JPH1194756A5 - - Google Patents

Info

Publication number
JPH1194756A5
JPH1194756A5 JP1997258559A JP25855997A JPH1194756A5 JP H1194756 A5 JPH1194756 A5 JP H1194756A5 JP 1997258559 A JP1997258559 A JP 1997258559A JP 25855997 A JP25855997 A JP 25855997A JP H1194756 A5 JPH1194756 A5 JP H1194756A5
Authority
JP
Japan
Prior art keywords
substrate
observation unit
inspected
objective lens
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997258559A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1194756A (ja
JP3944285B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP25855997A priority Critical patent/JP3944285B2/ja
Priority claimed from JP25855997A external-priority patent/JP3944285B2/ja
Publication of JPH1194756A publication Critical patent/JPH1194756A/ja
Publication of JPH1194756A5 publication Critical patent/JPH1194756A5/ja
Application granted granted Critical
Publication of JP3944285B2 publication Critical patent/JP3944285B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP25855997A 1997-09-24 1997-09-24 基板検査装置 Expired - Fee Related JP3944285B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25855997A JP3944285B2 (ja) 1997-09-24 1997-09-24 基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25855997A JP3944285B2 (ja) 1997-09-24 1997-09-24 基板検査装置

Publications (3)

Publication Number Publication Date
JPH1194756A JPH1194756A (ja) 1999-04-09
JPH1194756A5 true JPH1194756A5 (enExample) 2005-06-16
JP3944285B2 JP3944285B2 (ja) 2007-07-11

Family

ID=17321920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25855997A Expired - Fee Related JP3944285B2 (ja) 1997-09-24 1997-09-24 基板検査装置

Country Status (1)

Country Link
JP (1) JP3944285B2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4673953B2 (ja) * 2000-03-21 2011-04-20 オリンパス株式会社 マクロ照明装置
JP2002098641A (ja) * 2000-09-21 2002-04-05 Olympus Optical Co Ltd 大型基板検査装置
TWI264532B (en) * 2001-11-05 2006-10-21 Olympus Corp Substrate inspection device
JP4517574B2 (ja) * 2002-11-26 2010-08-04 凸版印刷株式会社 カラーフィルタ評価方法
JP2006038825A (ja) * 2004-01-22 2006-02-09 Ntn Corp 微細パターン観察装置およびそれを用いた微細パターン修正装置
JP2008082705A (ja) * 2006-09-25 2008-04-10 Olympus Corp 透過照明ステージおよび基板検査装置
CN101852744B (zh) * 2009-03-30 2012-11-21 松下电器产业株式会社 拍摄检查装置及拍摄检查方法
JP4762351B2 (ja) * 2009-03-30 2011-08-31 パナソニック株式会社 撮像検査装置および撮像検査方法
CN104656682B (zh) * 2014-12-30 2017-07-14 中国科学院长春光学精密机械与物理研究所 一种宏微两级驱动精密定位机构
CN109239068B (zh) * 2018-09-13 2021-04-16 山东大学 一种针对宏微运动平台的视觉检测装置及方法
KR102242093B1 (ko) * 2019-07-30 2021-04-20 (주)샘테크 메탈 마스크 검사 장치

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