JPH11160242A5 - - Google Patents

Info

Publication number
JPH11160242A5
JPH11160242A5 JP1998264342A JP26434298A JPH11160242A5 JP H11160242 A5 JPH11160242 A5 JP H11160242A5 JP 1998264342 A JP1998264342 A JP 1998264342A JP 26434298 A JP26434298 A JP 26434298A JP H11160242 A5 JPH11160242 A5 JP H11160242A5
Authority
JP
Japan
Prior art keywords
substrate
inspected
unit
observation
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998264342A
Other languages
English (en)
Japanese (ja)
Other versions
JP4166340B2 (ja
JPH11160242A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP26434298A priority Critical patent/JP4166340B2/ja
Priority claimed from JP26434298A external-priority patent/JP4166340B2/ja
Priority to US09/158,362 priority patent/US6362884B1/en
Publication of JPH11160242A publication Critical patent/JPH11160242A/ja
Priority to US09/768,549 priority patent/US6671041B2/en
Priority to US10/042,032 priority patent/US6707546B2/en
Publication of JPH11160242A5 publication Critical patent/JPH11160242A5/ja
Application granted granted Critical
Publication of JP4166340B2 publication Critical patent/JP4166340B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP26434298A 1997-09-24 1998-09-18 基板検査装置 Expired - Fee Related JP4166340B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP26434298A JP4166340B2 (ja) 1997-09-24 1998-09-18 基板検査装置
US09/158,362 US6362884B1 (en) 1997-09-24 1998-09-22 Apparatus for inspecting a substrate
US09/768,549 US6671041B2 (en) 1997-09-24 2001-01-24 Apparatus for inspecting a substrate
US10/042,032 US6707546B2 (en) 1997-09-24 2001-10-25 Apparatus for inspecting a substrate

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP9-258552 1997-09-24
JP25855297 1997-09-24
JP26434298A JP4166340B2 (ja) 1997-09-24 1998-09-18 基板検査装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008163832A Division JP4755673B2 (ja) 1997-09-24 2008-06-23 基板検査装置

Publications (3)

Publication Number Publication Date
JPH11160242A JPH11160242A (ja) 1999-06-18
JPH11160242A5 true JPH11160242A5 (enExample) 2005-11-04
JP4166340B2 JP4166340B2 (ja) 2008-10-15

Family

ID=26543724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26434298A Expired - Fee Related JP4166340B2 (ja) 1997-09-24 1998-09-18 基板検査装置

Country Status (2)

