nikon Corp 投影露光装置、及び該投影露光装置を用いたパターン形成方法
KR20170009763A (ko) * 2015-07-15 2017-01-25 수스 마이크로텍 리소그라피 게엠바하 웨이퍼 조명 유닛을 위한 스페이서 변위 디바이스 및 웨이퍼 조명 유닛

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5653356U (ja) * 1979-09-28 1981-05-11
JPS6138180Y2 (ja) * 1979-09-28 1986-11-05
JPS5948041U (ja) * 1983-08-23 1984-03-30 株式会社日立製作所 半導体マスク保持装置
JP2004328014A (ja) * 2004-08-10 2004-11-18 Nikon Corp 投影露光装置、及び該投影露光装置を用いたパターン形成方法
KR20170009763A (ko) * 2015-07-15 2017-01-25 수스 마이크로텍 리소그라피 게엠바하 웨이퍼 조명 유닛을 위한 스페이서 변위 디바이스 및 웨이퍼 조명 유닛
JP2017027028A (ja) * 2015-07-15 2017-02-02 ズス・マイクロテック・リソグラフィ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツングＳｕｓｓ ＭｉｃｒｏＴｅｃ Ｌｉｔｈｏｇｒａｐｈｙ ＧｍｂＨ ウエハ照明ユニット用スペーサー変位装置、及びウエハ照明ユニット

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