JPH11347940A5 - - Google Patents

Info

Publication number
JPH11347940A5
JPH11347940A5 JP1998157004A JP15700498A JPH11347940A5 JP H11347940 A5 JPH11347940 A5 JP H11347940A5 JP 1998157004 A JP1998157004 A JP 1998157004A JP 15700498 A JP15700498 A JP 15700498A JP H11347940 A5 JPH11347940 A5 JP H11347940A5
Authority
JP
Japan
Prior art keywords
polishing
slurry
filter
filters
polishing slurry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998157004A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11347940A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP15700498A priority Critical patent/JPH11347940A/ja
Priority claimed from JP15700498A external-priority patent/JPH11347940A/ja
Publication of JPH11347940A publication Critical patent/JPH11347940A/ja
Publication of JPH11347940A5 publication Critical patent/JPH11347940A5/ja
Pending legal-status Critical Current

Links

JP15700498A 1998-06-05 1998-06-05 研磨スラリー再生装置及びこれを用いた研磨システム Pending JPH11347940A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15700498A JPH11347940A (ja) 1998-06-05 1998-06-05 研磨スラリー再生装置及びこれを用いた研磨システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15700498A JPH11347940A (ja) 1998-06-05 1998-06-05 研磨スラリー再生装置及びこれを用いた研磨システム

Publications (2)

Publication Number Publication Date
JPH11347940A JPH11347940A (ja) 1999-12-21
JPH11347940A5 true JPH11347940A5 (https=) 2005-09-15

Family

ID=15640083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15700498A Pending JPH11347940A (ja) 1998-06-05 1998-06-05 研磨スラリー再生装置及びこれを用いた研磨システム

Country Status (1)

Country Link
JP (1) JPH11347940A (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020003939A (ko) * 2000-06-27 2002-01-16 장정훈 씨엠피 장치의 슬러리 재생 시스템
EP1273391B1 (en) 2001-07-03 2010-06-30 Nidek Co., Ltd. Grinding water tank unit for storing and circulating grinding water
JP6654457B2 (ja) 2016-02-10 2020-02-26 株式会社荏原製作所 基板処理装置用排水システム、排水方法及び排水制御装置並びに記録媒体

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