JPS52124883A - Local connection method of semiconductor crystal substrate and metal wiring - Google Patents

Local connection method of semiconductor crystal substrate and metal wiring

Info

Publication number
JPS52124883A
JPS52124883A JP4153976A JP4153976A JPS52124883A JP S52124883 A JPS52124883 A JP S52124883A JP 4153976 A JP4153976 A JP 4153976A JP 4153976 A JP4153976 A JP 4153976A JP S52124883 A JPS52124883 A JP S52124883A
Authority
JP
Japan
Prior art keywords
metal wiring
crystal substrate
connection method
semiconductor crystal
local connection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4153976A
Other languages
Japanese (ja)
Other versions
JPS5734664B2 (en
Inventor
Sunao Nishioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4153976A priority Critical patent/JPS52124883A/en
Publication of JPS52124883A publication Critical patent/JPS52124883A/en
Publication of JPS5734664B2 publication Critical patent/JPS5734664B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To obtain reliable wiring without contaminating semiconductor elements by locally connecting a semiconductor substrate to metal wiring by using a laser light beam and gas for forming polycrystalline semiconductor.
COPYRIGHT: (C)1977,JPO&Japio
JP4153976A 1976-04-12 1976-04-12 Local connection method of semiconductor crystal substrate and metal wiring Granted JPS52124883A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4153976A JPS52124883A (en) 1976-04-12 1976-04-12 Local connection method of semiconductor crystal substrate and metal wiring

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4153976A JPS52124883A (en) 1976-04-12 1976-04-12 Local connection method of semiconductor crystal substrate and metal wiring

Publications (2)

Publication Number Publication Date
JPS52124883A true JPS52124883A (en) 1977-10-20
JPS5734664B2 JPS5734664B2 (en) 1982-07-24

Family

ID=12611210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4153976A Granted JPS52124883A (en) 1976-04-12 1976-04-12 Local connection method of semiconductor crystal substrate and metal wiring

Country Status (1)

Country Link
JP (1) JPS52124883A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56100451A (en) * 1980-01-14 1981-08-12 Matsushita Electric Ind Co Ltd Manufacture of electrode of semiconductor device
JPS58153351A (en) * 1982-03-08 1983-09-12 Mitsubishi Electric Corp Manufacture of semiconductor device
JPS60182726A (en) * 1984-02-29 1985-09-18 Seiko Instr & Electronics Ltd Forming method of pattern film

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56100451A (en) * 1980-01-14 1981-08-12 Matsushita Electric Ind Co Ltd Manufacture of electrode of semiconductor device
JPS58153351A (en) * 1982-03-08 1983-09-12 Mitsubishi Electric Corp Manufacture of semiconductor device
JPS60182726A (en) * 1984-02-29 1985-09-18 Seiko Instr & Electronics Ltd Forming method of pattern film
JPS6322577B2 (en) * 1984-02-29 1988-05-12 Seiko Denshi Kogyo Kk

Also Published As

Publication number Publication date
JPS5734664B2 (en) 1982-07-24

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