JPS52132684A - Insulating gate type field effect transistor - Google Patents
Insulating gate type field effect transistorInfo
- Publication number
- JPS52132684A JPS52132684A JP4896776A JP4896776A JPS52132684A JP S52132684 A JPS52132684 A JP S52132684A JP 4896776 A JP4896776 A JP 4896776A JP 4896776 A JP4896776 A JP 4896776A JP S52132684 A JPS52132684 A JP S52132684A
- Authority
- JP
- Japan
- Prior art keywords
- field effect
- effect transistor
- type field
- gate type
- insulating gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005669 field effect Effects 0.000 title 1
- 230000002159 abnormal effect Effects 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 230000005012 migration Effects 0.000 abstract 1
- 238000013508 migration Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
- H01L29/0696—Surface layout of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/145—Shaped junctions
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/167—Two diffusions in one hole
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4896776A JPS52132684A (en) | 1976-04-29 | 1976-04-29 | Insulating gate type field effect transistor |
US05/790,089 US4072975A (en) | 1976-04-29 | 1977-04-22 | Insulated gate field effect transistor |
CA276,873A CA1083262A (en) | 1976-04-29 | 1977-04-25 | Inslated gate field effect transistor |
GB17580/77A GB1556276A (en) | 1976-04-29 | 1977-04-27 | Insulated gate field effect transistors |
NL7704633A NL7704633A (nl) | 1976-04-29 | 1977-04-27 | Veldeffecttransistor. |
DE19772719314 DE2719314A1 (de) | 1976-04-29 | 1977-04-29 | Isolierschicht-feldeffekttransistor |
FR7713104A FR2349958A1 (fr) | 1976-04-29 | 1977-04-29 | Transistor a effet de champ a une gachette isolee |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4896776A JPS52132684A (en) | 1976-04-29 | 1976-04-29 | Insulating gate type field effect transistor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52132684A true JPS52132684A (en) | 1977-11-07 |
JPS6145396B2 JPS6145396B2 (ja) | 1986-10-07 |
Family
ID=12818038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4896776A Granted JPS52132684A (en) | 1976-04-29 | 1976-04-29 | Insulating gate type field effect transistor |
Country Status (7)
Country | Link |
---|---|
US (1) | US4072975A (ja) |
JP (1) | JPS52132684A (ja) |
CA (1) | CA1083262A (ja) |
DE (1) | DE2719314A1 (ja) |
FR (1) | FR2349958A1 (ja) |
GB (1) | GB1556276A (ja) |
NL (1) | NL7704633A (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5553462A (en) * | 1978-10-13 | 1980-04-18 | Int Rectifier Corp | Mosfet element |
JPS5784178A (en) * | 1980-11-14 | 1982-05-26 | Fujitsu Ltd | Field-effect transistor |
JPS6074665A (ja) * | 1983-09-30 | 1985-04-26 | Nec Corp | 半導体装置の製造方法 |
JPS6323365A (ja) * | 1978-10-13 | 1988-01-30 | インターナショナル・レクチファイヤー・コーポレーション | Mosfet素子 |
US5408118A (en) * | 1992-02-26 | 1995-04-18 | Nec Corporation | Vertical double diffused MOSFET having a low breakdown voltage and constituting a power semiconductor device |
US5521410A (en) * | 1993-03-22 | 1996-05-28 | Nec Corporation | Power semiconductor device comprising vertical double-diffused MOSFETS each having low on-resistance per unit area |
