JPH10189888A5 - - Google Patents

Info

Publication number
JPH10189888A5
JPH10189888A5 JP1997280066A JP28006697A JPH10189888A5 JP H10189888 A5 JPH10189888 A5 JP H10189888A5 JP 1997280066 A JP1997280066 A JP 1997280066A JP 28006697 A JP28006697 A JP 28006697A JP H10189888 A5 JPH10189888 A5 JP H10189888A5
Authority
JP
Japan
Prior art keywords
semiconductor
forming
film
manufacturing
semiconductor region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997280066A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10189888A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9280066A priority Critical patent/JPH10189888A/ja
Priority claimed from JP9280066A external-priority patent/JPH10189888A/ja
Publication of JPH10189888A publication Critical patent/JPH10189888A/ja
Publication of JPH10189888A5 publication Critical patent/JPH10189888A5/ja
Pending legal-status Critical Current

Links

JP9280066A 1996-10-22 1997-10-14 半導体装置及びその製造方法 Pending JPH10189888A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9280066A JPH10189888A (ja) 1996-10-22 1997-10-14 半導体装置及びその製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP8-279091 1996-10-22
JP27909196 1996-10-22
JP9280066A JPH10189888A (ja) 1996-10-22 1997-10-14 半導体装置及びその製造方法

Publications (2)

Publication Number Publication Date
JPH10189888A JPH10189888A (ja) 1998-07-21
JPH10189888A5 true JPH10189888A5 (enExample) 2006-06-22

Family

ID=26553172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9280066A Pending JPH10189888A (ja) 1996-10-22 1997-10-14 半導体装置及びその製造方法

Country Status (1)

Country Link
JP (1) JPH10189888A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060088797A (ko) * 2005-02-02 2006-08-07 최중범 스핀 큐빗 양자전산 로직게이트
JP2007189008A (ja) * 2006-01-12 2007-07-26 Elpida Memory Inc 半導体記憶装置およびその製造方法
KR101374337B1 (ko) 2007-10-18 2014-03-17 삼성전자주식회사 능동소자를 갖는 반도체소자 및 그 제조방법
WO2010150407A1 (ja) * 2009-06-26 2010-12-29 株式会社 東芝 半導体装置

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