JP4106122B2 - 積層圧電素子の製造方法 - Google Patents

積層圧電素子の製造方法 Download PDF

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Publication number
JP4106122B2
JP4106122B2 JP03498098A JP3498098A JP4106122B2 JP 4106122 B2 JP4106122 B2 JP 4106122B2 JP 03498098 A JP03498098 A JP 03498098A JP 3498098 A JP3498098 A JP 3498098A JP 4106122 B2 JP4106122 B2 JP 4106122B2
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JP
Japan
Prior art keywords
piezoelectric element
laminated
manufacturing
laminated piezoelectric
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP03498098A
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English (en)
Japanese (ja)
Other versions
JPH11233846A (ja
JPH11233846A5 (enExample
Inventor
裕 丸山
信行 小島
信之 南
義博 浅井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Taiheiyo Cement Corp
Original Assignee
Canon Inc
Taiheiyo Cement Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc, Taiheiyo Cement Corp filed Critical Canon Inc
Priority to JP03498098A priority Critical patent/JP4106122B2/ja
Publication of JPH11233846A publication Critical patent/JPH11233846A/ja
Publication of JPH11233846A5 publication Critical patent/JPH11233846A5/ja
Application granted granted Critical
Publication of JP4106122B2 publication Critical patent/JP4106122B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP03498098A 1998-02-17 1998-02-17 積層圧電素子の製造方法 Expired - Lifetime JP4106122B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03498098A JP4106122B2 (ja) 1998-02-17 1998-02-17 積層圧電素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03498098A JP4106122B2 (ja) 1998-02-17 1998-02-17 積層圧電素子の製造方法

Publications (3)

Publication Number Publication Date
JPH11233846A JPH11233846A (ja) 1999-08-27
JPH11233846A5 JPH11233846A5 (enExample) 2005-06-30
JP4106122B2 true JP4106122B2 (ja) 2008-06-25

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ID=12429305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP03498098A Expired - Lifetime JP4106122B2 (ja) 1998-02-17 1998-02-17 積層圧電素子の製造方法

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JP (1) JP4106122B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011071525A (ja) * 2003-05-22 2011-04-07 Seiko Instruments Inc 積層圧電素子を用いた超音波モータ並びにそれを用いた電子機器、ステージ、及び積層圧電素子の製造方法
JP2009117559A (ja) * 2007-11-05 2009-05-28 Olympus Corp 積層圧電素子及び超音波モータ
JP2011124588A (ja) * 2011-01-14 2011-06-23 Ngk Insulators Ltd 圧電／電歪デバイスの製造方法

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Publication number Publication date
JPH11233846A (ja) 1999-08-27

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