JP4166340B2 - 基板検査装置 - Google Patents

基板検査装置 Download PDF

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Publication number
JP4166340B2
JP4166340B2 JP26434298A JP26434298A JP4166340B2 JP 4166340 B2 JP4166340 B2 JP 4166340B2 JP 26434298 A JP26434298 A JP 26434298A JP 26434298 A JP26434298 A JP 26434298A JP 4166340 B2 JP4166340 B2 JP 4166340B2
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JP
Japan
Prior art keywords
substrate
inspected
laser light
light source
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP26434298A
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English (en)
Japanese (ja)
Other versions
JPH11160242A (ja
JPH11160242A5 (enExample
Inventor
裕幸 岡平
郁三 中村
晃正 森田
暢夫 藤崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP26434298A priority Critical patent/JP4166340B2/ja
Priority to US09/158,362 priority patent/US6362884B1/en
Publication of JPH11160242A publication Critical patent/JPH11160242A/ja
Priority to US09/768,549 priority patent/US6671041B2/en
Priority to US10/042,032 priority patent/US6707546B2/en
Publication of JPH11160242A5 publication Critical patent/JPH11160242A5/ja
Application granted granted Critical
Publication of JP4166340B2 publication Critical patent/JP4166340B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
JP26434298A 1997-09-24 1998-09-18 基板検査装置 Expired - Fee Related JP4166340B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP26434298A JP4166340B2 (ja) 1997-09-24 1998-09-18 基板検査装置
US09/158,362 US6362884B1 (en) 1997-09-24 1998-09-22 Apparatus for inspecting a substrate
US09/768,549 US6671041B2 (en) 1997-09-24 2001-01-24 Apparatus for inspecting a substrate
US10/042,032 US6707546B2 (en) 1997-09-24 2001-10-25 Apparatus for inspecting a substrate

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP9-258552 1997-09-24
JP25855297 1997-09-24
JP26434298A JP4166340B2 (ja) 1997-09-24 1998-09-18 基板検査装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008163832A Division JP4755673B2 (ja) 1997-09-24 2008-06-23 基板検査装置

Publications (3)

Publication Number Publication Date
JPH11160242A JPH11160242A (ja) 1999-06-18
JPH11160242A5 JPH11160242A5 (enExample) 2005-11-04
JP4166340B2 true JP4166340B2 (ja) 2008-10-15

Family

ID=26543724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26434298A Expired - Fee Related JP4166340B2 (ja) 1997-09-24 1998-09-18 基板検査装置

Country Status (2)

