JPH11347940A - 研磨スラリー再生装置及びこれを用いた研磨システム - Google Patents

研磨スラリー再生装置及びこれを用いた研磨システム

Info

Publication number
JPH11347940A
JPH11347940A JP15700498A JP15700498A JPH11347940A JP H11347940 A JPH11347940 A JP H11347940A JP 15700498 A JP15700498 A JP 15700498A JP 15700498 A JP15700498 A JP 15700498A JP H11347940 A JPH11347940 A JP H11347940A
Authority
JP
Japan
Prior art keywords
polishing
slurry
filter
polishing slurry
filters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15700498A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11347940A5 (https=
Inventor
Yoshitaka Morioka
善隆 森岡
Motoyuki Obara
基之 小原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP15700498A priority Critical patent/JPH11347940A/ja
Publication of JPH11347940A publication Critical patent/JPH11347940A/ja
Publication of JPH11347940A5 publication Critical patent/JPH11347940A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP15700498A 1998-06-05 1998-06-05 研磨スラリー再生装置及びこれを用いた研磨システム Pending JPH11347940A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15700498A JPH11347940A (ja) 1998-06-05 1998-06-05 研磨スラリー再生装置及びこれを用いた研磨システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15700498A JPH11347940A (ja) 1998-06-05 1998-06-05 研磨スラリー再生装置及びこれを用いた研磨システム

Publications (2)

Publication Number Publication Date
JPH11347940A true JPH11347940A (ja) 1999-12-21
JPH11347940A5 JPH11347940A5 (https=) 2005-09-15

Family

ID=15640083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15700498A Pending JPH11347940A (ja) 1998-06-05 1998-06-05 研磨スラリー再生装置及びこれを用いた研磨システム

Country Status (1)

Country Link
JP (1) JPH11347940A (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020003939A (ko) * 2000-06-27 2002-01-16 장정훈 씨엠피 장치의 슬러리 재생 시스템
EP1273391A1 (en) * 2001-07-03 2003-01-08 Nidek Co., Ltd. Eyeglass lens processing apparatus
US11141832B2 (en) 2016-02-10 2021-10-12 Ebara Corporation Water discharge system, water discharge method, water discharge control apparatus, water discharge control method, substrate processing apparatus and non-transitory computer readable medium recording water discharge control

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020003939A (ko) * 2000-06-27 2002-01-16 장정훈 씨엠피 장치의 슬러리 재생 시스템
EP1273391A1 (en) * 2001-07-03 2003-01-08 Nidek Co., Ltd. Eyeglass lens processing apparatus
US6881132B2 (en) 2001-07-03 2005-04-19 Nidek Co., Ltd. Grinding water tank unit for use in processing eyeglass lens, device for separating processing debris, and eyeglass lens processing apparatus having the tank unit or device
US11141832B2 (en) 2016-02-10 2021-10-12 Ebara Corporation Water discharge system, water discharge method, water discharge control apparatus, water discharge control method, substrate processing apparatus and non-transitory computer readable medium recording water discharge control

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