JPH11145278A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPH11145278A
JPH11145278A JP9307696A JP30769697A JPH11145278A JP H11145278 A JPH11145278 A JP H11145278A JP 9307696 A JP9307696 A JP 9307696A JP 30769697 A JP30769697 A JP 30769697A JP H11145278 A JPH11145278 A JP H11145278A
Authority
JP
Japan
Prior art keywords
film
forming
plasma
oxide film
resist pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9307696A
Other languages
English (en)
Japanese (ja)
Inventor
Hidenobu Miyamoto
秀信 宮本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to CN97100316A priority Critical patent/CN1075612C/zh
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP9307696A priority patent/JPH11145278A/ja
Publication of JPH11145278A publication Critical patent/JPH11145278A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Arrangement Or Mounting Of Control Devices For Change-Speed Gearing (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP9307696A 1996-01-11 1997-11-10 半導体装置の製造方法 Pending JPH11145278A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN97100316A CN1075612C (zh) 1996-01-11 1997-01-13 汽车用换档装置
JP9307696A JPH11145278A (ja) 1997-11-10 1997-11-10 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9307696A JPH11145278A (ja) 1997-11-10 1997-11-10 半導体装置の製造方法

Publications (1)

Publication Number Publication Date
JPH11145278A true JPH11145278A (ja) 1999-05-28

Family

ID=17972135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9307696A Pending JPH11145278A (ja) 1996-01-11 1997-11-10 半導体装置の製造方法

Country Status (2)

Country Link
JP (1) JPH11145278A (zh)
CN (1) CN1075612C (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000003961A (ja) * 1998-04-16 2000-01-07 St Microelectronics 集積回路およびその製造方法
CN103579089A (zh) * 2012-07-31 2014-02-12 中芯国际集成电路制造(上海)有限公司 半导体结构及其形成方法

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10326118B4 (de) * 2003-06-06 2005-04-14 ZF Lemförder Metallwaren AG Schaltvorrichtung zur mechanisch kopplungsfreien Übertragung von Schaltbefehlen an ein automatisches Kraftfahrzeuggetriebe
CN101028794B (zh) * 2006-03-03 2011-07-27 光阳工业股份有限公司 车辆排档杆装置
JP5352535B2 (ja) 2010-05-31 2013-11-27 株式会社東海理化電機製作所 シフトレバーの支持構造
US8725368B2 (en) * 2010-10-13 2014-05-13 GM Global Technology Operations LLC Rocking enabled shift-by-wire system
JP5995689B2 (ja) * 2012-11-29 2016-09-21 株式会社東海理化電機製作所 シフト装置
KR101519264B1 (ko) * 2013-12-18 2015-05-12 현대자동차주식회사 차량의 변속레버 장치
CN104634575B (zh) * 2014-11-27 2018-09-04 重庆小康工业集团股份有限公司 离合器分离臂工装
CN107489759B (zh) * 2016-08-24 2019-11-22 宝沃汽车（中国）有限公司 换挡杆总成、手自一体式换挡机构和车辆
CN110778699B (zh) * 2018-07-31 2021-05-25 庆昌产业株式会社 变速杆装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5070740A (en) * 1988-03-10 1991-12-10 Dr. Ing. H.C.F. Porsche Ag Shifting arrangement for an automatic transmission of a motor vehicle
DE3807881A1 (de) * 1988-03-10 1989-09-21 Porsche Ag Schaltvorrichtung fuer ein automatikgetriebe eines kraftfahrzeugs
JPH03153957A (ja) * 1989-11-09 1991-07-01 Aisin Aw Co Ltd 車両用自動変速機の手動選択装置
EP0575658B1 (en) * 1992-06-30 1998-10-28 Aisin Aw Co., Ltd. Shift system having a manual speed selecting mechanism for a vehicular automatic transmission

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000003961A (ja) * 1998-04-16 2000-01-07 St Microelectronics 集積回路およびその製造方法
JP4717972B2 (ja) * 1998-04-16 2011-07-06 エスティマイクロエレクトロニクス エスエー 集積回路の製造方法
CN103579089A (zh) * 2012-07-31 2014-02-12 中芯国际集成电路制造(上海)有限公司 半导体结构及其形成方法

Also Published As

Publication number Publication date
CN1075612C (zh) 2001-11-28
CN1161288A (zh) 1997-10-08

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