Country Link
US (2) US6362884B1 (enExample)
JP (1) JP4166340B2 (enExample)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6671041B2 (en) * 1997-09-24 2003-12-30 Olympus Optical Co., Ltd. Apparatus for inspecting a substrate
JP3958852B2 (ja) * 1997-12-22 2007-08-15 株式会社日本マイクロニクス 被測定基板の検査装置
IL126866A (en) 1998-11-02 2003-02-12 Orbotech Ltd Apparatus and method for fabricating flat workpieces
JP2001050858A (ja) * 1999-08-04 2001-02-23 Micronics Japan Co Ltd 表示用パネル基板の検査装置
KR100432359B1 (ko) * 1999-09-22 2004-05-20 올림푸스 가부시키가이샤 평행기구 및 검사장치
JP2002082067A (ja) * 2000-09-05 2002-03-22 Olympus Optical Co Ltd 基板検査装置
TWI221190B (en) * 2001-06-29 2004-09-21 Olympus Optical Co Coordinate detector
US6507403B1 (en) * 2001-07-16 2003-01-14 Honeywell International Inc. Gloss sensor having dirt buildup compensation apparatus and method
TW593977B (en) * 2002-05-21 2004-06-21 Infineon Technologies Ag Microscope arrangement for inspecting a substrate
JP3931111B2 (ja) * 2002-05-30 2007-06-13 オリンパス株式会社 基板保持装置及び基板検査装置
TWI243258B (en) * 2002-11-29 2005-11-11 Hon Hai Prec Ind Co Ltd Measurement apparatus of light guide plate
US7142295B2 (en) * 2003-03-05 2006-11-28 Corning Incorporated Inspection of transparent substrates for defects
KR20050004588A (ko) * 2003-07-03 2005-01-12 주식회사 한택 디스플레이 패널의 결함 검출 장치 및 방법
KR101166828B1 (ko) * 2005-12-29 2012-07-19 엘지디스플레이 주식회사 평판표시장치용 검사장비 및 검사 방법
KR101201322B1 (ko) * 2005-12-29 2012-11-14 엘지디스플레이 주식회사 평판표시장치용 육안 검사장비 및 검사 방법
JP5005945B2 (ja) * 2006-04-03 2012-08-22 オリンパス株式会社 基板検査装置
DE102007032609A1 (de) * 2007-07-11 2009-03-05 Corpus.E Ag Kostengünstige Erfassung der inneren Raumform von Fußbekleidung und Körpern
US7679393B2 (en) * 2008-05-12 2010-03-16 Kuo Shun-Kun Testing apparatus for fixing and testing a LCD panel
US8432540B2 (en) * 2010-03-31 2013-04-30 Cooper S.K. Kuo Support mechanism for inspection systems
CN103323960B (zh) * 2013-05-15 2016-03-30 友达光电（苏州）有限公司 定位装置及使用其的检测装置、组装装置
CN104714312B (zh) * 2013-12-11 2018-06-22 苏州三星显示有限公司 液晶屏检测装置
JP6320108B2 (ja) * 2014-03-27 2018-05-09 株式会社Ｆｕｊｉ 不良製品の目視検査を実施する作業者を支援する装置
CN105466946B (zh) * 2014-08-25 2023-11-17 深圳市研祥智慧科技股份有限公司 基于机器视觉的在线检测系统及其检测方法
TW201632857A (zh) * 2015-03-03 2016-09-16 Xie ming fang 曲面鏡片檢測方法
KR20210003159A (ko) * 2018-04-17 2021-01-11 토템즈 포지션 에스에이알엘 부품의 위치 결정 장치 및 방법
CN112596283A (zh) * 2020-12-03 2021-04-02 深圳市韩安特科技有限公司 多功能液晶面板检测设备及其检测方法
CN113578760B (zh) * 2021-07-06 2023-03-24 彩虹（合肥）液晶玻璃有限公司 一种玻璃基板缺陷检测处理装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4836667A (en) * 1986-05-06 1989-06-06 Slidex Corporation Microscope
DE69112272T2 (de) * 1990-05-21 1996-02-01 Ntn Toyo Bearing Co Ltd Verfahren und Gerät zur Laserbearbeitung.
JP2942601B2 (ja) * 1990-08-07 1999-08-30 オリンパス光学工業株式会社 目視・顕微鏡観察装置
JP3021599B2 (ja) 1990-10-15 2000-03-15 オリンパス光学工業株式会社 目視観察装置とそれを用いた目視・顕微鏡観察装置
JP3365781B2 (ja) 1991-10-15 2003-01-14 オリンパス光学工業株式会社 基板外観検査装置
JP3190406B2 (ja) 1992-02-18 2001-07-23 オリンパス光学工業株式会社 欠陥検査装置
JPH05322783A (ja) 1992-05-25 1993-12-07 Olympus Optical Co Ltd 基板観察装置
US5479252A (en) * 1993-06-17 1995-12-26 Ultrapointe Corporation Laser imaging system for inspection and analysis of sub-micron particles
US5787760A (en) * 1993-11-24 1998-08-04 Thorlakson; Richard G. Method and foot pedal apparatus for operating a microscope
JP3392573B2 (ja) * 1994-03-31 2003-03-31 株式会社東芝 試料検査装置及び方法
KR960015001A (ko) * 1994-10-07 1996-05-22 가나이 쓰토무 반도체 기판의 제조방법과 피검사체상의 패턴결함을 검사하기 위한 방법 및 장치
KR100399813B1 (ko) * 1994-12-14 2004-06-09 가부시키가이샤 니콘 노광장치
JP3584301B2 (ja) * 1996-03-12 2004-11-04 株式会社ニコン 顕微鏡用架台

Also Published As

Publication number Publication date
US6362884B1 (en) 2002-03-26
JPH11160242A (ja) 1999-06-18
US20020057429A1 (en) 2002-05-16
US6707546B2 (en) 2004-03-16

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