JPH0642003B2 - 光学部品の反射防止膜とその形成方法 - Google Patents

光学部品の反射防止膜とその形成方法

Info

Publication number
JPH0642003B2
JPH0642003B2 JP58173848A JP17384883A JPH0642003B2 JP H0642003 B2 JPH0642003 B2 JP H0642003B2 JP 58173848 A JP58173848 A JP 58173848A JP 17384883 A JP17384883 A JP 17384883A JP H0642003 B2 JPH0642003 B2 JP H0642003B2
Authority
JP
Japan
Prior art keywords
film
substrate
refractive index
sio
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58173848A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6064301A (ja
Inventor
一 市川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP58173848A priority Critical patent/JPH0642003B2/ja
Priority to US06/648,729 priority patent/US4599272A/en
Priority to DE3434583A priority patent/DE3434583A1/de
Publication of JPS6064301A publication Critical patent/JPS6064301A/ja
Publication of JPH0642003B2 publication Critical patent/JPH0642003B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3447—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide
    • C03C17/3452—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide comprising a fluoride
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/29—Mixtures
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/151—Deposition methods from the vapour phase by vacuum evaporation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31507—Of polycarbonate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31667—Next to addition polymer from unsaturated monomers, or aldehyde or ketone condensation product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Surface Treatment Of Glass (AREA)
JP58173848A 1983-09-20 1983-09-20 光学部品の反射防止膜とその形成方法 Expired - Lifetime JPH0642003B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP58173848A JPH0642003B2 (ja) 1983-09-20 1983-09-20 光学部品の反射防止膜とその形成方法
US06/648,729 US4599272A (en) 1983-09-20 1984-09-07 Anti-reflection coating for optical component and method for forming the same
DE3434583A DE3434583A1 (de) 1983-09-20 1984-09-20 Reflexvermindernde beschichtung fuer ein optisches bauteil und verfahren zu ihrer ausbildung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58173848A JPH0642003B2 (ja) 1983-09-20 1983-09-20 光学部品の反射防止膜とその形成方法

Publications (2)

Publication Number Publication Date
JPS6064301A JPS6064301A (ja) 1985-04-12
JPH0642003B2 true JPH0642003B2 (ja) 1994-06-01

Family

ID=15968275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58173848A Expired - Lifetime JPH0642003B2 (ja) 1983-09-20 1983-09-20 光学部品の反射防止膜とその形成方法

Country Status (3)