Families Citing this family (84)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4055884A (en) * | 1976-12-13 | 1977-11-01 | International Business Machines Corporation | Fabrication of power field effect transistors and the resulting structures |
JPS54144183A (en) * | 1978-05-01 | 1979-11-10 | Handotai Kenkyu Shinkokai | Insulated gate type electrostatic induction transistor and semiconductor integrated circuit |
US4199774A (en) * | 1978-09-18 | 1980-04-22 | The Board Of Trustees Of The Leland Stanford Junior University | Monolithic semiconductor switching device |
US4705759B1 (en) * | 1978-10-13 | 1995-02-14 | Int Rectifier Corp | High power mosfet with low on-resistance and high breakdown voltage |
US5191396B1 (en) * | 1978-10-13 | 1995-12-26 | Int Rectifier Corp | High power mosfet with low on-resistance and high breakdown voltage |
US4546370A (en) * | 1979-02-15 | 1985-10-08 | Texas Instruments Incorporated | Monolithic integration of logic, control and high voltage interface circuitry |
US5130767C1 (en) * | 1979-05-14 | 2001-08-14 | Int Rectifier Corp | Plural polygon source pattern for mosfet |
US5008725C2 (en) * | 1979-05-14 | 2001-05-01 | Internat Rectifer Corp | Plural polygon source pattern for mosfet |
DE3012185A1 (de) * | 1980-03-28 | 1981-10-08 | Siemens AG, 1000 Berlin und 8000 München | Feldeffekttransistor |
US4680853A (en) * | 1980-08-18 | 1987-07-21 | International Rectifier Corporation | Process for manufacture of high power MOSFET with laterally distributed high carrier density beneath the gate oxide |
US4593302B1 (en) * | 1980-08-18 | 1998-02-03 | Int Rectifier Corp | Process for manufacture of high power mosfet laterally distributed high carrier density beneath the gate oxide |
JPS57141962A (en) * | 1981-02-27 | 1982-09-02 | Hitachi Ltd | Semiconductor integrated circuit device |
JPS5825264A (ja) * | 1981-08-07 | 1983-02-15 | Hitachi Ltd | 絶縁ゲート型半導体装置 |
JPS58106870A (ja) * | 1981-12-18 | 1983-06-25 | Nissan Motor Co Ltd | パワ−mosfet |
DE3200660A1 (de) * | 1982-01-12 | 1983-07-21 | Siemens AG, 1000 Berlin und 8000 München | Mis-feldeffekttransistor mit ladungstraegerinjektion |
US4503598A (en) * | 1982-05-20 | 1985-03-12 | Fairchild Camera & Instrument Corporation | Method of fabricating power MOSFET structure utilizing self-aligned diffusion and etching techniques |
US4571606A (en) * | 1982-06-21 | 1986-02-18 | Eaton Corporation | High density, high voltage power FET |
US4574208A (en) * | 1982-06-21 | 1986-03-04 | Eaton Corporation | Raised split gate EFET and circuitry |
US4574209A (en) * | 1982-06-21 | 1986-03-04 | Eaton Corporation | Split gate EFET and circuitry |
DE3224618A1 (de) * | 1982-07-01 | 1984-01-05 | Siemens AG, 1000 Berlin und 8000 München | Igfet mit ladungstraegerinjektion |
US4532534A (en) * | 1982-09-07 | 1985-07-30 | Rca Corporation | MOSFET with perimeter channel |
US4489341A (en) * | 1982-09-27 | 1984-12-18 | Sprague Electric Company | Merged-transistor switch with extra P-type region |
FR2537780A1 (fr) * | 1982-12-08 | 1984-06-15 | Radiotechnique Compelec | Dispositif mos fet de puissance a structure plane multicellulaire |
US4974059A (en) * | 1982-12-21 | 1990-11-27 | International Rectifier Corporation | Semiconductor high-power mosfet device |
DE3465225D1 (en) * | 1983-02-17 | 1987-09-10 | Nissan Motor | A vertical-type mosfet and method of fabricating the same |
