JPS52141590A - Semiconductor memory cell - Google Patents

Semiconductor memory cell

Info

Publication number
JPS52141590A
JPS52141590A JP5780976A JP5780976A JPS52141590A JP S52141590 A JPS52141590 A JP S52141590A JP 5780976 A JP5780976 A JP 5780976A JP 5780976 A JP5780976 A JP 5780976A JP S52141590 A JPS52141590 A JP S52141590A
Authority
JP
Japan
Prior art keywords
memory cell
semiconductor memory
area
integreting
decrease
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5780976A
Other languages
English (en)
Inventor
Toshiaki Masuhara
Hideo Sunami
Norio Koike
Mitsumasa Koyanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5780976A priority Critical patent/JPS52141590A/ja
Publication of JPS52141590A publication Critical patent/JPS52141590A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/39—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor and the transistor being in a same trench
    • H10B12/395—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor and the transistor being in a same trench the transistor being vertical
JP5780976A 1976-05-21 1976-05-21 Semiconductor memory cell Pending JPS52141590A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5780976A JPS52141590A (en) 1976-05-21 1976-05-21 Semiconductor memory cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5780976A JPS52141590A (en) 1976-05-21 1976-05-21 Semiconductor memory cell

Publications (1)

Publication Number Publication Date
JPS52141590A true JPS52141590A (en) 1977-11-25

Family

ID=13066239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5780976A Pending JPS52141590A (en) 1976-05-21 1976-05-21 Semiconductor memory cell

Country Status (1)

Country Link
JP (1) JPS52141590A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61179570A (ja) * 1984-09-24 1986-08-12 テキサス　インスツルメンツ　インコ−ポレイテツド 半導体装置及びその製造方法
JPS61185965A (ja) * 1984-12-07 1986-08-19 テキサス　インスツルメンツ　インコ−ポレイテツド メモリセルおよびその製法
JPS61280653A (ja) * 1985-02-28 1986-12-11 テキサス　インスツルメンツ　インコ−ポレイテツド Ｄｒａｍセルおよびそのメモリセルアレイならびにその製作方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61179570A (ja) * 1984-09-24 1986-08-12 テキサス　インスツルメンツ　インコ−ポレイテツド 半導体装置及びその製造方法
JPS61185965A (ja) * 1984-12-07 1986-08-19 テキサス　インスツルメンツ　インコ−ポレイテツド メモリセルおよびその製法
JPS61280653A (ja) * 1985-02-28 1986-12-11 テキサス　インスツルメンツ　インコ−ポレイテツド Ｄｒａｍセルおよびそのメモリセルアレイならびにその製作方法

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