JPH0654724B2 - 電気膜抵抗器およびその製造法 - Google Patents
電気膜抵抗器およびその製造法Info
- Publication number
- JPH0654724B2 JPH0654724B2 JP63170736A JP17073688A JPH0654724B2 JP H0654724 B2 JPH0654724 B2 JP H0654724B2 JP 63170736 A JP63170736 A JP 63170736A JP 17073688 A JP17073688 A JP 17073688A JP H0654724 B2 JPH0654724 B2 JP H0654724B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- recess
- film
- connection
- metal film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000000758 substrate Substances 0.000 claims description 33
- 229910052751 metal Inorganic materials 0.000 claims description 32
- 239000002184 metal Substances 0.000 claims description 32
- 239000000463 material Substances 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 20
- 238000000926 separation method Methods 0.000 claims description 13
- 239000011521 glass Substances 0.000 claims description 12
- 239000012528 membrane Substances 0.000 claims description 9
- 239000000919 ceramic Substances 0.000 claims description 7
- 239000000843 powder Substances 0.000 claims description 6
- 239000011241 protective layer Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 238000007650 screen-printing Methods 0.000 claims description 3
- 238000010304 firing Methods 0.000 claims description 2
- 238000012545 processing Methods 0.000 claims description 2
- 238000007711 solidification Methods 0.000 claims description 2
- 230000008023 solidification Effects 0.000 claims description 2
- 239000010408 film Substances 0.000 description 44
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 229910052697 platinum Inorganic materials 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- KDXKERNSBIXSRK-UHFFFAOYSA-N Lysine Natural products NCCCCC(N)C(O)=O KDXKERNSBIXSRK-UHFFFAOYSA-N 0.000 description 1
- 239000004472 Lysine Substances 0.000 description 1
- 235000008331 Pinus X rigitaeda Nutrition 0.000 description 1
- 235000011613 Pinus brutia Nutrition 0.000 description 1
- 241000018646 Pinus brutia Species 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- BBKFSSMUWOMYPI-UHFFFAOYSA-N gold palladium Chemical compound [Pd].[Au] BBKFSSMUWOMYPI-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000006060 molten glass Substances 0.000 description 1
- 235000011837 pasties Nutrition 0.000 description 1
- 125000005498 phthalate group Chemical class 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/006—Thin film resistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/28—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals
- H01C17/281—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals by thick film techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/28—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals
- H01C17/281—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals by thick film techniques
- H01C17/283—Precursor compositions therefor, e.g. pastes, inks, glass frits
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
- Details Of Resistors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19873722576 DE3722576A1 (de) | 1987-07-08 | 1987-07-08 | Elektrischer schichtwiderstand und verfahren zu dessen herstellung |
| DE3722576.6 | 1987-07-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6436001A JPS6436001A (en) | 1989-02-07 |
| JPH0654724B2 true JPH0654724B2 (ja) | 1994-07-20 |
Family
ID=6331153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63170736A Expired - Lifetime JPH0654724B2 (ja) | 1987-07-08 | 1988-07-08 | 電気膜抵抗器およびその製造法 |
Country Status (9)
| Country | Link |
|---|---|
| US (2) | US4853671A (OSRAM) |
| JP (1) | JPH0654724B2 (OSRAM) |
| CA (1) | CA1306519C (OSRAM) |
| DE (1) | DE3722576A1 (OSRAM) |
| DK (1) | DK170386B1 (OSRAM) |
| FR (1) | FR2618015B1 (OSRAM) |
| GB (1) | GB2206741B (OSRAM) |
| IT (1) | IT1223670B (OSRAM) |
| NL (1) | NL191809C (OSRAM) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4001337C1 (OSRAM) * | 1990-01-18 | 1991-04-25 | Degussa Ag, 6000 Frankfurt, De | |
| GB2240885A (en) * | 1990-02-08 | 1991-08-14 | Crystalate Electronics | Potentiometer connector |
| DE9015206U1 (de) * | 1990-11-05 | 1991-01-17 | Isabellenhütte Heusler GmbH KG, 6340 Dillenburg | Widerstandsanordnung in SMD-Bauweise |
| US7563695B2 (en) * | 2002-03-27 | 2009-07-21 | Gsi Group Corporation | Method and system for high-speed precise laser trimming and scan lens for use therein |
| US6951995B2 (en) | 2002-03-27 | 2005-10-04 | Gsi Lumonics Corp. | Method and system for high-speed, precise micromachining an array of devices |