JPS59181679A (ja) * | 1983-03-31 | 1984-10-16 | Nippon Denso Co Ltd | 半導体装置 |
JPH0612828B2 (ja) * | 1983-06-30 | 1994-02-16 | 株式会社東芝 | 半導体装置 |
US4686554A (en) * | 1983-07-02 | 1987-08-11 | Canon Kabushiki Kaisha | Photoelectric converter |
US4618872A (en) * | 1983-12-05 | 1986-10-21 | General Electric Company | Integrated power switching semiconductor devices including IGT and MOSFET structures |
US4721986A (en) * | 1984-02-21 | 1988-01-26 | International Rectifier Corporation | Bidirectional output semiconductor field effect transistor and method for its maufacture |
US4837606A (en) * | 1984-02-22 | 1989-06-06 | General Electric Company | Vertical MOSFET with reduced bipolar effects |
US4587713A (en) * | 1984-02-22 | 1986-05-13 | Rca Corporation | Method for making vertical MOSFET with reduced bipolar effects |
US4783694A (en) * | 1984-03-16 | 1988-11-08 | Motorola Inc. | Integrated bipolar-MOS semiconductor device with common collector and drain |
US4672407A (en) * | 1984-05-30 | 1987-06-09 | Kabushiki Kaisha Toshiba | Conductivity modulated MOSFET |
US4599554A (en) * | 1984-12-10 | 1986-07-08 | Texet Corportion | Vertical MOSFET with current monitor utilizing common drain current mirror |
US4639754A (en) * | 1985-02-25 | 1987-01-27 | Rca Corporation | Vertical MOSFET with diminished bipolar effects |
US5309013A (en) * | 1985-04-30 | 1994-05-03 | Canon Kabushiki Kaisha | Photoelectric conversion device |
EP0229362B1 (en) * | 1986-01-10 | 1993-03-17 | General Electric Company | Semiconductor device and method of fabrication |
US4962411A (en) * | 1986-03-21 | 1990-10-09 | Nippondenso Co., Ltd. | Semiconductor device with current detecting function |
US4883767A (en) * | 1986-12-05 | 1989-11-28 | General Electric Company | Method of fabricating self aligned semiconductor devices |
US4761679A (en) * | 1986-12-22 | 1988-08-02 | North American Philips Corporation | Complementary silicon-on-insulator lateral insulated gate rectifiers |
US5105243A (en) * | 1987-02-26 | 1992-04-14 | Kabushiki Kaisha Toshiba | Conductivity-modulation metal oxide field effect transistor with single gate structure |
US5237186A (en) * | 1987-02-26 | 1993-08-17 | Kabushiki Kaisha Toshiba | Conductivity-modulation metal oxide field effect transistor with single gate structure |
JPH0821713B2 (ja) * | 1987-02-26 | 1996-03-04 | 株式会社東芝 | 導電変調型mosfet |
JPH01116888U (ja) * | 1988-02-01 | 1989-08-07 | ||
JP2653095B2 (ja) * | 1988-04-22 | 1997-09-10 | 富士電機株式会社 | 伝導度変調型mosfet |
US4988632A (en) * | 1990-01-02 | 1991-01-29 | Motorola, Inc. | Bipolar process using selective silicon deposition |
GB2241827B (en) * | 1990-02-23 | 1994-01-26 | Matsushita Electric Works Ltd | Method for manufacturing optically triggered lateral thyristor |
JP2715399B2 (ja) * | 1990-07-30 | 1998-02-18 | 株式会社デンソー | 電力用半導体装置 |
GB2257830B (en) * | 1991-07-12 | 1995-04-05 | Matsushita Electric Works Ltd | Low output-capacity, double-diffused field effect transistor |
US5243211A (en) * | 1991-11-25 | 1993-09-07 | Harris Corporation | Power fet with shielded channels |
IT1250233B (it) * | 1991-11-29 | 1995-04-03 | St Microelectronics Srl | Procedimento per la fabbricazione di circuiti integrati in tecnologia mos. |
US5323036A (en) * | 1992-01-21 | 1994-06-21 | Harris Corporation | Power FET with gate segments covering drain regions disposed in a hexagonal pattern |
