JPH11294520A5 - - Google Patents

Info

Publication number
JPH11294520A5
JPH11294520A5 JP1998095893A JP9589398A JPH11294520A5 JP H11294520 A5 JPH11294520 A5 JP H11294520A5 JP 1998095893 A JP1998095893 A JP 1998095893A JP 9589398 A JP9589398 A JP 9589398A JP H11294520 A5 JPH11294520 A5 JP H11294520A5
Authority
JP
Japan
Prior art keywords
actuator
compensation
vibration isolation
signal
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998095893A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11294520A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP10095893A priority Critical patent/JPH11294520A/ja
Priority claimed from JP10095893A external-priority patent/JPH11294520A/ja
Priority to US09/286,438 priority patent/US6322060B1/en
Publication of JPH11294520A publication Critical patent/JPH11294520A/ja
Publication of JPH11294520A5 publication Critical patent/JPH11294520A5/ja
Pending legal-status Critical Current

Links

JP10095893A 1998-04-08 1998-04-08 除振装置、これを用いた露光装置およびデバイス製造方法、ならびに除振方法 Pending JPH11294520A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10095893A JPH11294520A (ja) 1998-04-08 1998-04-08 除振装置、これを用いた露光装置およびデバイス製造方法、ならびに除振方法
US09/286,438 US6322060B1 (en) 1998-04-08 1999-04-06 Anti-vibration apparatus, exposure apparatus using the same, device manufacturing method, and anti-vibration method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10095893A JPH11294520A (ja) 1998-04-08 1998-04-08 除振装置、これを用いた露光装置およびデバイス製造方法、ならびに除振方法

Publications (2)

Publication Number Publication Date
JPH11294520A JPH11294520A (ja) 1999-10-29
JPH11294520A5 true JPH11294520A5 (https=) 2007-03-22

Family

ID=14149999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10095893A Pending JPH11294520A (ja) 1998-04-08 1998-04-08 除振装置、これを用いた露光装置およびデバイス製造方法、ならびに除振方法

Country Status (2)

Country Link
US (1) US6322060B1 (https=)
JP (1) JPH11294520A (https=)

Families Citing this family (80)

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US7869000B2 (en) * 2004-11-02 2011-01-11 Nikon Corporation Stage assembly with lightweight fine stage and low transmissibility
US7417714B2 (en) * 2004-11-02 2008-08-26 Nikon Corporation Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage
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JP2007071348A (ja) * 2005-09-08 2007-03-22 Unirock:Kk 防振装置
US20070152409A1 (en) * 2005-12-29 2007-07-05 Emiph, Llc Method and apparatus for a low-profile suspension system
US7740234B2 (en) * 2005-12-22 2010-06-22 Elliptical Mobile Solutions, LLC Method and apparatus for a low-profile suspension system
EP1803967B1 (de) * 2005-12-30 2016-08-03 Integrated Dynamics Engineering GmbH Schwingungsisolationssystem mit Störgrössenaufschaltung von vorhersehbaren Kraftstörungen
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US7887033B2 (en) * 2006-06-06 2011-02-15 Deere & Company Suspension system having active compensation for vibration
US8908144B2 (en) * 2006-09-27 2014-12-09 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
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JP2008227015A (ja) * 2007-03-09 2008-09-25 Canon Inc 露光装置並びにデバイス製造方法
JP2008256155A (ja) * 2007-04-06 2008-10-23 Canon Inc 除振装置、演算装置、露光装置及びデバイス製造方法
JP2009016402A (ja) * 2007-06-29 2009-01-22 Canon Inc 除振装置、露光装置およびデバイス製造方法
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WO2014013733A1 (ja) * 2012-07-18 2014-01-23 株式会社ニコン 支持装置、移動体装置、露光装置、及びデバイス製造方法
EP2759735B1 (de) * 2013-01-29 2016-06-15 Integrated Dynamics Engineering GmbH Stationäres Schwingungsisolationssystem sowie Verfahren zur Regelung eines Schwingungsisolationssystems
EP3056868B1 (en) * 2013-10-09 2023-12-20 FUJI Corporation Multiplexing communication system and working robot
CN103698984B (zh) * 2013-12-17 2017-01-04 嘉兴华嶺机电设备有限公司 一种超精扫描镀膜及定位光刻设备
WO2016056003A1 (en) * 2014-10-07 2016-04-14 Yaron Zimmerman Device and method for position control using two independently controllable electromagnetic drive arrangements
JP2017072219A (ja) * 2015-10-08 2017-04-13 キヤノン株式会社 振動制御装置、リソグラフィ装置、および物品の製造方法
US10152879B2 (en) * 2015-11-10 2018-12-11 Industrial Technology Research Institute Method, apparatus, and system for monitoring manufacturing equipment
JP6681982B2 (ja) * 2015-11-23 2020-04-15 エーエスエムエル ネザーランズ ビー．ブイ． 位置決めデバイス、リソグラフィ装置、及びデバイス製造方法
EP3181944B1 (de) 2015-12-16 2023-04-26 Integrated Dynamics Engineering GmbH Schwingungsisolator mit einer vertikal wirksamen pneumatischen feder
NL2017809A (en) * 2015-12-21 2017-06-27 Asml Netherlands Bv Lithographic apparatus having an active base frame support
EP3260732B1 (de) 2016-06-23 2019-03-27 Integrated Dynamics Engineering GmbH Pneumatischer aktor sowie verfahren zum betrieb eines aktiven schwingungsisolationssystem
EP3260733B1 (de) * 2016-06-23 2019-08-07 Integrated Dynamics Engineering GmbH Aktives stationäres schwingungsisolationssystem
DE102017002542A1 (de) 2017-03-16 2018-09-20 Applied Materials, Inc. (N.D.Ges.D. Staates Delaware) Vorrichtung zum Halten, Positionieren und/oder Bewegen eines Objekts
NL2022752A (en) 2018-04-25 2019-10-31 Asml Netherlands Bv Pneumatic support device and lithographic apparatus with pneumatic support device.
KR102653016B1 (ko) 2018-09-18 2024-03-29 삼성전자주식회사 척 구동 장치 및 기판 처리 장치
CN109253349B (zh) * 2018-10-29 2021-02-26 合肥康尔信电力系统有限公司 一种柴油机发电组安装调节机构
EP3712462A1 (de) * 2019-03-19 2020-09-23 Integrated Dynamics Engineering GmbH Schwingungsisolationssystem mit einem magnetaktor
TW202244627A (zh) * 2021-01-08 2022-11-16 美商應用材料股份有限公司 主動式線性馬達寄生力補償
EP4467838A4 (en) * 2022-02-21 2025-10-08 Shenzhen Yinwang Intelligent Technology Co Ltd AIR SPRING, VIBRATION ISOLATION DEVICE, SENSOR ASSEMBLY, VIBRATION ISOLATION CONTROL METHOD, AND VEHICLE
CN115638208B (zh) * 2022-10-20 2025-07-11 新兴铸管股份有限公司 箱体风机减振装置
JP2024115687A (ja) * 2023-02-15 2024-08-27 特許機器株式会社 流体制御システム、及び、制御方法
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CN119395950A (zh) * 2024-11-29 2025-02-07 江苏富港智能科技有限公司 一种具有防振机构的曝光机

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