JPH089049Y2 - 自動基板供給・収納装置 - Google Patents
自動基板供給・収納装置Info
- Publication number
- JPH089049Y2 JPH089049Y2 JP1987115412U JP11541287U JPH089049Y2 JP H089049 Y2 JPH089049 Y2 JP H089049Y2 JP 1987115412 U JP1987115412 U JP 1987115412U JP 11541287 U JP11541287 U JP 11541287U JP H089049 Y2 JPH089049 Y2 JP H089049Y2
- Authority
- JP
- Japan
- Prior art keywords
- storage
- magazine
- supply
- substrate
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims description 46
- 230000007723 transport mechanism Effects 0.000 claims description 2
- 230000007246 mechanism Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Pile Receivers (AREA)
- Conveyance By Endless Belt Conveyors (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987115412U JPH089049Y2 (ja) | 1987-07-27 | 1987-07-27 | 自動基板供給・収納装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987115412U JPH089049Y2 (ja) | 1987-07-27 | 1987-07-27 | 自動基板供給・収納装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6421147U JPS6421147U (enrdf_load_stackoverflow) | 1989-02-02 |
| JPH089049Y2 true JPH089049Y2 (ja) | 1996-03-13 |
Family
ID=31357045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987115412U Expired - Lifetime JPH089049Y2 (ja) | 1987-07-27 | 1987-07-27 | 自動基板供給・収納装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH089049Y2 (enrdf_load_stackoverflow) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59163899A (ja) * | 1983-03-09 | 1984-09-14 | アルプス電気株式会社 | プリント基板自動搬送装置 |
| JPS61217442A (ja) * | 1985-03-20 | 1986-09-27 | Fujitsu Ltd | ウエ−ハ插入装置 |
-
1987
- 1987-07-27 JP JP1987115412U patent/JPH089049Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6421147U (enrdf_load_stackoverflow) | 1989-02-02 |
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