US5242841A (en) * | 1992-03-25 | 1993-09-07 | Texas Instruments Incorporated | Method of making LDMOS transistor with self-aligned source/backgate and photo-aligned gate |
DE4244272A1 (de) * | 1992-12-28 | 1994-06-30 | Daimler Benz Ag | Feldeffektgesteuertes Halbleiterbauelement |
EP0621636B1 (en) * | 1993-04-21 | 1999-07-14 | Consorzio per la Ricerca sulla Microelettronica nel Mezzogiorno | Integrated structure protection device for the protection of logic-level power MOS devices against electro static discharges |
US5395776A (en) * | 1993-05-12 | 1995-03-07 | At&T Corp. | Method of making a rugged DMOS device |
DE69327320T2 (de) * | 1993-09-30 | 2000-05-31 | Cons Ric Microelettronica | Integrierte aktive Klammerungsstruktur für den Schutz von Leistungsanordnungen gegen Überspannungen, und Verfahren zu ihrer Herstellung |
EP0665597A1 (en) * | 1994-01-27 | 1995-08-02 | Consorzio per la Ricerca sulla Microelettronica nel Mezzogiorno - CoRiMMe | IGBT and manufacturing process therefore |
DE69432407D1 (de) * | 1994-05-19 | 2003-05-08 | Cons Ric Microelettronica | Integrierte Leistungsschaltung ("PIC") mit vertikalem IGB und Verfahren zur Herstellung derselben |
EP0683521B1 (en) * | 1994-05-19 | 2002-08-14 | Consorzio per la Ricerca sulla Microelettronica nel Mezzogiorno | Power integrated circuit ("PIC") structure, and manufacturing process thereof |
EP0697739B1 (en) * | 1994-08-02 | 2001-10-31 | STMicroelectronics S.r.l. | Insulated gate bipolar transistor |
US5701023A (en) * | 1994-08-03 | 1997-12-23 | National Semiconductor Corporation | Insulated gate semiconductor device typically having subsurface-peaked portion of body region for improved ruggedness |
JPH08172139A (ja) * | 1994-12-19 | 1996-07-02 | Sony Corp | 半導体装置製造方法 |
US5798554A (en) * | 1995-02-24 | 1998-08-25 | Consorzio Per La Ricerca Sulla Microelettronica Nel Mezzogiorno | MOS-technology power device integrated structure and manufacturing process thereof |
US5869371A (en) * | 1995-06-07 | 1999-02-09 | Stmicroelectronics, Inc. | Structure and process for reducing the on-resistance of mos-gated power devices |
EP0768714B1 (en) * | 1995-10-09 | 2003-09-17 | Consorzio per la Ricerca sulla Microelettronica nel Mezzogiorno - CoRiMMe | Construction method for power devices with deep edge ring |
EP0772241B1 (en) * | 1995-10-30 | 2004-06-09 | STMicroelectronics S.r.l. | High density MOS technology power device |
EP0772242B1 (en) | 1995-10-30 | 2006-04-05 | STMicroelectronics S.r.l. | Single feature size MOS technology power device |
EP0772244B1 (en) * | 1995-11-06 | 2000-03-22 | Consorzio per la Ricerca sulla Microelettronica nel Mezzogiorno | MOS technology power device with low output resistance and low capacity and related manufacturing process |
US6228719B1 (en) | 1995-11-06 | 2001-05-08 | Stmicroelectronics S.R.L. | MOS technology power device with low output resistance and low capacitance, and related manufacturing process |
EP0782201B1 (en) * | 1995-12-28 | 2000-08-30 | STMicroelectronics S.r.l. | MOS-technology power device integrated structure |
US5818084A (en) * | 1996-05-15 | 1998-10-06 | Siliconix Incorporated | Pseudo-Schottky diode |
KR100200485B1 (ko) * | 1996-08-08 | 1999-06-15 | 윤종용 | 모스 트랜지스터 및 그 제조방법 |
