JPH0587974B2 - - Google Patents

Info

Publication number
JPH0587974B2
JPH0587974B2 JP60063424A JP6342485A JPH0587974B2 JP H0587974 B2 JPH0587974 B2 JP H0587974B2 JP 60063424 A JP60063424 A JP 60063424A JP 6342485 A JP6342485 A JP 6342485A JP H0587974 B2 JPH0587974 B2 JP H0587974B2
Authority
JP
Japan
Prior art keywords
oxide film
layer
silicon oxide
semiconductor device
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60063424A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61224340A (ja
Inventor
Takahiro Okabe
Kikuo Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60063424A priority Critical patent/JPS61224340A/ja
Publication of JPS61224340A publication Critical patent/JPS61224340A/ja
Publication of JPH0587974B2 publication Critical patent/JPH0587974B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP60063424A 1985-03-29 1985-03-29 半導体装置 Granted JPS61224340A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60063424A JPS61224340A (ja) 1985-03-29 1985-03-29 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60063424A JPS61224340A (ja) 1985-03-29 1985-03-29 半導体装置

Publications (2)

Publication Number Publication Date
JPS61224340A JPS61224340A (ja) 1986-10-06
JPH0587974B2 true JPH0587974B2 (enrdf_load_stackoverflow) 1993-12-20

Family

ID=13228889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60063424A Granted JPS61224340A (ja) 1985-03-29 1985-03-29 半導体装置

Country Status (1)

Country Link
JP (1) JPS61224340A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01205466A (ja) * 1988-02-10 1989-08-17 Nec Corp 半導体装置およびその製造方法
JPH03126228A (ja) * 1989-10-12 1991-05-29 Nec Corp 半導体集積回路装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57183050A (en) * 1981-05-02 1982-11-11 Fujitsu Ltd Integrated circuit

Also Published As

Publication number Publication date
JPS61224340A (ja) 1986-10-06

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term