JPH0735393Y2 - 縦型プラズマ処理機のウエハー搬送装置 - Google Patents
縦型プラズマ処理機のウエハー搬送装置Info
- Publication number
- JPH0735393Y2 JPH0735393Y2 JP1989087039U JP8703989U JPH0735393Y2 JP H0735393 Y2 JPH0735393 Y2 JP H0735393Y2 JP 1989087039 U JP1989087039 U JP 1989087039U JP 8703989 U JP8703989 U JP 8703989U JP H0735393 Y2 JPH0735393 Y2 JP H0735393Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cassette
- arm
- plasma processing
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 claims description 337
- 230000007246 mechanism Effects 0.000 claims description 111
- 230000007723 transport mechanism Effects 0.000 description 9
- 230000003028 elevating effect Effects 0.000 description 7
- 230000001174 ascending effect Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000004380 ashing Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 241000270722 Crocodylidae Species 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- LNNWVNGFPYWNQE-GMIGKAJZSA-N desomorphine Chemical compound C1C2=CC=C(O)C3=C2[C@]24CCN(C)[C@H]1[C@@H]2CCC[C@@H]4O3 LNNWVNGFPYWNQE-GMIGKAJZSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989087039U JPH0735393Y2 (ja) | 1989-07-25 | 1989-07-25 | 縦型プラズマ処理機のウエハー搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989087039U JPH0735393Y2 (ja) | 1989-07-25 | 1989-07-25 | 縦型プラズマ処理機のウエハー搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0327049U JPH0327049U (en, 2012) | 1991-03-19 |
| JPH0735393Y2 true JPH0735393Y2 (ja) | 1995-08-09 |
Family
ID=31636693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989087039U Expired - Lifetime JPH0735393Y2 (ja) | 1989-07-25 | 1989-07-25 | 縦型プラズマ処理機のウエハー搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0735393Y2 (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023167353A1 (ko) * | 2022-03-04 | 2023-09-07 | 주식회사 윈텍오토메이션 | Agv를 이용한 초경인서트 공급시스템 |
| WO2023167352A1 (ko) * | 2022-03-04 | 2023-09-07 | 주식회사 윈텍오토메이션 | Agv를 이용한 초경인서트 공급시스템 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002260787A (ja) * | 2001-02-28 | 2002-09-13 | Molex Inc | シールド付きライトアングルコネクタ |
| JP4177415B2 (ja) | 2006-05-10 | 2008-11-05 | 日本航空電子工業株式会社 | コネクタ |
| WO2025121212A1 (ja) * | 2023-12-04 | 2025-06-12 | Ｋｉｎｇｓｅｍｉ Ｊａｐａｎ株式会社 | 基板製造装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5860552A (ja) * | 1981-10-05 | 1983-04-11 | Tokyo Denshi Kagaku Kabushiki | 縦型自動プラズマ処理装置 |
| JPS63143833A (ja) * | 1986-12-08 | 1988-06-16 | Hitachi Electronics Eng Co Ltd | 面板搬送機構自動制御方式 |
-
1989
- 1989-07-25 JP JP1989087039U patent/JPH0735393Y2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023167353A1 (ko) * | 2022-03-04 | 2023-09-07 | 주식회사 윈텍오토메이션 | Agv를 이용한 초경인서트 공급시스템 |
| WO2023167352A1 (ko) * | 2022-03-04 | 2023-09-07 | 주식회사 윈텍오토메이션 | Agv를 이용한 초경인서트 공급시스템 |
| KR20230130952A (ko) * | 2022-03-04 | 2023-09-12 | 주식회사 윈텍오토메이션 | Agv를 이용한 초경인서트 공급시스템 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0327049U (en, 2012) | 1991-03-19 |
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