JPS532074A - Scribing method for semiconductor wafer - Google Patents
Scribing method for semiconductor waferInfo
- Publication number
- JPS532074A JPS532074A JP7693576A JP7693576A JPS532074A JP S532074 A JPS532074 A JP S532074A JP 7693576 A JP7693576 A JP 7693576A JP 7693576 A JP7693576 A JP 7693576A JP S532074 A JPS532074 A JP S532074A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- scribing method
- scribing
- wavelength
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Dicing (AREA)
Abstract
PURPOSE: To prevent occurrence of minute cracks to the glass film at the cooking time by first scribing the glass film with a laser beam of over 5μ wavelength and then scribing Si with a laser beam of under 1.2μ wavelength.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7693576A JPS532074A (en) | 1976-06-28 | 1976-06-28 | Scribing method for semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7693576A JPS532074A (en) | 1976-06-28 | 1976-06-28 | Scribing method for semiconductor wafer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS532074A true JPS532074A (en) | 1978-01-10 |
JPS5642138B2 JPS5642138B2 (en) | 1981-10-02 |
Family
ID=13619575
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7693576A Granted JPS532074A (en) | 1976-06-28 | 1976-06-28 | Scribing method for semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS532074A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7772090B2 (en) * | 2003-09-30 | 2010-08-10 | Intel Corporation | Methods for laser scribing wafers |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6152938U (en) * | 1984-09-11 | 1986-04-09 |
-
1976
- 1976-06-28 JP JP7693576A patent/JPS532074A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7772090B2 (en) * | 2003-09-30 | 2010-08-10 | Intel Corporation | Methods for laser scribing wafers |
US8364304B2 (en) | 2003-09-30 | 2013-01-29 | Intel Corporation | Methods and apparatus for laser scribing wafers |
Also Published As
Publication number | Publication date |
---|---|
JPS5642138B2 (en) | 1981-10-02 |
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