US6140692A (en) * | 1997-05-29 | 2000-10-31 | Micron Technology, Inc. | Isolated anti-fuse structure and method for fabricating same |
EP0961325B1 (en) | 1998-05-26 | 2008-05-07 | STMicroelectronics S.r.l. | High integration density MOS technology power device |
KR20000000549A (ko) * | 1998-06-01 | 2000-01-15 | 구자홍 | 가스방전표시장치의 게타구조 |
DE19840032C1 (de) * | 1998-09-02 | 1999-11-18 | Siemens Ag | Halbleiterbauelement und Herstellungsverfahren dazu |
EP1009036B1 (en) * | 1998-12-09 | 2007-09-19 | STMicroelectronics S.r.l. | High-voltage MOS-gated power device, and related manufacturing process |
KR100297705B1 (ko) | 1999-03-29 | 2001-10-29 | 김덕중 | 낮은 온저항과 높은 항복전압을 갖는 전력용 반도체소자 |
US6245610B1 (en) * | 1999-09-28 | 2001-06-12 | United Microelectronics Corp. | Method of protecting a well at a floating stage |
US6819089B2 (en) * | 2001-11-09 | 2004-11-16 | Infineon Technologies Ag | Power factor correction circuit with high-voltage semiconductor component |
US6825514B2 (en) * | 2001-11-09 | 2004-11-30 | Infineon Technologies Ag | High-voltage semiconductor component |
US6979861B2 (en) * | 2002-05-30 | 2005-12-27 | Apd Semiconductor, Inc. | Power device having reduced reverse bias leakage current |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4916236B1 (ja) * | 1970-07-24 | 1974-04-20 | ||
US3711940A (en) * | 1971-02-08 | 1973-01-23 | Signetics Corp | Method for making mos structure with precisely controlled channel length |
JPS5123432B2 (ja) * | 1971-08-26 | 1976-07-16 |
-
1976
- 1976-04-29 JP JP4896776A patent/JPS52132684A/ja active Granted
-
1977
- 1977-04-22 US US05/790,089 patent/US4072975A/en not_active Expired - Lifetime
- 1977-04-25 CA CA276,873A patent/CA1083262A/en not_active Expired
- 1977-04-27 NL NL7704633A patent/NL7704633A/xx active Search and Examination
- 1977-04-27 GB GB17580/77A patent/GB1556276A/en not_active Expired
- 1977-04-29 FR FR7713104A patent/FR2349958A1/fr active Granted
- 1977-04-29 DE DE19772719314 patent/DE2719314A1/de not_active Ceased
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5553462A (en) * | 1978-10-13 | 1980-04-18 | Int Rectifier Corp | Mosfet element |
JPS6323365A (ja) * | 1978-10-13 | 1988-01-30 | インターナショナル・レクチファイヤー・コーポレーション | Mosfet素子 |
JPH0370387B2 (ja) * | 1978-10-13 | 1991-11-07 | Int Rectifier Corp | |
JPS5784178A (en) * | 1980-11-14 | 1982-05-26 | Fujitsu Ltd | Field-effect transistor |
JPH0517713B2 (ja) * | 1980-11-14 | 1993-03-09 | Fujitsu Ltd | |
JPS6074665A (ja) * | 1983-09-30 | 1985-04-26 | Nec Corp | 半導体装置の製造方法 |
US5408118A (en) * | 1992-02-26 | 1995-04-18 | Nec Corporation | Vertical double diffused MOSFET having a low breakdown voltage and constituting a power semiconductor device |
US5521410A (en) * | 1993-03-22 | 1996-05-28 | Nec Corporation | Power semiconductor device comprising vertical double-diffused MOSFETS each having low on-resistance per unit area |
Also Published As
Publication number | Publication date |
---|---|
CA1083262A (en) | 1980-08-05 |
FR2349958B1 (ja) | 1982-08-13 |
US4072975A (en) | 1978-02-07 |
GB1556276A (en) | 1979-11-21 |
JPS6145396B2 (ja) | 1986-10-07 |
FR2349958A1 (fr) | 1977-11-25 |
DE2719314A1 (de) | 1977-11-17 |
NL7704633A (nl) | 1977-11-01 |
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