JPH089049Y2 - Automatic substrate supply / storage device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to an apparatus for automatically supplying and storing a substrate in a processing apparatus.

[Prior Art] Conventionally, in this kind of automatic substrate supply and storage device, as shown in FIG. 8, a substrate 52 mounted on a supply magazine 51 is taken out from the supply magazine 51 at a position 54 by a device such as a belt conveyor 53. Position and then use the supply arm, etc.
It is conveyed to the upper part of 55 and is positioned and fixed to the corner bearing 57 by the clamp bearing 56. The substrate 58, which has been processed by the laser, is stored on the belt conveyor by the storage arm 62.
The system was such that after returning to the 59 position at the position of 60, it was stored in the storage magazine 61 by the belt conveyor 59 and the like.

[Problems to be solved by the invention]

The above-described conventional automatic substrate supply / storage device performs the positioning of the substrate once once until the substrate is fixedly positioned on the mounting table from the supply magazine and before the substrate is stored in the storage magazine. In addition, because it is necessary to use different transportation means before and after each positioning position,
The disadvantage is that it is quite complicated and takes up space, and when changing the size of the board, it takes a lot of time to set up because it requires replacement and adjustment of parts at many places. There are drawbacks. Further, there is a drawback that the cycle time of loading becomes long due to the large number of positioning times.

[Means for solving problems]

In contrast to the conventional automatic substrate supply and storage device described above, the present invention executes from the supply magazine to the mounting table and from the mounting table to the storage magazine by one conveying means, and positioning is performed only on the mounting table. There is a difference.

The automatic substrate supply / storage device of the present invention includes a shelf-type supply magazine in which unprocessed substrates are mounted, a shelf-type storage magazine in which processed substrates are mounted, and A chuck for supply that grips a processed substrate and places the unprocessed substrate on the stage, and a substrate that has been processed on the stage described above and that processed substrate into the storage magazine. A hand chuck unit for accommodating and accommodating is provided by arranging the chuck unit for accommodating and accommodating the supply magazine and the accommodating magazine according to an interval between the supply magazine and the accommodating chuck unit. And a carrying mechanism for carrying from the position where the supply magazine and the storage magazine are arranged to the position where the object table is arranged, by the turning operation by the turning means. With the supply chuck part and the storage chuck part arranged in the transfer direction of the transfer mechanism, the storage chuck part holds the processed substrate on the worktable described above, By the swiveling operation, the storage chuck portion is arranged in parallel with the direction in which the supply magazine and the storage magazine are arranged, and the storage chuck portion is formed on the processed substrate. Is stored in the storage magazine.

[Embodiment] Next, an embodiment of the present invention will be described with reference to the drawings.

1 is a front view of an embodiment of the present invention, FIG. 2 is a left side view of FIG. 1, FIG. 3 is a left side view of FIG. 2, and FIG.
FIG. 5 is a top view of the drawing, FIG. 5 is an explanatory view of its operation, FIG. 6 and FIG.
The drawing is a partial sectional view of FIG.

In the figure, when the operation is started by the start button on the console 1, the empty storage magazine 2 for inserting the substrate 9 is lifted to the upper limit by the lifter 3. Next, the hand section 7 having the supply chuck section 5 and the storage chuck section 6 is moved to the upper side of the supply magazine 8 and the storage magazine 2 by the transport section 4. The supply magazine 8 is lifted by the lifter 10 to a height at which the supply chuck portion 5 can grip the substrate 9. Each magazine is designed so that the upper surface and the moving direction of the hand portion 7 are free. The supply chuck unit 5 holds the unprocessed substrate 9 in the supply magazine 8,
The hand unit 7 is moved by the transport unit 4 from the upper side of the magazine to the mounting table 12. The storage chuck section 6 is swung by a swivel mechanism 11 provided in the hand section 7 and is moved so as to be arranged in the same direction (on the same straight line) as the conveying direction of the supply chuck section 5 and the conveying section 4. The hand unit 7 is
The transfer unit 4 moves it onto the stage 12, and the storage chuck unit 6 is lowered by the cylinder 13 to grab the processed substrate 9 on the stage 12 and then rise. Next, the hand unit 7 is further moved by the transport unit 4, and the supply chuck unit 5 is moved to the cylinder.
The substrate 14 is lowered by 14 and the unprocessed substrate 9 is placed on the stage 12, and then raised. The substrate 9 is fixed to a corner bearing 18 by a clamp bearing 17. Next, the storage chuck section 6 is swung by the swivel mechanism 11 provided in the hand section 7, and is parallel to the supply chuck section 5 in the direction in which the supply magazine 8 and the storage magazine 2 are arranged. Are arranged so that Then, the hand unit 7 is moved to the upper side of the magazine again by the transport unit 4. After the processed substrate 9 held by the storage chuck portion 6 is released in the storage magazine 2, the storage magazine 2 is lowered by one stage of the substrate.
Further, the supply magazine 8 again rises to a height at which the supply chuck portion 5 can grasp the unprocessed substrate 9.
The above operation is repeated until the unprocessed substrate 9 in the supply magazine 8 is exhausted. The control unit 15 is mounted in the pedestal 16.

[Effect of device]

As described above, according to the present invention, the supply hand of the automatic substrate supply / storage device enters the supply magazine, grabs the substrate, and conveys it to the stage. By entering the board and storing the board,
The transport mechanism between the magazine and the stage can be simplified and the space can be saved, and the substrate size can be changed in a short time by deleting the positioning portion. Further, since the positioning is performed only once, there is an effect that the cycle time of loading can be shortened.
Further, according to the present invention, by swiveling the supply hand and the storage hand provided with the hand part, first, the processed substrate on the stage is grasped by the storage hand, and then the unprocessed substrate held by the supply hand is grasped. Since the substrate can be placed on the stage, the exchange of the substrate on the stage can be performed only by reciprocating the hand part between the magazine and the stage, which greatly reduces the processing time. Reductions have also been realized.

[Brief description of drawings]

1 is a front view of an embodiment of the present invention, FIG. 2 is a left side view of FIG. 1, FIG. 3 is a left side view of FIG. 2, and FIG. 4 is a top view of FIG. FIG. 5 is an operation explanatory view of the embodiment of the present invention, and FIG.
FIG. 7 and FIG. 7 are partial sectional views of FIG. 5, FIG. 8 is an explanatory view of the operation of the conventional example, and FIGS. 9 and 10 are partial sectional views of FIG.

Claims (1)

[Scope of utility model registration request] 1. A shelf-type supply magazine on which an unprocessed substrate is mounted, a shelf-type storage magazine on which a processed substrate is mounted, and an inside of the supply magazine to grab the unprocessed substrate. A chuck for supply that places the unprocessed substrate on the stage, and a storage device that holds the processed substrate on the stage and stores the processed substrate into the storage magazine. A chuck unit is disposed according to the interval at which the supply magazine and the storage magazine are installed, and a hand unit including a swiveling unit that swivels the storage chuck unit; and the hand unit includes the supply magazine and the storage unit. A transport mechanism for transporting from a position where the magazine is arranged to a position where the object platform is arranged, and by the turning operation by the turning means, In a state where the supply chuck portion and the storage chuck portion are arranged in the transport direction, the storage chuck portion holds the processed substrate on the worktable described above, and by the turning operation by the turning means, With the supply chuck section and the storage chuck section arranged in parallel to the direction in which the supply magazine and the storage magazine are arranged, the storage chuck section stores the processed substrate in the storage magazine. An automatic substrate supply / storage device that is stored inside.