JPH11231223A - 走査型光学顕微鏡 - Google Patents

走査型光学顕微鏡

Info

Publication number
JPH11231223A
JPH11231223A JP3296598A JP3296598A JPH11231223A JP H11231223 A JPH11231223 A JP H11231223A JP 3296598 A JP3296598 A JP 3296598A JP 3296598 A JP3296598 A JP 3296598A JP H11231223 A JPH11231223 A JP H11231223A
Authority
JP
Japan
Prior art keywords
image
image information
unit
sample
magnification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3296598A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11231223A5 (enExample
Inventor
Shigeru Kobayashi
茂 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP3296598A priority Critical patent/JPH11231223A/ja
Publication of JPH11231223A publication Critical patent/JPH11231223A/ja
Publication of JPH11231223A5 publication Critical patent/JPH11231223A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Microscoopes, Condenser (AREA)
JP3296598A 1998-02-16 1998-02-16 走査型光学顕微鏡 Pending JPH11231223A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3296598A JPH11231223A (ja) 1998-02-16 1998-02-16 走査型光学顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3296598A JPH11231223A (ja) 1998-02-16 1998-02-16 走査型光学顕微鏡

Publications (2)

Publication Number Publication Date
JPH11231223A true JPH11231223A (ja) 1999-08-27
JPH11231223A5 JPH11231223A5 (enExample) 2005-08-11

Family

ID=12373634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3296598A Pending JPH11231223A (ja) 1998-02-16 1998-02-16 走査型光学顕微鏡

Country Status (1)

Country Link
JP (1) JPH11231223A (enExample)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005352100A (ja) * 2004-06-10 2005-12-22 Olympus Corp 顕微鏡装置、画像表示方法および画像表示プログラム
JP2007272117A (ja) * 2006-03-31 2007-10-18 Seiko Precision Inc 顕微鏡、顕微鏡の制御方法、及び顕微鏡の制御プログラム
WO2010035414A1 (ja) * 2008-09-26 2010-04-01 オリンパス株式会社 顕微鏡システム、該制御プログラムが格納された記憶媒体、及び該制御方法
JP2010078983A (ja) * 2008-09-26 2010-04-08 Olympus Corp 顕微鏡システム、該プログラム、及び該方法
JP2011196867A (ja) * 2010-03-19 2011-10-06 Olympus Corp 顕微鏡システム、観察画像の表示方法、プログラム
JP2011211035A (ja) * 2010-03-30 2011-10-20 Lasertec Corp 検査装置並びに欠陥分類方法及び欠陥検出方法
EP2503371A2 (en) 2011-03-23 2012-09-26 Olympus Corporation Microscope with misalignment correction means
JP2015125326A (ja) * 2013-12-26 2015-07-06 オリンパス株式会社 画像形成方法、及び、画像形成装置
US9141846B2 (en) 2012-11-14 2015-09-22 Fujitsu Limited Image processing device, image processing system, image processing method, and recording medium
DE102004047519B4 (de) 2004-09-28 2021-08-12 Leica Microsystems Cms Gmbh Verfahren zur Überlagerung optischer Informationen bei einem Scan-Mikroskop

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005352100A (ja) * 2004-06-10 2005-12-22 Olympus Corp 顕微鏡装置、画像表示方法および画像表示プログラム
DE102004047519B4 (de) 2004-09-28 2021-08-12 Leica Microsystems Cms Gmbh Verfahren zur Überlagerung optischer Informationen bei einem Scan-Mikroskop
JP2007272117A (ja) * 2006-03-31 2007-10-18 Seiko Precision Inc 顕微鏡、顕微鏡の制御方法、及び顕微鏡の制御プログラム
US8699129B2 (en) 2008-09-26 2014-04-15 Olympus Corporation Microscope system, storage medium storing control program, and control method
US8339702B2 (en) 2008-09-26 2012-12-25 Olympus Corporation Microscope system, storage medium storing control program, and control method
JP2010078983A (ja) * 2008-09-26 2010-04-08 Olympus Corp 顕微鏡システム、該プログラム、及び該方法
WO2010035414A1 (ja) * 2008-09-26 2010-04-01 オリンパス株式会社 顕微鏡システム、該制御プログラムが格納された記憶媒体、及び該制御方法
JP2011196867A (ja) * 2010-03-19 2011-10-06 Olympus Corp 顕微鏡システム、観察画像の表示方法、プログラム
JP2011211035A (ja) * 2010-03-30 2011-10-20 Lasertec Corp 検査装置並びに欠陥分類方法及び欠陥検出方法
EP2503371A2 (en) 2011-03-23 2012-09-26 Olympus Corporation Microscope with misalignment correction means
JP2012203049A (ja) * 2011-03-23 2012-10-22 Olympus Corp 顕微鏡
US8958148B2 (en) 2011-03-23 2015-02-17 Olympus Corporation Microscope
US9141846B2 (en) 2012-11-14 2015-09-22 Fujitsu Limited Image processing device, image processing system, image processing method, and recording medium
JP2015125326A (ja) * 2013-12-26 2015-07-06 オリンパス株式会社 画像形成方法、及び、画像形成装置

Similar Documents

Publication Publication Date Title
EP0380904B1 (en) Solid state microscope
US8908271B2 (en) Laser scanning microscope and its operating method
JPH08160305A (ja) レーザー走査顕微鏡
CN102449527B (zh) 图像处理装置、图像处理方法和显微镜
JPH01113605A (ja) 立体形状測定装置
JP4468507B2 (ja) 走査型レーザ顕微鏡
JP3861000B2 (ja) 走査型レーザー顕微鏡
JP2006139965A (ja) 走査型電子顕微鏡及び半導体検査システム
JP2010080144A (ja) 複合型顕微鏡装置及び試料観察方法
JPH11231223A (ja) 走査型光学顕微鏡
JP2524574B2 (ja) 走査型光学顕微鏡
JP2002098901A (ja) 走査型レーザ顕微鏡
JPH0718975B2 (ja) 走査型光学顕微鏡
JP2000275541A (ja) レーザ顕微鏡
JP4410335B2 (ja) 共焦点顕微鏡
JP4350365B2 (ja) レーザ走査型顕微鏡
EP1882967B1 (en) Scanning examination apparatus
JP4574758B2 (ja) 顕微鏡画像観察装置
JP3708277B2 (ja) 走査型光学測定装置
JP3592182B2 (ja) 撮像装置
WO2019098150A1 (ja) 観察装置および方法並びに観察装置制御プログラム
JPH10333056A (ja) 顕微鏡装置及び画像作成方法
JPH11237554A (ja) 走査型光学顕微鏡
JPH09297269A (ja) 走査型画像入力装置及び走査型プローブ顕微鏡
JP2004177732A (ja) 光学測定装置

Legal Events

Date Code Title Description
A521 Written amendment

Effective date: 20050126

Free format text: JAPANESE INTERMEDIATE CODE: A523

A621 Written request for application examination

Effective date: 20050126

Free format text: JAPANESE INTERMEDIATE CODE: A621

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20060713

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060926

A521 Written amendment

Effective date: 20061122

Free format text: JAPANESE INTERMEDIATE CODE: A523

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20071030