JPS52124883A - Local connection method of semiconductor crystal substrate and metal wiring - Google Patents
Local connection method of semiconductor crystal substrate and metal wiringInfo
- Publication number
- JPS52124883A JPS52124883A JP4153976A JP4153976A JPS52124883A JP S52124883 A JPS52124883 A JP S52124883A JP 4153976 A JP4153976 A JP 4153976A JP 4153976 A JP4153976 A JP 4153976A JP S52124883 A JPS52124883 A JP S52124883A
- Authority
- JP
- Japan
- Prior art keywords
- metal wiring
- crystal substrate
- connection method
- semiconductor crystal
- local connection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To obtain reliable wiring without contaminating semiconductor elements by locally connecting a semiconductor substrate to metal wiring by using a laser light beam and gas for forming polycrystalline semiconductor.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4153976A JPS52124883A (en) | 1976-04-12 | 1976-04-12 | Local connection method of semiconductor crystal substrate and metal wiring |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4153976A JPS52124883A (en) | 1976-04-12 | 1976-04-12 | Local connection method of semiconductor crystal substrate and metal wiring |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52124883A true JPS52124883A (en) | 1977-10-20 |
JPS5734664B2 JPS5734664B2 (en) | 1982-07-24 |
Family
ID=12611210
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4153976A Granted JPS52124883A (en) | 1976-04-12 | 1976-04-12 | Local connection method of semiconductor crystal substrate and metal wiring |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52124883A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56100451A (en) * | 1980-01-14 | 1981-08-12 | Matsushita Electric Ind Co Ltd | Manufacture of electrode of semiconductor device |
JPS58153351A (en) * | 1982-03-08 | 1983-09-12 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
JPS60182726A (en) * | 1984-02-29 | 1985-09-18 | Seiko Instr & Electronics Ltd | Forming method of pattern film |
-
1976
- 1976-04-12 JP JP4153976A patent/JPS52124883A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56100451A (en) * | 1980-01-14 | 1981-08-12 | Matsushita Electric Ind Co Ltd | Manufacture of electrode of semiconductor device |
JPS58153351A (en) * | 1982-03-08 | 1983-09-12 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
JPS60182726A (en) * | 1984-02-29 | 1985-09-18 | Seiko Instr & Electronics Ltd | Forming method of pattern film |
JPS6322577B2 (en) * | 1984-02-29 | 1988-05-12 | Seiko Denshi Kogyo Kk |
Also Published As
Publication number | Publication date |
---|---|
JPS5734664B2 (en) | 1982-07-24 |
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