JPH11233846A5 - - Google Patents

Info

Publication number
JPH11233846A5
JPH11233846A5 JP1998034980A JP3498098A JPH11233846A5 JP H11233846 A5 JPH11233846 A5 JP H11233846A5 JP 1998034980 A JP1998034980 A JP 1998034980A JP 3498098 A JP3498098 A JP 3498098A JP H11233846 A5 JPH11233846 A5 JP H11233846A5
Authority
JP
Japan
Prior art keywords
multilayer piezoelectric
piezoelectric element
manufacturing
electrode
primary laminate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998034980A
Other languages
English (en)
Japanese (ja)
Other versions
JP4106122B2 (ja
JPH11233846A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP03498098A priority Critical patent/JP4106122B2/ja
Priority claimed from JP03498098A external-priority patent/JP4106122B2/ja
Publication of JPH11233846A publication Critical patent/JPH11233846A/ja
Publication of JPH11233846A5 publication Critical patent/JPH11233846A5/ja
Application granted granted Critical
Publication of JP4106122B2 publication Critical patent/JP4106122B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP03498098A 1998-02-17 1998-02-17 積層圧電素子の製造方法 Expired - Lifetime JP4106122B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03498098A JP4106122B2 (ja) 1998-02-17 1998-02-17 積層圧電素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03498098A JP4106122B2 (ja) 1998-02-17 1998-02-17 積層圧電素子の製造方法

Publications (3)

Publication Number Publication Date
JPH11233846A JPH11233846A (ja) 1999-08-27
JPH11233846A5 true JPH11233846A5 (enExample) 2005-06-30
JP4106122B2 JP4106122B2 (ja) 2008-06-25

Family

ID=12429305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP03498098A Expired - Lifetime JP4106122B2 (ja) 1998-02-17 1998-02-17 積層圧電素子の製造方法

Country Status (1)

Country Link
JP (1) JP4106122B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011071525A (ja) * 2003-05-22 2011-04-07 Seiko Instruments Inc 積層圧電素子を用いた超音波モータ並びにそれを用いた電子機器、ステージ、及び積層圧電素子の製造方法
JP2009117559A (ja) * 2007-11-05 2009-05-28 Olympus Corp 積層圧電素子及び超音波モータ
JP2011124588A (ja) * 2011-01-14 2011-06-23 Ngk Insulators Ltd 圧電／電歪デバイスの製造方法

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