JP3944285B2 - 基板検査装置 - Google Patents

基板検査装置 Download PDF

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Publication number
JP3944285B2
JP3944285B2 JP25855997A JP25855997A JP3944285B2 JP 3944285 B2 JP3944285 B2 JP 3944285B2 JP 25855997 A JP25855997 A JP 25855997A JP 25855997 A JP25855997 A JP 25855997A JP 3944285 B2 JP3944285 B2 JP 3944285B2
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Japan
Prior art keywords
substrate
observation unit
inspected
micro
observation
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Expired - Fee Related
Application number
JP25855997A
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English (en)
Japanese (ja)
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JPH1194756A (ja
JPH1194756A5 (enExample
Inventor
郁三 中村
裕幸 岡平
晃正 森田
順一 小野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
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Olympus Corp
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Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP25855997A priority Critical patent/JP3944285B2/ja
Publication of JPH1194756A publication Critical patent/JPH1194756A/ja
Publication of JPH1194756A5 publication Critical patent/JPH1194756A5/ja
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Publication of JP3944285B2 publication Critical patent/JP3944285B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP25855997A 1997-09-24 1997-09-24 基板検査装置 Expired - Fee Related JP3944285B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25855997A JP3944285B2 (ja) 1997-09-24 1997-09-24 基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25855997A JP3944285B2 (ja) 1997-09-24 1997-09-24 基板検査装置

Publications (3)

Publication Number Publication Date
JPH1194756A JPH1194756A (ja) 1999-04-09
JPH1194756A5 JPH1194756A5 (enExample) 2005-06-16
JP3944285B2 true JP3944285B2 (ja) 2007-07-11

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ID=17321920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25855997A Expired - Fee Related JP3944285B2 (ja) 1997-09-24 1997-09-24 基板検査装置

Country Status (1)

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JP (1) JP3944285B2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4673953B2 (ja) * 2000-03-21 2011-04-20 オリンパス株式会社 マクロ照明装置
JP2002098641A (ja) * 2000-09-21 2002-04-05 Olympus Optical Co Ltd 大型基板検査装置
TWI264532B (en) * 2001-11-05 2006-10-21 Olympus Corp Substrate inspection device
JP4517574B2 (ja) * 2002-11-26 2010-08-04 凸版印刷株式会社 カラーフィルタ評価方法
JP2006038825A (ja) * 2004-01-22 2006-02-09 Ntn Corp 微細パターン観察装置およびそれを用いた微細パターン修正装置
JP2008082705A (ja) * 2006-09-25 2008-04-10 Olympus Corp 透過照明ステージおよび基板検査装置
JP4762351B2 (ja) * 2009-03-30 2011-08-31 パナソニック株式会社 撮像検査装置および撮像検査方法
CN101852744B (zh) * 2009-03-30 2012-11-21 松下电器产业株式会社 拍摄检查装置及拍摄检查方法
CN104656682B (zh) * 2014-12-30 2017-07-14 中国科学院长春光学精密机械与物理研究所 一种宏微两级驱动精密定位机构
CN109239068B (zh) * 2018-09-13 2021-04-16 山东大学 一种针对宏微运动平台的视觉检测装置及方法
KR102242093B1 (ko) * 2019-07-30 2021-04-20 (주)샘테크 메탈 마스크 검사 장치

Also Published As

Publication number Publication date
JPH1194756A (ja) 1999-04-09

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