JPS52102692A - Preparation of semiconductor integrated circuit device - Google Patents

Preparation of semiconductor integrated circuit device

Info

Publication number
JPS52102692A
JPS52102692A JP1932976A JP1932976A JPS52102692A JP S52102692 A JPS52102692 A JP S52102692A JP 1932976 A JP1932976 A JP 1932976A JP 1932976 A JP1932976 A JP 1932976A JP S52102692 A JPS52102692 A JP S52102692A
Authority
JP
Japan
Prior art keywords
preparation
integrated circuit
semiconductor integrated
circuit device
conductive film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1932976A
Other languages
Japanese (ja)
Inventor
Yoji Yamanaka
Toshio Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP1932976A priority Critical patent/JPS52102692A/en
Publication of JPS52102692A publication Critical patent/JPS52102692A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To obtain wiring pattern of high reliability and accuracy, by selectively transforming a surface of a conductive film covering a surface of a semiconductor substrate to a film having different properties and etching the conductive film adjacent thereto by using it as a mask.
COPYRIGHT: (C)1977,JPO&Japio
JP1932976A 1976-02-24 1976-02-24 Preparation of semiconductor integrated circuit device Pending JPS52102692A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1932976A JPS52102692A (en) 1976-02-24 1976-02-24 Preparation of semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1932976A JPS52102692A (en) 1976-02-24 1976-02-24 Preparation of semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPS52102692A true JPS52102692A (en) 1977-08-29

Family

ID=11996359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1932976A Pending JPS52102692A (en) 1976-02-24 1976-02-24 Preparation of semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS52102692A (en)

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