JPS52102692A - Preparation of semiconductor integrated circuit device - Google Patents
Preparation of semiconductor integrated circuit deviceInfo
- Publication number
- JPS52102692A JPS52102692A JP1932976A JP1932976A JPS52102692A JP S52102692 A JPS52102692 A JP S52102692A JP 1932976 A JP1932976 A JP 1932976A JP 1932976 A JP1932976 A JP 1932976A JP S52102692 A JPS52102692 A JP S52102692A
- Authority
- JP
- Japan
- Prior art keywords
- preparation
- integrated circuit
- semiconductor integrated
- circuit device
- conductive film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To obtain wiring pattern of high reliability and accuracy, by selectively transforming a surface of a conductive film covering a surface of a semiconductor substrate to a film having different properties and etching the conductive film adjacent thereto by using it as a mask.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1932976A JPS52102692A (en) | 1976-02-24 | 1976-02-24 | Preparation of semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1932976A JPS52102692A (en) | 1976-02-24 | 1976-02-24 | Preparation of semiconductor integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52102692A true JPS52102692A (en) | 1977-08-29 |
Family
ID=11996359
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1932976A Pending JPS52102692A (en) | 1976-02-24 | 1976-02-24 | Preparation of semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52102692A (en) |
-
1976
- 1976-02-24 JP JP1932976A patent/JPS52102692A/en active Pending
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