JPH11320743A - 透明部材 - Google Patents

透明部材

Info

Publication number
JPH11320743A
JPH11320743A JP10128780A JP12878098A JPH11320743A JP H11320743 A JPH11320743 A JP H11320743A JP 10128780 A JP10128780 A JP 10128780A JP 12878098 A JP12878098 A JP 12878098A JP H11320743 A JPH11320743 A JP H11320743A
Authority
JP
Japan
Prior art keywords
water
lens
contact angle
base
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10128780A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11320743A5 (enExample
Inventor
Tetsuo Suzuki
哲男 鈴木
Masaoki Tomota
政興 友田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP10128780A priority Critical patent/JPH11320743A/ja
Publication of JPH11320743A publication Critical patent/JPH11320743A/ja
Publication of JPH11320743A5 publication Critical patent/JPH11320743A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Materials Applied To Surfaces To Minimize Adherence Of Mist Or Water (AREA)
  • Lens Barrels (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP10128780A 1998-05-12 1998-05-12 透明部材 Pending JPH11320743A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10128780A JPH11320743A (ja) 1998-05-12 1998-05-12 透明部材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10128780A JPH11320743A (ja) 1998-05-12 1998-05-12 透明部材

Publications (2)

Publication Number Publication Date
JPH11320743A true JPH11320743A (ja) 1999-11-24
JPH11320743A5 JPH11320743A5 (enExample) 2005-09-29

Family

ID=14993287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10128780A Pending JPH11320743A (ja) 1998-05-12 1998-05-12 透明部材

Country Status (1)

Country Link
JP (1) JPH11320743A (enExample)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003200951B2 (en) * 2002-03-18 2005-04-07 Hoya Corporation Optical member, process of producing optical member, and process of producing thin film
JP2006350208A (ja) * 2005-06-20 2006-12-28 Seiko Epson Corp 光学物品およびその製造方法
AU2005200563B2 (en) * 2002-03-18 2007-07-26 Hoya Corporation Optical member, process of producing optical member, and process of producing thin film
DE102008002193A1 (de) 2007-08-29 2009-03-05 Carl Zeiss Smt Ag Optisches Element mit hydrophober Oberfläche und Projektionsbelichtungsanlage für die Immersionslithographie damit
JP2010188584A (ja) * 2009-02-17 2010-09-02 Nissan Motor Co Ltd 耐擦傷性撥水構造及び耐擦傷性撥水構造体
JP2010251745A (ja) * 2009-04-10 2010-11-04 Asml Netherlands Bv 液浸リソグラフィ装置及びデバイス製造方法
JP2012185348A (ja) * 2011-03-07 2012-09-27 Seiko Epson Corp レンズ及びレンズの製造方法
JP2014228728A (ja) * 2013-05-23 2014-12-08 日揮触媒化成株式会社 反射防止膜付基材およびその製造方法
DE102016203714A1 (de) 2016-03-08 2016-04-28 Carl Zeiss Smt Gmbh Optische Anordnung für die Lithographie, insbesondere Projektionsbelichtungsanlage
WO2022185557A1 (ja) * 2021-03-05 2022-09-09 ナルックス株式会社 ガラス基板に微細凹凸表面構造を製造する方法
US12238398B2 (en) 2022-05-13 2025-02-25 Largan Precision Co., Ltd. Imaging lens assembly, camera module and electronic device

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003200951B2 (en) * 2002-03-18 2005-04-07 Hoya Corporation Optical member, process of producing optical member, and process of producing thin film
US6939613B2 (en) 2002-03-18 2005-09-06 Hoya Corporation Optical member, process of producing optical member, and process of producing thin film
AU2005200563B2 (en) * 2002-03-18 2007-07-26 Hoya Corporation Optical member, process of producing optical member, and process of producing thin film
JP2006350208A (ja) * 2005-06-20 2006-12-28 Seiko Epson Corp 光学物品およびその製造方法
DE102008002193A1 (de) 2007-08-29 2009-03-05 Carl Zeiss Smt Ag Optisches Element mit hydrophober Oberfläche und Projektionsbelichtungsanlage für die Immersionslithographie damit
JP2010188584A (ja) * 2009-02-17 2010-09-02 Nissan Motor Co Ltd 耐擦傷性撥水構造及び耐擦傷性撥水構造体
JP2010251745A (ja) * 2009-04-10 2010-11-04 Asml Netherlands Bv 液浸リソグラフィ装置及びデバイス製造方法
US8993220B2 (en) 2009-04-10 2015-03-31 Asml Netherlands B.V. Immersion lithographic apparatus and a device manufacturing method
JP2012185348A (ja) * 2011-03-07 2012-09-27 Seiko Epson Corp レンズ及びレンズの製造方法
JP2014228728A (ja) * 2013-05-23 2014-12-08 日揮触媒化成株式会社 反射防止膜付基材およびその製造方法
DE102016203714A1 (de) 2016-03-08 2016-04-28 Carl Zeiss Smt Gmbh Optische Anordnung für die Lithographie, insbesondere Projektionsbelichtungsanlage
WO2022185557A1 (ja) * 2021-03-05 2022-09-09 ナルックス株式会社 ガラス基板に微細凹凸表面構造を製造する方法
US12238398B2 (en) 2022-05-13 2025-02-25 Largan Precision Co., Ltd. Imaging lens assembly, camera module and electronic device

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