JPH071795Y2 - 浸漬型基板洗浄装置 - Google Patents
浸漬型基板洗浄装置Info
- Publication number
- JPH071795Y2 JPH071795Y2 JP1991079854U JP7985491U JPH071795Y2 JP H071795 Y2 JPH071795 Y2 JP H071795Y2 JP 1991079854 U JP1991079854 U JP 1991079854U JP 7985491 U JP7985491 U JP 7985491U JP H071795 Y2 JPH071795 Y2 JP H071795Y2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- cleaning liquid
- substrate
- straightening
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004140 cleaning Methods 0.000 title claims description 122
- 239000000758 substrate Substances 0.000 title claims description 66
- 238000007654 immersion Methods 0.000 title claims description 15
- 239000007788 liquid Substances 0.000 claims description 77
- 238000012545 processing Methods 0.000 claims description 58
- 238000000034 method Methods 0.000 claims description 8
- 230000000630 rising effect Effects 0.000 claims description 6
- 238000000638 solvent extraction Methods 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 125000006850 spacer group Chemical group 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 239000000969 carrier Substances 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000001174 ascending effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011295 pitch Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1991079854U JPH071795Y2 (ja) | 1990-09-10 | 1991-09-05 | 浸漬型基板洗浄装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9538190 | 1990-09-10 | ||
| JP2-95381 | 1990-09-10 | ||
| JP1991079854U JPH071795Y2 (ja) | 1990-09-10 | 1991-09-05 | 浸漬型基板洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0497336U JPH0497336U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-08-24 |
| JPH071795Y2 true JPH071795Y2 (ja) | 1995-01-18 |
Family
ID=31948714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1991079854U Expired - Lifetime JPH071795Y2 (ja) | 1990-09-10 | 1991-09-05 | 浸漬型基板洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH071795Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2872895B2 (ja) * | 1993-10-05 | 1999-03-24 | 株式会社カイジョー | 基板保持カセット |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61125136A (ja) * | 1984-11-22 | 1986-06-12 | Hitachi Ltd | 処理槽 |
| JPS63271937A (ja) * | 1987-04-28 | 1988-11-09 | Matsushita Electric Ind Co Ltd | 洗浄装置 |
| JPH0650982Y2 (ja) * | 1988-11-30 | 1994-12-21 | 大日本スクリーン製造株式会社 | 浸漬型基板処理装置 |
-
1991
- 1991-09-05 JP JP1991079854U patent/JPH071795Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0497336U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-08-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |