JPH0749796Y2 - ウエハの保護シート剥がし装置 - Google Patents

ウエハの保護シート剥がし装置

Info

Publication number
JPH0749796Y2
JPH0749796Y2 JP1989129301U JP12930189U JPH0749796Y2 JP H0749796 Y2 JPH0749796 Y2 JP H0749796Y2 JP 1989129301 U JP1989129301 U JP 1989129301U JP 12930189 U JP12930189 U JP 12930189U JP H0749796 Y2 JPH0749796 Y2 JP H0749796Y2
Authority
JP
Japan
Prior art keywords
wafer
peeling
protective sheet
peeling tape
suction table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989129301U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0367442U (enrdf_load_stackoverflow
Inventor
泰国 佐藤
誠治 高橋
幸栄 丸山
Original Assignee
松下電子工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 松下電子工業株式会社 filed Critical 松下電子工業株式会社
Priority to JP1989129301U priority Critical patent/JPH0749796Y2/ja
Publication of JPH0367442U publication Critical patent/JPH0367442U/ja
Application granted granted Critical
Publication of JPH0749796Y2 publication Critical patent/JPH0749796Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
JP1989129301U 1989-11-07 1989-11-07 ウエハの保護シート剥がし装置 Expired - Lifetime JPH0749796Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989129301U JPH0749796Y2 (ja) 1989-11-07 1989-11-07 ウエハの保護シート剥がし装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989129301U JPH0749796Y2 (ja) 1989-11-07 1989-11-07 ウエハの保護シート剥がし装置

Publications (2)

Publication Number Publication Date
JPH0367442U JPH0367442U (enrdf_load_stackoverflow) 1991-07-01
JPH0749796Y2 true JPH0749796Y2 (ja) 1995-11-13

Family

ID=31676940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989129301U Expired - Lifetime JPH0749796Y2 (ja) 1989-11-07 1989-11-07 ウエハの保護シート剥がし装置

Country Status (1)

Country Link
JP (1) JPH0749796Y2 (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100486290B1 (ko) * 2002-12-23 2005-04-29 삼성전자주식회사 반도체 패키지 조립방법 및 반도체 패키지 공정의보호테이프 제거장치
JP2007057986A (ja) * 2005-08-25 2007-03-08 Nakabayashi Co Ltd 路線図
JP2007171472A (ja) * 2005-12-21 2007-07-05 Pia Corp 地図
JP4597061B2 (ja) * 2006-02-09 2010-12-15 株式会社ディスコ 保護テープの剥離方法
JP4642057B2 (ja) * 2007-10-15 2011-03-02 リンテック株式会社 シート剥離装置および方法
JP5317280B2 (ja) * 2009-07-16 2013-10-16 株式会社タカトリ 保護テープの剥離装置
JP2012028814A (ja) * 2011-10-24 2012-02-09 Lintec Corp シート剥離装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60187541U (ja) * 1984-05-21 1985-12-12 三菱電機株式会社 半導体ウエ−ハの保護テ−プはがし装置
JPH0691153B2 (ja) * 1987-11-28 1994-11-14 日東電工株式会社 保護フイルムの剥離方法

Also Published As

Publication number Publication date
JPH0367442U (enrdf_load_stackoverflow) 1991-07-01

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Legal Events

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