JPS5686694A - Laser scribe processing method - Google Patents

Laser scribe processing method

Info

Publication number
JPS5686694A
JPS5686694A JP16378279A JP16378279A JPS5686694A JP S5686694 A JPS5686694 A JP S5686694A JP 16378279 A JP16378279 A JP 16378279A JP 16378279 A JP16378279 A JP 16378279A JP S5686694 A JPS5686694 A JP S5686694A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
stage
laser
wafer
beam
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16378279A
Inventor
Josuke Nozaki
Original Assignee
Nec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/362Laser etching
    • B23K26/364Laser etching for making a groove or trench, e.g. for scribing a break initiation groove

Abstract

PURPOSE: To prevent deformation and fusion-fixing of the stage due to heat of laser beam by forming a relief groove in a wafer and by performing scribe processing on a transparent stage from the opposite side.
CONSTITUTION: For the purpose of preventing deformation of processed stage (j) and fusion-fixing between the wafer and processed stage (j) due to heat of laser beam (e), stage (j) is made transparent to permeate laser beam (e). In case of complete clipping, relief groove (i) is opened to the clipped position of the wafer itself for the purpose of preventing the clipped position of the wafer from contact with the processed stage directly.
COPYRIGHT: (C)1981,JPO&Japio
JP16378279A 1979-12-17 1979-12-17 Laser scribe processing method Pending JPS5686694A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16378279A JPS5686694A (en) 1979-12-17 1979-12-17 Laser scribe processing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16378279A JPS5686694A (en) 1979-12-17 1979-12-17 Laser scribe processing method

Publications (1)

Publication Number Publication Date
JPS5686694A true true JPS5686694A (en) 1981-07-14

Family

ID=15780604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16378279A Pending JPS5686694A (en) 1979-12-17 1979-12-17 Laser scribe processing method

Country Status (1)

Country Link
JP (1) JPS5686694A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5753887A (en) * 1995-05-16 1998-05-19 Engraving Technologies, Inc. Apparatus for laser engraving indicia on gemstones
JP2008200694A (en) * 2007-02-19 2008-09-04 Disco Abrasive Syst Ltd Method for machining wafer, and laser beam machining apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5753887A (en) * 1995-05-16 1998-05-19 Engraving Technologies, Inc. Apparatus for laser engraving indicia on gemstones
JP2008200694A (en) * 2007-02-19 2008-09-04 Disco Abrasive Syst Ltd Method for machining wafer, and laser beam machining apparatus

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