Country Link
US (2) US6362884B1 (enExample)
JP (1) JP4166340B2 (enExample)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6671041B2 (en) * 1997-09-24 2003-12-30 Olympus Optical Co., Ltd. Apparatus for inspecting a substrate
JP3958852B2 (ja) * 1997-12-22 2007-08-15 株式会社日本マイクロニクス 被測定基板の検査装置
IL126866A (en) 1998-11-02 2003-02-12 Orbotech Ltd Apparatus and method for fabricating flat workpieces
JP2001050858A (ja) * 1999-08-04 2001-02-23 Micronics Japan Co Ltd 表示用パネル基板の検査装置
KR100432359B1 (ko) * 1999-09-22 2004-05-20 올림푸스 가부시키가이샤 평행기구 및 검사장치
JP2002082067A (ja) * 2000-09-05 2002-03-22 Olympus Optical Co Ltd 基板検査装置
TWI221190B (en) * 2001-06-29 2004-09-21 Olympus Optical Co Coordinate detector
US6507403B1 (en) * 2001-07-16 2003-01-14 Honeywell International Inc. Gloss sensor having dirt buildup compensation apparatus and method
TW593977B (en) * 2002-05-21 2004-06-21 Infineon Technologies Ag Microscope arrangement for inspecting a substrate
JP3931111B2 (ja) * 2002-05-30 2007-06-13 オリンパス株式会社 基板保持装置及び基板検査装置
TWI243258B (en) * 2002-11-29 2005-11-11 Hon Hai Prec Ind Co Ltd Measurement apparatus of light guide plate
US7142295B2 (en) * 2003-03-05 2006-11-28 Corning Incorporated Inspection of transparent substrates for defects
KR20050004588A (ko) * 2003-07-03 2005-01-12 주식회사 한택 디스플레이 패널의 결함 검출 장치 및 방법
KR101166828B1 (ko) * 2005-12-29 2012-07-19 엘지디스플레이 주식회사 평판표시장치용 검사장비 및 검사 방법
KR101201322B1 (ko) * 2005-12-29 2012-11-14 엘지디스플레이 주식회사 평판표시장치용 육안 검사장비 및 검사 방법
JP5005945B2 (ja) * 2006-04-03 2012-08-22 オリンパス株式会社 基板検査装置
DE102007032609A1 (de) * 2007-07-11 2009-03-05 Corpus.E Ag Kostengünstige Erfassung der inneren Raumform von Fußbekleidung und Körpern
US7679393B2 (en) * 2008-05-12 2010-03-16 Kuo Shun-Kun Testing apparatus for fixing and testing a LCD panel
US8432540B2 (en) * 2010-03-31 2013-04-30 Cooper S.K. Kuo Support mechanism for inspection systems
CN103323960B (zh) * 2013-05-15 2016-03-30 友达光电（苏州）有限公司 定位装置及使用其的检测装置、组装装置
CN104714312B (zh) * 2013-12-11 2018-06-22 苏州三星显示有限公司 液晶屏检测装置
JP6320108B2 (ja) * 2014-03-27 2018-05-09 株式会社Ｆｕｊｉ 不良製品の目視検査を実施する作業者を支援する装置
CN105466946B (zh) * 2014-08-25 2023-11-17 深圳市研祥智慧科技股份有限公司 基于机器视觉的在线检测系统及其检测方法
TW201632857A (zh) * 2015-03-03 2016-09-16 Xie ming fang 曲面鏡片檢測方法
KR20210003159A (ko) * 2018-04-17 2021-01-11 토템즈 포지션 에스에이알엘 부품의 위치 결정 장치 및 방법
CN112596283A (zh) * 2020-12-03 2021-04-02 深圳市韩安特科技有限公司 多功能液晶面板检测设备及其检测方法
CN113578760B (zh) * 2021-07-06 2023-03-24 彩虹（合肥）液晶玻璃有限公司 一种玻璃基板缺陷检测处理装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4836667A (en) * 1986-05-06 1989-06-06 Slidex Corporation Microscope
DE69112272T2 (de) * 1990-05-21 1996-02-01 Ntn Toyo Bearing Co Ltd Verfahren und Gerät zur Laserbearbeitung.
JP2942601B2 (ja) * 1990-08-07 1999-08-30 オリンパス光学工業株式会社 目視・顕微鏡観察装置
JP3021599B2 (ja) 1990-10-15 2000-03-15 オリンパス光学工業株式会社 目視観察装置とそれを用いた目視・顕微鏡観察装置
JP3365781B2 (ja) 1991-10-15 2003-01-14 オリンパス光学工業株式会社 基板外観検査装置
JP3190406B2 (ja) 1992-02-18 2001-07-23 オリンパス光学工業株式会社 欠陥検査装置
JPH05322783A (ja) 1992-05-25 1993-12-07 Olympus Optical Co Ltd 基板観察装置
US5479252A (en) * 1993-06-17 1995-12-26 Ultrapointe Corporation Laser imaging system for inspection and analysis of sub-micron particles
US5787760A (en) * 1993-11-24 1998-08-04 Thorlakson; Richard G. Method and foot pedal apparatus for operating a microscope
JP3392573B2 (ja) * 1994-03-31 2003-03-31 株式会社東芝 試料検査装置及び方法
KR960015001A (ko) * 1994-10-07 1996-05-22 가나이 쓰토무 반도체 기판의 제조방법과 피검사체상의 패턴결함을 검사하기 위한 방법 및 장치
KR100399813B1 (ko) * 1994-12-14 2004-06-09 가부시키가이샤 니콘 노광장치
JP3584301B2 (ja) * 1996-03-12 2004-11-04 株式会社ニコン 顕微鏡用架台

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