| US7358157B2 (en) * | 2002-03-27 | 2008-04-15 | Gsi Group Corporation | Method and system for high-speed precise laser trimming, scan lens system for use therein and electrical device produced thereby |
| US20060199354A1 (en) * | 2002-03-27 | 2006-09-07 | Bo Gu | Method and system for high-speed precise laser trimming and electrical device produced thereby |
| KR100826633B1 (ko) | 2002-03-28 | 2008-05-02 | 지에스아이 루모닉스 코포레이션 | 소자배열의 고속, 정밀한 마이크로머시닝을 위한 방법 및 시스템 |
| JP2006156913A (ja) * | 2004-12-01 | 2006-06-15 | Ricoh Co Ltd | プリント配線基板 |
| US20070215575A1 (en) * | 2006-03-15 | 2007-09-20 | Bo Gu | Method and system for high-speed, precise, laser-based modification of one or more electrical elements |
| US7528397B2 (en) * | 2006-03-31 | 2009-05-05 | Boyer Thomas R | Thermal infrared signage method with application to infrared weapon sight calibration |
| CN102785801A (zh) * | 2012-05-04 | 2012-11-21 | 上海派莎实业有限公司 | 一种折叠包装设备 |
| CN107041061A (zh) * | 2015-12-22 | 2017-08-11 | 德国贺利氏公司 | 通过厚膜浆料增强的直接覆铜基板 |
| CN113284688B (zh) * | 2021-05-17 | 2024-09-03 | 上海福宜纳米薄膜技术有限公司 | 双精调线高温薄膜铂电阻及其调阻方法 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1248780B (OSRAM) * | 1967-08-31 | |||
| DE1714031U (de) * | 1955-10-14 | 1955-12-29 | Willy Mock | Drahtgewickelter elektrischer widerstand. |
| US3202951A (en) * | 1961-08-16 | 1965-08-24 | Krinsky Albert | Alloys and electrical transducers |
| US3469015A (en) * | 1967-01-13 | 1969-09-23 | Sierracin Corp | Conductive panel |
| US3458847A (en) * | 1967-09-21 | 1969-07-29 | Fairchild Camera Instr Co | Thin-film resistors |
| US3761860A (en) * | 1970-05-20 | 1973-09-25 | Alps Electric Co Ltd | Printed circuit resistor |
| GB1415644A (en) * | 1971-11-18 | 1975-11-26 | Johnson Matthey Co Ltd | Resistance thermometer element |
| JPS4954846A (OSRAM) * | 1972-09-27 | 1974-05-28 | ||
| JPS5113763U (OSRAM) * | 1974-07-19 | 1976-01-31 | ||
| JPS5217035A (en) * | 1975-07-30 | 1977-02-08 | Toshiba Corp | Thermal recording head |
| DE7629727U1 (de) * | 1976-09-23 | 1976-12-30 | Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler, 6000 Frankfurt | Messwiderstand fuer widerstandsthermometer |
| US4286249A (en) * | 1978-03-31 | 1981-08-25 | Vishay Intertechnology, Inc. | Attachment of leads to precision resistors |
| JPS5826481Y2 (ja) * | 1979-01-19 | 1983-06-08 | ティーディーケイ株式会社 | 正特性サ−ミスタ |
| US4272739A (en) * | 1979-10-18 | 1981-06-09 | Morton Nesses | High-precision electrical signal attenuator structures |
| US4467312A (en) * | 1980-12-23 | 1984-08-21 | Tokyo Shibaura Denki Kabushiki Kaisha | Semiconductor resistor device |
| JPS6221503U (OSRAM) * | 1985-07-24 | 1987-02-09 | ||
| JPS6286861A (ja) * | 1985-10-14 | 1987-04-21 | Fuji Photo Film Co Ltd | 電荷転送素子の出力装置 |
| DE3539318A1 (de) * | 1985-11-06 | 1987-05-07 | Almik Handelsgesellschaft Fuer | Verfahren zur herstellung von elektrischen festwiderstaenden sowie nach dem verfahren hergestellter festwiderstand |
-
1987
- 1987-07-08 DE DE19873722576 patent/DE3722576A1/de active Granted
-
1988
- 1988-06-03 DK DK302488A patent/DK170386B1/da active
- 1988-06-27 US US07/211,991 patent/US4853671A/en not_active Expired - Fee Related
- 1988-06-28 CA CA000570647A patent/CA1306519C/en not_active Expired - Lifetime
- 1988-07-07 IT IT67640/88A patent/IT1223670B/it active
- 1988-07-07 GB GB8816210A patent/GB2206741B/en not_active Expired - Lifetime
- 1988-07-07 NL NL8801720A patent/NL191809C/xx not_active IP Right Cessation
- 1988-07-08 JP JP63170736A patent/JPH0654724B2/ja not_active Expired - Lifetime
- 1988-07-08 FR FR8809315A patent/FR2618015B1/fr not_active Expired - Fee Related
-
1989
- 1989-04-10 US US07/335,960 patent/US4910492A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US4910492A (en) | 1990-03-20 |
| DK302488D0 (da) | 1988-06-03 |
| US4853671A (en) | 1989-08-01 |
| DK302488A (da) | 1989-01-09 |
| DE3722576C2 (OSRAM) | 1990-04-12 |
| NL191809C (nl) | 1996-08-02 |
| GB8816210D0 (en) | 1988-08-10 |
| GB2206741A (en) | 1989-01-11 |
| DE3722576A1 (de) | 1989-01-19 |
| CA1306519C (en) | 1992-08-18 |
| FR2618015A1 (fr) | 1989-01-13 |
| IT8867640A0 (it) | 1988-07-07 |
| DK170386B1 (da) | 1995-08-14 |
| NL191809B (nl) | 1996-04-01 |
| GB2206741B (en) | 1990-08-15 |
| NL8801720A (nl) | 1989-02-01 |
| FR2618015B1 (fr) | 1993-12-24 |
| IT1223670B (it) | 1990-09-29 |
| JPS6436001A (en) | 1989-02-07 |
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