Country Link
US (1) US4599272A (enExample)
JP (1) JPH0642003B2 (enExample)
DE (1) DE3434583A1 (enExample)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61117503A (ja) * 1984-11-14 1986-06-04 Shinku Kikai Kogyo Kk フツ化物被膜の形成方法
US4811551A (en) * 1985-04-30 1989-03-14 Nambu Electric Co., Ltd. Packaging apparatus for packaging eggs, etc.
US4911546A (en) * 1985-12-20 1990-03-27 Cohen Michael L Lens reducing visual noise for VDT viewers
US5080688A (en) * 1985-12-20 1992-01-14 Cohen Michael L Colored plastic lens reducing visual noise for VDT viewers
FR2598520B1 (fr) * 1986-01-21 1994-01-28 Seiko Epson Corp Pellicule protectrice minerale
US5783299A (en) * 1986-01-21 1998-07-21 Seiko Epson Corporation Polarizer plate with anti-stain layer
US4783373A (en) * 1986-04-18 1988-11-08 Optical Coating Laboratory, Inc. Article with thin film coating having an enhanced emissivity and reduced absorption of radiant energy
DE3786835T2 (de) * 1986-05-29 1994-02-24 Sumitomo Chemical Co Nicht-reflektierende Scheibe für eine Anzeigeeinheit.
US5759643A (en) * 1987-01-16 1998-06-02 Seiko Epson Corporation Polarizing plate and method of production
US4815962A (en) * 1987-12-11 1989-03-28 Polaroid Corporation Process for coating synthetic optical substrates
US4980220A (en) * 1988-01-25 1990-12-25 Phillips Petroleum Company Iridescent plastics and process for producing the same
JPH01273001A (ja) * 1988-04-25 1989-10-31 Olympus Optical Co Ltd 合成樹脂製光学部品の反射防止膜
AU652220B2 (en) * 1991-02-15 1994-08-18 Toray Industries, Inc. Plastic optical articles
JPH0643304A (ja) * 1992-07-24 1994-02-18 Nikon Corp 反射防止膜及び反射防止膜付き光学部品
US5747152A (en) * 1993-12-02 1998-05-05 Dai Nippon Printing Co., Ltd. Transparent functional membrane containing functional ultrafine particles, transparent functional film, and process for producing the same
FR2727107B1 (fr) * 1994-11-21 1996-12-27 Saint Gobain Vitrage Vitrage muni d'au moins une couche mince et son procede d'obtention
US5662395A (en) * 1995-06-07 1997-09-02 Nova Solutions, Inc. Underdesk computer desk structure with antireflecting viewing window
WO1997008357A1 (en) * 1995-08-30 1997-03-06 Nashua Corporation Anti-reflective coating
US5902634A (en) * 1996-01-17 1999-05-11 Courtaulds Performance Films Permeable solar control film
FR2745284B1 (fr) * 1996-02-22 1998-04-30 Saint Gobain Vitrage Substrat transparent muni d'un revetement de couches minces
DE69735727T2 (de) * 1997-01-27 2007-01-04 Peter D. Louisville Haaland Verfahren zur verminderung der reflexion von optischen substraten
US6172812B1 (en) 1997-01-27 2001-01-09 Peter D. Haaland Anti-reflection coatings and coated articles
CN1130575C (zh) * 1997-05-16 2003-12-10 保谷株式会社 具有抗反射膜的塑料光学器件以及用来使抗反射膜的厚度均一的机构
US5993898A (en) * 1997-05-19 1999-11-30 Nikon Corporation Fabrication method and structure for multilayer optical anti-reflection coating, and optical component and optical system using multilayer optical anti-reflection coating
EP0945254B1 (en) * 1998-03-17 2004-12-22 Chi Mei Optoelectronics Corporation Material comprising an anti-reflective coating on a flexible glass substrate
JP3533950B2 (ja) * 1998-08-07 2004-06-07 トヨタ自動車株式会社 非線形光学シリカ薄膜の製造方法及び非線形光学シリカ素子
CA2281265C (en) * 1998-09-22 2003-12-16 Toyota Jidosha Kabushiki Kaisha Method for manufacturing a nonlinear optical thin film
AU2059600A (en) * 1998-12-31 2000-07-31 Optical Coating Laboratory, Inc. Wavelength selective optical switch
US6582823B1 (en) 1999-04-30 2003-06-24 North Carolina State University Wear-resistant polymeric articles and methods of making the same
JP2001295032A (ja) * 2000-02-10 2001-10-26 Itochu Fine Chemical Corp 光学複合薄膜の形成方法およびそれを用いた光学物品
US6532112B2 (en) * 2001-04-18 2003-03-11 Applied Vacuum Coating Technologies Co., Ltd. Anti-reflection conducting coating
US6942924B2 (en) 2001-10-31 2005-09-13 Chemat Technology, Inc. Radiation-curable anti-reflective coating system
US7059335B2 (en) * 2002-01-31 2006-06-13 Novartis Ag Process for treating moulds or mould halves for the production of ophthalmic lenses
US20040005416A1 (en) * 2002-07-03 2004-01-08 Cosmos Vacuum Technology Corporation Method for making an anti-reflection coating on a substrate for the production of a polarizer
DE102004027842A1 (de) * 2004-06-08 2006-01-12 Institut für Neue Materialien Gemeinnützige GmbH Abrieb- und kratzfeste Beschichtungen mit niedriger Brechzahl auf einem Substrat
JP2009007636A (ja) * 2007-06-28 2009-01-15 Sony Corp 低屈折率膜及びその成膜方法、並びに反射防止膜
US20100101937A1 (en) * 2008-10-29 2010-04-29 Applied Vacuum Coating Technologies Co., Ltd. Method of fabricating transparent conductive film
CN117623636B (zh) * 2022-08-10 2026-01-06 荣耀终端股份有限公司 玻璃盖板及其制备方法、电子设备

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US2490263A (en) * 1943-01-20 1949-12-06 Libbey Owens Ford Glass Co Method of producing low light reflecting films on glass surfaces
US2641954A (en) * 1950-05-06 1953-06-16 Eastman Kodak Co Protective coatings for optical elements and methods for applying them
US3356522A (en) * 1964-02-10 1967-12-05 Mc Donnell Douglas Corp Polycarbonate film containing an antireflection coating
US3356523A (en) * 1964-02-10 1967-12-05 Mc Donnell Douglas Corp Polystyrene film containing an antireflection coating
US3958042A (en) * 1971-04-05 1976-05-18 Agency Of Industrial Science & Technology Method for manufacture of reflection-proof film
US3804491A (en) * 1971-08-16 1974-04-16 Olympus Optical Co Multilayer reflection proof film
US3984581A (en) * 1973-02-28 1976-10-05 Carl Zeiss-Stiftung Method for the production of anti-reflection coatings on optical elements made of transparent organic polymers
DE2457474C3 (de) * 1974-12-05 1978-10-19 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Verfahren zur Herstellung von reflexmindernden Mehrfachschichten und durch das Verfahren hergestellter optischer Körper
JPS5226237A (en) * 1975-08-25 1977-02-26 Ulvac Corp Process for treating the surface of a lens made of synthesized plastics
US4108751A (en) * 1977-06-06 1978-08-22 King William J Ion beam implantation-sputtering
US4168113A (en) * 1977-07-05 1979-09-18 American Optical Corporation Glass lens with ion-exchanged antireflection coating and process for manufacture thereof
JPS5565239A (en) * 1978-11-10 1980-05-16 Nippon Kogaku Kk <Nikon> Method of forming film of titanium oxide on plastic base plate
US4310614A (en) * 1979-03-19 1982-01-12 Xerox Corporation Method and apparatus for pretreating and depositing thin films on substrates
GB2051511A (en) * 1979-06-18 1981-01-14 Ibm Stabilized oscillators

Also Published As

Publication number Publication date
DE3434583C2 (enExample) 1990-07-12
DE3434583A1 (de) 1985-04-11
US4599272A (en) 1986-07-08
JPS6064301A (ja) 1985-04-12

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